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    • 9. 发明申请
    • Apparatus for manufacturing liquid crystal display device
    • 液晶显示装置的制造装置
    • US20060183351A1
    • 2006-08-17
    • US11315063
    • 2005-12-22
    • Yong KimSang KwakJin Seo
    • Yong KimSang KwakJin Seo
    • H01L21/324
    • H01L21/67184H01L21/67745Y10S414/14Y10S438/942Y10S438/949
    • An apparatus for manufacturing a liquid crystal display device is disclosed. A first robot arm at a loading side of the thru-conveyor receives a substrate coated with photoresist and conveys the substrate to a thru-conveyor. A softbake hot plate (SHP) at the unloading side of the thru-conveyor removes solvent from the substrate. A cool plate lowers the substrate temperature from which the solvent is removed. A buffer temporarily stores the substrate having the lowered temperature. A second robot arm between the thru-conveyor, the SHP, the cool plate and a loading side of the buffer, loads/unloads the substrate. A temperature control unit adjusts the substrate temperature unloaded from the buffer. A third robot arm between the unloading side of the buffer, the temperature control unit and an exposure unit that exposes the substrate, loads/unloads the substrate.
    • 公开了一种液晶显示装置的制造装置。 在穿过输送机的装载侧的第一个机器人臂接收涂有光致抗蚀剂的基材,并将基材输送到通过输送机。 通过输送机卸料侧的软烘烤板(SHP)从基材中除去溶剂。 冷却板降低了溶剂除去的基板温度。 缓冲器临时存储具有降低的温度的衬底。 通过输送机,SHP,冷却板和缓冲器的装载侧之间的第二个机器人臂装载/卸载基板。 温度控制单元调节从缓冲器卸载的基板温度。 在缓冲器的卸载侧,温度控制单元和暴露基板的曝光单元之间的第三个机器人臂装载/卸载基板。