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    • 4. 发明申请
    • Inertial Sensor
    • 惯性传感器
    • US20120043855A1
    • 2012-02-23
    • US13284752
    • 2011-10-28
    • Yun Sung KangJung Won LeeJong Woon KimSeung Hun HanMin Kyu Choi
    • Yun Sung KangJung Won LeeJong Woon KimSeung Hun HanMin Kyu Choi
    • G01P15/09
    • G01P15/09G01C19/56G01P15/097
    • Disclosed herein is an inertial sensor of the present invention. An inertial sensor 100 according to a preferred embodiment of the present invention includes a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 and surrounding the mass body 120, a piezoelectric material 140 formed above the membrane 110 and provided with a cavity 141 in a thickness direction, a sensing electrode 150 disposed in the cavity 141 and a driving electrode 160 disposed outside the cavity 141, whereby the thickness of the piezoelectric material 140 of the portion on which the sensing electrode 150 is disposed is formed to be thin, such that the sensitivity of the inertial sensor 100 can be improved.
    • 本文公开了本发明的惯性传感器。 根据本发明的优选实施例的惯性传感器100包括板状膜110,设置在膜110的中心部分113下方的质量体120,设置在膜110的边缘115下方的周边 质量体120,形成在膜110上方并且在厚度方向上设置有空腔141的压电材料140,设置在空腔141中的感测电极150和设置在空腔141外部的驱动电极160,由此, 将设置有感测电极150的部分的压电材料140形成为较薄,使得可以提高惯性传感器100的灵敏度。
    • 5. 发明授权
    • Inertial sensor
    • 惯性传感器
    • US08508105B2
    • 2013-08-13
    • US13284752
    • 2011-10-28
    • Yun Sung KangJung Won LeeJong Woon KimSeung Hun HanMin Kyu Choi
    • Yun Sung KangJung Won LeeJong Woon KimSeung Hun HanMin Kyu Choi
    • H01L41/08
    • G01P15/09G01C19/56G01P15/097
    • Disclosed herein is an inertial sensor of the present invention. An inertial sensor 100 according to a preferred embodiment of the present invention includes a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 and surrounding the mass body 120, a piezoelectric material 140 formed above the membrane 110 and provided with a cavity 141 in a thickness direction, a sensing electrode 150 disposed in the cavity 141 and a driving electrode 160 disposed outside the cavity 141, whereby the thickness of the piezoelectric material 140 of the portion on which the sensing electrode 150 is disposed is formed to be thin, such that the sensitivity of the inertial sensor 100 can be improved.
    • 本文公开了本发明的惯性传感器。 根据本发明的优选实施例的惯性传感器100包括板状膜110,设置在膜110的中心部分113下方的质量体120,设置在膜110的边缘115下方的周边 质量体120,形成在膜110上方并且在厚度方向上设置有空腔141的压电材料140,设置在空腔141中的感测电极150和设置在空腔141外部的驱动电极160,由此, 将设置有感测电极150的部分的压电材料140形成为较薄,使得可以提高惯性传感器100的灵敏度。
    • 8. 发明授权
    • Inertial sensor
    • 惯性传感器
    • US08850888B2
    • 2014-10-07
    • US13409039
    • 2012-02-29
    • Seung Mo LimSung Wook KimSung Jun LeeKyo Yeol LeeYun Sung Kang
    • Seung Mo LimSung Wook KimSung Jun LeeKyo Yeol LeeYun Sung Kang
    • G01C19/56G01P15/09
    • G01C19/56G01P15/09G01P15/14G01P2015/084
    • Disclosed herein is an inertial sensor. The inertial sensor 100 according to preferred embodiments of the present invention includes: a membrane 110; a mass body 120 disposed under the membrane 110; a piezoelectric body 130 formed on the membrane 110 to drive the mass body 120; and trenches 140 formed by being collapsed in a thickness direction of the piezoelectric body 130 so as to vertically meet a direction in which the mass body 120 is driven. By this configuration, the trenches are formed by being collapsed in a thickness direction of the piezoelectric body 130 to provide directivity while retaining the rigidity of the piezoelectric body 130 to prevent a wave from being propagated in an unnecessary direction, thereby driving the inertial sensor 100 in a desired specific direction.
    • 这里公开了惯性传感器。 根据本发明的优选实施例的惯性传感器100包括:膜110; 设置在膜110下方的质量体120; 形成在膜110上以驱动质量体120的压电体130; 以及通过在压电体130的厚度方向上折叠而形成的沟槽140,以便垂直地与质量体120的驱动方向相遇。 通过这种构造,通过在压电体130的厚度方向上收缩形成沟槽,以提供方向性,同时保持压电体130的刚性,以防止波在不必要的方向上传播,从而驱动惯性传感器100 在所需的特定方向。