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    • 5. 发明申请
    • APPARATUS AND SENSOR FOR ADJUSTING VERTICAL SENSOR-ALIGNMENT
    • 用于调整垂直传感器对准的装置和传感器
    • US20110156955A1
    • 2011-06-30
    • US12949393
    • 2010-11-18
    • Seong Hee JEONG
    • Seong Hee JEONG
    • H01Q3/00
    • G01S13/931B60W2050/0088G01S7/4026G01S13/34G01S13/345G01S13/66G01S13/68G01S2007/4034G01S2007/4082G01S2007/4091G01S2013/9321G01S2013/9375
    • Disclosed are a sensor, the vertical alignment of which can be adjusted, and a vertical sensor-alignment adjustment apparatus using the same. In particular, in order to allow the vertical alignment to be adjusted, the sensor has a construction including a plurality of switchable transmitting antennas or a plurality of switchable receiving antennas or a construction including a tilting motor for adjusting an transmitting angle or a receiving angle. The vertical sensor-alignment adjustment apparatus employing such a sensor determines whether the sensor is misaligned in terms of its vertical alignment, and corrects the vertical misalignment of the sensor by executing variable switching to one of the transmitting antennas, by executing variable switching to one of the receiving antennas, or by controlling the tilting motor, so that the transmitting angle of sensor signals or the receiving angle of reflected waves for the sensor signals can be adjusted.
    • 公开了可以调节其垂直对准的传感器和使用该传感器的垂直传感器对准调节装置。 具体地说,为了调整垂直对准,传感器具有包括多个可切换发送天线或多个可切换接收天线的结构,或包括用于调整发送角度或接收角度的倾斜电机的结构。 使用这种传感器的垂直传感器对准调整装置确定传感器在其垂直对准方面是否不对准,并且通过对发送天线中的一个执行可变切换来校正传感器的垂直未对准,通过执行可变切换到 接收天线,或通过控制倾斜电机,可以调节传感器信号的传播角度或传感器信号的反射波接收角度。
    • 7. 发明申请
    • Method for manufacturing image sensor
    • 图像传感器制造方法
    • US20080153194A1
    • 2008-06-26
    • US11929865
    • 2007-10-30
    • Seong Hee JEONG
    • Seong Hee JEONG
    • H01L31/18
    • H01L27/14685H01L27/14621H01L27/14623H01L27/14627
    • A method for manufacturing an image sensor is provided. An interlayer insulating layer can be formed on a semiconductor substrate including a metal line, and a pad can be formed on the interlayer insulating layer. An insulating layer can be formed on the interlayer insulating layer and the pad, and a passivation layer can be formed on the insulating layer. A color filter layer can be formed on the passivation layer, and a planarization layer can be formed on the color filter layer. A microlens can be formed on the planarization layer, and a photoresist layer pattern exposing a portion of the passivation layer over the pad can be formed on the microlens. The pad can then be exposed by using the photoresist layer pattern as a mask, and the photoresist layer pattern can be removed.
    • 提供了一种用于制造图像传感器的方法。 可以在包括金属线的半导体基板上形成层间绝缘层,并且可以在层间绝缘层上形成焊盘。 可以在层间绝缘层和焊盘上形成绝缘层,并且可以在绝缘层上形成钝化层。 可以在钝化层上形成滤色器层,并且可以在滤色器层上形成平坦化层。 可以在平坦化层上形成微透镜,并且可以在微透镜上形成将钝化层的一部分暴露在焊盘上的光致抗蚀剂层图案。 然后可以通过使用光致抗蚀剂层图案作为掩模来曝光焊盘,并且可以去除光致抗蚀剂层图案。