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    • 5. 发明授权
    • Semiconductor device and method of automatically inspecting an appearance of the same
    • 半导体装置及其外观自动检测方法
    • US08809076B2
    • 2014-08-19
    • US13750708
    • 2013-01-25
    • Semiconductor Components Industries, LLC
    • Hideaki YoshimiShinzo IshibeEiji Kurose
    • G01B21/02H01L21/66H01L21/02H01L21/78
    • G01B21/02H01L22/12H01L23/544H01L23/585H01L2924/0002H01L2924/00
    • The invention provides a semiconductor device and a method of automatically inspecting the appearance, which achieves proper recognition of the size of a chipping occurring from an end portion of the semiconductor device toward the element forming region by an automatic appearance inspection machine, and prevents a problem of judging an appearance non-defective product as an appearance defective product. A semiconductor device includes a resin layer extending from an element forming region over a guard ring surrounding the element forming region so as to cover these except a plurality of portions of the guard ring, and a chipping extending from a chip end portion of a semiconductor device toward the end portion of the resin layer. An end portion of the guard ring partially exposed from the resin layer is used as a reference to measure a distance y from the end portion of the guard ring to the end portion of the chipping and a distance x from the end portion of the guard ring to the end portion of the resin layer. The device is judged as an appearance non-defective product when y is larger than x or is judged as an appearance defective product when y is equal to x or y is smaller than x.
    • 本发明提供了一种自动检查外观的半导体器件和方法,其通过自动外观检查机实现了从半导体器件的端部朝向元件形成区域发生的切屑的尺寸的正确识别,并且防止了问题 将外观无缺陷产品判定为外观不良品。 半导体器件包括树脂层,该树脂层从围绕元件形成区域的保护环上的元件形成区域延伸,以覆盖除保护环的多个部分之外的元件,以及从半导体器件的芯片端部延伸的切屑 朝向树脂层的端部。 使用从树脂层部分露出的保护环的端部作为基准来测量从保护环的端部到切屑的端部的距离y和距保护环的端部的距离x 到树脂层的端部。 当y大于x时,该装置被判断为外观无缺陷产品,或者当y等于x或y小于x时将其判定为外观缺陷产品。