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    • 2. 发明申请
    • MANUFACTURING METHOD OF THIN-FILM MAGNETIC HEAD WITH DISHING SUPPRESSED DURING POLISHING
    • 在抛光过程中抑制的薄膜薄膜磁头的制造方法
    • US20090086381A1
    • 2009-04-02
    • US11865405
    • 2007-10-01
    • Tetsuya HIRAKISeiji YARIYasufumi UNOHideaki SATOTakahide MASUDAKazuhiro KOBAYASHI
    • Tetsuya HIRAKISeiji YARIYasufumi UNOHideaki SATOTakahide MASUDAKazuhiro KOBAYASHI
    • G11B5/33
    • G11B5/3163G11B5/00826G11B5/3169G11B5/3173
    • A manufacturing method of a thin-film magnetic head with a dishing suppressed in the case of planarizing a magnetic shield which a read head portion has or a magnetic pole which a write head portion has is provided. A manufacturing method of a thin-film magnetic head comprising a read head portion for data reading which has at least two magnetic layers functioning as a magnetic shield and a write head portion for data writing which has two magnetic layers functioning as a magnetic pole is provided, in a process forming at least the lowest magnetic layer in at least the two magnetic layers functioning as the magnetic shield and the two magnetic layers functioning as the magnetic pole in the case of forming a plurality of thin-film magnetic head patterns on an element formation surface of the wafer substrate, which comprises steps of: forming this magnetic layer so as to reach a position which becomes a medium opposed surface at a middle portion to a trick width direction in each thin-film magnetic head pattern, and forming a dishing prevention portion at a position farther than this magnetic layer from the position which becomes the medium opposed surface in both sides or either side along the track width direction of this magnetic layer; forming a nonmagnetic insulating layer so as to cover the magnetic layer and the dishing prevention portion; and planarizing and polishing the magnetic layer, the dishing prevention portion, and the nonmagnetic insulating layer thereafter.
    • 在平面化磁头部分所具有的磁屏蔽或者写入磁头部分所具有的磁极的情况下,具有凹陷抑制的薄膜磁头的制造方法。 一种薄膜磁头的制造方法,其特征在于,具备读取磁头部分,该读取头部分具有用作磁屏蔽的至少两个磁性层和用作磁极的两个磁性层的用于数据写入的写入头部分 在至少形成作为磁屏蔽的两个磁性层中形成至少最低磁性层的工艺中,并且在元件上形成多个薄膜磁头图案的情况下用作磁极的两个磁性层 所述晶片基板的形成面包括以下步骤:在每个薄膜磁头图案中形成该磁性层以达到在中间部分与特技宽度方向成为介质相对表面的位置,并形成凹陷 防止部分位于远离该磁性层的位置,该位置从成为两侧或两侧的介质相对表面的位置 该磁性层的宽度方向; 形成非磁性绝缘层以覆盖磁性层和凹陷防止部分; 此后对磁性层,凹陷防止部分和非磁性绝缘层进行平面化和抛光。