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    • 6. 发明申请
    • Film Forming Apparatus, Matching Device, and Impedance Control Method
    • 成膜装置,匹配装置和阻抗控制方法
    • US20090188430A1
    • 2009-07-30
    • US11883580
    • 2006-01-24
    • Satoshi MatsudaYuji AsaharaHideo YamakoshiSeiji Goto
    • Satoshi MatsudaYuji AsaharaHideo YamakoshiSeiji Goto
    • B05C11/00
    • H05H1/46C23C16/26C23C16/52H05H2001/4682
    • The present invention realizes an impedance control for avoiding the extinction of a plasma caused due to a sudden change in a load impedance, which may occur immediately after the plasma is generated. A film-forming apparatus of the present invention includes a power supply; a matching circuit; an electrode configured to receive electric power from the power supply through the matching circuit, and to generate a plasma inside a film forming chamber for accommodating a film forming target based on the electric power; and a control section configured to control an impedance of the matching circuit. The control section keeps the impedance of the matching circuit constant during a first period starting at a first time t1 when the power supply starts to supply the electric power to the electrode, and controls the impedance of the matching circuit based on a reflected-wave power from the electrode for a second period starting at a second time t2 when the first period ends.
    • 本发明实现了一种阻抗控制,用于避免在等离子体产生后立即发生的负载阻抗突然变化引起的等离子体消光。 本发明的成膜装置包括:电源; 匹配电路; 电极,被配置为通过匹配电路从电源接收电力,并且在用于基于电力容纳成膜靶的成膜室内产生等离子体; 以及控制部,被配置为控制所述匹配电路的阻抗。 控制部在电源开始向电极供给电力时,在从第一时刻t1开始的第一期间保持匹配电路的阻抗恒定,并且基于反射波功率来控制匹配电路的阻抗 从第一时段结束时的第二时刻t2开始的第二期间。
    • 9. 发明授权
    • Electronic component and method for manufacturing the same
    • 电子元件及其制造方法
    • US07595716B2
    • 2009-09-29
    • US12185399
    • 2008-08-04
    • Seiji GotoMasahiro Kimura
    • Seiji GotoMasahiro Kimura
    • H01C1/012
    • H01C7/003H01C17/06506Y10T29/49099
    • To provide an electronic component including a resistor element that can be efficiently produced with a range of resistances, and a method for manufacturing the electronic component, the electronic component includes a pair of terminals, and a resistor element disposed between the terminals. The resistor element includes at least two resistive portions (hereinafter referred to as a first resistive portion and a second resistive portion) that are continuously disposed. The first resistive portion includes a plurality of first dots overlapping one another. The second resistive portion includes a plurality of second dots having a different electric resistance from that of the first dots overlapping one another.
    • 为了提供一种电子部件,包括能够以一定范围的电阻高效率地制造的电阻元件以及电子部件的制造方法,电子部件包括一对端子和设置在端子之间的电阻元件。 电阻元件包括连续配置的至少两个电阻部分(以下称为第一电阻部分和第二电阻部分)。 第一电阻部分包括彼此重叠的多个第一点。 第二电阻部分包括具有与第一点重叠的电阻不同的多个第二点。