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    • 5. 发明授权
    • Method of manufacturing a multilayer ceramic body
    • 制造多层陶瓷体的方法
    • US4795512A
    • 1989-01-03
    • US18579
    • 1987-02-25
    • Seiichi NakataniTsutomu NishimuraSatoru YuhakuToru Ishida
    • Seiichi NakataniTsutomu NishimuraSatoru YuhakuToru Ishida
    • B32B18/00C04B35/622C04B35/64H05K1/03H05K1/09H05K3/46H01B1/06
    • H05K3/4629B32B18/00C04B35/622C04B35/64H05K3/4611C04B2235/6567C04B2235/658C04B2237/343C04B2237/525C04B2237/62C04B2237/68C04B2237/704C04B2237/76H05K1/0306H05K1/092
    • A method of manufacturing a multilayer ceramic using Cu as the conductor material is disclosed. This method comprises a step of forming a multilayer laminate by the green tape multilayer laminating method or by the thick film printing method on ceramic substrate with an insulating material with a mixture of ceramic and glass containing lead oxide as its main component and a conductor paste with CuO as its main component; a step of heat-treatment for decomposing and removing organic binder in air (binder removing process); a step of causing reduction at temperatures where copper oxide is reduced, but lead oxide is not, in a mixed gas atmosphere of nitrogen and hydrogen (reduction process); and a step of firing in a nitrogen atmosphere, thereby effecting sintering of the insulating material composed of ceramic and glass containing lead oxide and metallization of copper electrodes (firing process). For the uppermost layer electrodes, metal copper paste is employed, and a pattern printing process is conducted subsequent to the aforementioned reduction process, so that the sintering of the insulating material and the metallization of the uppermost layer are simultaneously performed; in this way, highly reliable uppermost layer Cu electrodes are obtainable.
    • 公开了使用Cu作为导体材料的多层陶瓷的制造方法。 该方法包括通过生胶带多层层压法或通过厚膜印刷方法在陶瓷基板上形成多层层压体的步骤,其中绝缘材料与陶瓷和玻璃的混合物以含氧化铅为主要成分的混合物和具有 CuO为主要成分; 在空气中分解除去有机粘合剂的热处理步骤(粘合剂除去工艺); 在氮和氢的混合气体气氛中还原氧化铜还原的氧化还原反应的步骤(还原过程); 以及在氮气气氛中烧成的步骤,从而实现由含有氧化铅的陶瓷和玻璃构成的绝缘材料和铜电极的金属化(烧成工序)的烧结。 对于最上层电极,使用金属铜膏,并且在上述还原处理之后进行图案印刷工艺,使得绝缘材料的烧结和最上层的金属化同时进行; 以这种方式,可以获得高可靠性的最上层Cu电极。