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    • 10. 发明申请
    • Methods and systems for forming microstructures in glass substrates
    • 用于在玻璃基板中形成微结构的方法和系统
    • US20090261082A1
    • 2009-10-22
    • US12148479
    • 2008-04-18
    • Robert Stephen Wagner
    • Robert Stephen Wagner
    • B23K26/08B23K26/36
    • B41M5/24C03C15/00C03C23/0025C03C2204/08
    • A method for forming microstructure cavities in a glass substrate includes directing a first laser pulse onto the glass substrate thereby forming a first microstructure cavity having a tapered configuration. The first laser pulse may have first spot area on the surface of the glass substrate. A second laser pulse having a second spot area on the surface of the glass substrate may be directed onto the glass substrate thereby forming a second microstructure cavity having a tapered configuration. The second spot area may be substantially the same as the first spot area and may overlap the first spot area such that a portion of the sidewall disposed between first microstructure cavity and the second microstructure cavity is ablated. After the portion of the sidewall is ablated, the diameter of each of the first and second microstructure cavities may be less than the diameter of the first spot area.
    • 用于在玻璃基板中形成微结构空腔的方法包括将第一激光脉冲引导到玻璃基板上,从而形成具有锥形构造的第一微结构空腔。 第一激光脉冲可以在玻璃基板的表面上具有第一光斑区域。 可以在玻璃基板的表面上具有第二点区域的第二激光脉冲被引导到玻璃基板上,从而形成具有锥形构造的第二微结构空腔。 第二点区域可以与第一点区域基本相同,并且可以与第一斑点区域重叠,使得设置在第一微结构腔体和第二微结构腔体之间的侧壁的一部分被消融。 在侧壁的部分被烧蚀之后,第一和第二微结构空腔中的每一个的直径可以小于第一点区域的直径。