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热词
    • 3. 发明授权
    • Thermal mass flowmeter and mass flow controller, flowmetering system and
method
    • 热质量流量计和质量流量控制器,流量计系统及方法
    • US5911238A
    • 1999-06-15
    • US725859
    • 1996-10-04
    • Scott S. BumpGary P. CampbellJoseph C. Dille
    • Scott S. BumpGary P. CampbellJoseph C. Dille
    • G01F1/00G01F1/684G01F1/696G01F1/76G01F1/86G01F5/00G01F15/02G01F25/00G05D7/06F16K31/12
    • G01F1/6965G01F1/6842G01F1/6847G01F1/86G01F15/024G01F25/003G01F25/0053G01F5/00G05D7/0635Y10T137/7759Y10T137/7761
    • A flowmeter (100) or mass flow controller (101) used in a manufacturing process with toxic and reactive process fluids. A fluid flow sensor (114) senses fluid flow. A set point is established based upon predetermined temperature and pressure conditions at which the fluid will be utilized in the process. A valve drive (124) operates a fluid flow valve (126) to the resulting fluid flow rate, this being based upon the sensed flow rate and the set point. A control unit (122) controls the valve drive. The control unit accesses a calibration data set to determine the amount of fluid to be delivered by the fluid flow valve based upon the sensed flow rate and the set point. This calibration data set is created for the controller over its operational range using a calibration fluid having similar thermodynamic transport properties to a process fluid. The instrument is calibrated using the calibration fluid and the data set is produced by converting the calibration data using process fluid data stored in a data base (200). Accessing the data set stored in the instrument together with routing signals over a communication network (300) permits the instrument to precisely control process fluids without having to introduce external correction factors or other adjustments to the process.
    • 在具有有毒和反应性过程流体的制造过程中使用的流量计(100)或质量流量控制器(101)。 流体流量传感器(114)感测流体流动。 基于在该过程中将使用流体的预定温度和压力条件建立设定点。 阀驱动器(124)将流体流动阀(126)运行到所得到的流体流速,这是基于感测的流量和设定点。 控制单元(122)控制阀驱动。 控制单元访问校准数据集,以基于感测的流量和设定点来确定由流体流量阀输送的流体的量。 使用具有与过程流体相似的热力学传递特性的校准流体,在其工作范围内为控制器创建该校准数据组。 使用校准液校准仪器,并通过使用存储在数据库中的过程流体数据(200)转换校准数据来生成数据集。 通过通信网络(300)访问存储在仪器中的数据集与路由信号一起允许仪器精确地控制过程流体,而不必对过程引入外部校正因子或其他调整。