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1. 发明授权

US09599496B2 Flow rate measuring device with first temperature sensor in a main passage and second temperature sensor in a sub-passage 有权
公开(公告)号：US09599496B2
公开(公告)日：2017-03-21
申请号：US14369285
申请日：2012-01-10
申请人： Satoshi Asano , Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Ryosuke Doi
发明人： Satoshi Asano , Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Ryosuke Doi
IPC分类号： G01F1/684 , G01F1/69 , G01F1/696 , G01F5/00 , G01F15/02
CPC分类号： G01F1/684 , G01F1/6842 , G01F1/6845 , G01F1/69 , G01F1/696 , G01F5/00 , G01F15/02
摘要： A flow rate measuring device with high precision is provided.The flow rate measuring device includes a sub-passage that takes a part of the fluid flowing in a main passage, first temperature measuring means for measuring a temperature of the fluid flowing in the passage, second temperature measuring means for measuring a temperature of a fluid flowing in the sub-passage, detecting means for detecting a flow rate of the fluid flowing in the sub-passage, and measuring means for measuring a flow rate of the fluid flowing within the main channel on the basis of an output of the first temperature measuring means, an output of the second temperature measuring means, and an output of the detecting means.

2. 发明授权

US09574925B2 Fluid measurement device having a circuit for precise flow measurement 有权
标题翻译：具有用于精确流量测量的电路的流体测量装置
公开(公告)号：US09574925B2
公开(公告)日：2017-02-21
申请号：US14411346
申请日：2012-06-27
申请人： Satoshi Asano , Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa
发明人： Satoshi Asano , Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa
IPC分类号： G01F1/68 , G01F15/02 , G01F1/684 , G01F1/696 , G01F5/00
CPC分类号： G01F15/02 , G01F1/68 , G01F1/684 , G01F1/696 , G01F5/00
摘要： A fluid measurement device includes a circuit unit into which a first signal output from a first detection element and a second signal output from a second detection element are input. The circuit unit includes a signal processing part, a state deciding part, and a controller. The controller controls an amount of change that a change of the first signal imparts to the third signal in accordance with a result of decision by the state deciding part that determines that the state of the first signal is not within the predetermined range. The predetermined range is based on the second signal.
摘要翻译：流体测量装置包括电路单元，输入从第一检测元件输出的第一信号和从第二检测元件输出的第二信号。电路单元包括信号处理部分，状态判定部分和控制器。控制器根据状态判定部的决定结果决定第一信号的状态不在预定范围内，控制第一信号的变化赋予第三信号的变化量。预定范围基于第二信号。

3. 发明授权

US08627717B2 Thermal flow sensor 有权
标题翻译：热流量传感器
公开(公告)号：US08627717B2
公开(公告)日：2014-01-14
申请号：US13361372
申请日：2012-01-30
申请人： Satoshi Asano , Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa
发明人： Satoshi Asano , Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/698
摘要： A thermal flow sensor includes a heater temperature controller that realizes stable startup characteristics and prevents degradation of a sensor element and can also accommodate a smaller heater. The sensor also includes a semiconductor substrate; a cavity portion provided in the semiconductor substrate; a dielectric film provided on the semiconductor substrate; a thin layer area formed as a result of the dielectric film covering the cavity portion; a heating resistor provided in the thin layer area on the dielectric film; a first temperature-sensitive resistor provided in the thin layer area on the dielectric film; a heating controller; a second temperature-sensitive resistor provided near the heating resistor; and a flow rate detector that detects a flow rate of a fluid on the basis of temperature of the second temperature-sensitive resistor. The heating controller controls the temperature of the heating resistor on the basis of first and second reference temperatures.
摘要翻译：热流传感器包括加热器温度控制器，其实现稳定的启动特性并防止传感器元件的劣化并且还可以容纳较小的加热器。传感器还包括半导体衬底; 设置在所述半导体基板中的空腔部; 设置在所述半导体基板上的电介质膜; 作为覆盖空腔部分的电介质膜的结果而形成的薄层区域; 设置在电介质膜上的薄层区域中的加热电阻器; 设置在介电膜上的薄层区域中的第一温敏电阻器; 加热控制器设置在加热电阻附近的第二温敏电阻器; 以及流量检测器，其基于第二温度敏感电阻器的温度来检测流体的流量。加热控制器基于第一和第二参考温度来控制加热电阻器的温度。

4. 发明授权

US09188470B2 Thermal flow meter 有权
标题翻译：热流量计
公开(公告)号：US09188470B2
公开(公告)日：2015-11-17
申请号：US13813094
申请日：2011-07-28
申请人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
IPC分类号： G01F1/68 , G01F1/692 , G01F1/684 , G01F1/699
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/699
摘要： An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element according to the present invention includes a semiconductor substrate, a cavity portion formed on the semiconductor substrate, a heating resistor formed on the cavity portion via an electrically insulating film, a heating temperature sensor for detecting heating temperature of the heating resistor, and a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor. The heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
摘要翻译：本发明的目的是提供一种提供高灵敏度和改善的可靠性的热式流量传感器。根据本发明的传感器元件包括半导体衬底，形成在半导体衬底上的空腔部分，通过电绝缘膜形成在空腔部分上的发热电阻器，用于检测加热电阻器的加热温度的加热温度传感器，以及使用由加热温度传感器检测到的温度来控制加热电阻器的加热温度的驱动电路。加热温度传感器包括具有根据温度变化的电阻值的温度敏感电阻器，并且设置在相对于加热电阻器的被测量流体的流动方向的上游和下游以及垂直于该方向的方向上下侧要测量的流体相对于加热电阻器的流动。

5. 发明授权

US08596113B2 Intake air temperature sensor and thermal airflow meter including the same 有权
标题翻译：进气温度传感器和热风量计包括相同
公开(公告)号：US08596113B2
公开(公告)日：2013-12-03
申请号：US13360923
申请日：2012-01-30
申请人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
发明人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
IPC分类号： G01M15/04
CPC分类号： G01K13/02 , G01F1/00 , G01F1/68 , G01F1/6888 , G01F5/00 , G01F15/185 , G01K1/20 , G01K7/42 , G01K2013/024 , G01K2205/02
摘要： An intake air temperature sensor capable of detecting an intake air temperature highly accurately and at high speed. The intake air temperature sensor of the present invention includes: a secondary passage 7 taking in an intake airflow; a flow rate detecting element 13 disposed in the secondary passage 7; an intake air temperature detecting element 4 provided outside the secondary passage; a temperature sensor 9 detecting a temperature of a fitting section of the intake air temperature detecting element 4; a circuit board 11 disposed in a casing; and an integrated circuit 10 applying a correction process to an output of the intake air temperature detecting element 4 on the basis of signals output from the temperature sensor 9 and a flow rate detecting element 13.
摘要翻译：能够高精度地且高速地检测进气温度的进气温度传感器。本发明的进气温度传感器包括：进入气流的二次通路7; 设置在次通道7中的流量检测元件13; 设置在次级通道外侧的进气温度检测元件4; 检测进气温度检测元件4的嵌合部的温度的温度传感器9; 布置在壳体中的电路板11; 以及基于从温度传感器9和流量检测元件13输出的信号将校正处理应用于进气温度检测元件4的输出的集成电路10。

6. 发明授权

US08813556B2 Intake temperature sensor 有权
标题翻译：进气温度传感器
公开(公告)号：US08813556B2
公开(公告)日：2014-08-26
申请号：US13337398
申请日：2011-12-27
申请人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
发明人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
IPC分类号： G01F1/68
CPC分类号： G01K13/02 , G01F1/6842 , G01F5/00 , G01F15/185 , G01K1/16 , G01K2205/02
摘要： An intake temperature sensor capable of precisely detecting the temperature of intake at high speed even in a low air mass flow zone is provided. In an intake temperature sensor having a temperature detecting element 6 inserted in an opening provided in an intake pipe 3 to be disposed in the intake pipe, a temperature detecting element is mechanically joined with a heat sink 4 directly exposed to the flow of the intake flowing in the intake pipe, and the temperature of the intake is output based on an output obtained from the temperature detecting element. Thus, the thermal resistance of the temperature detecting element with respect to the intake flow can be reduced; therefore, the intake temperature sensor capable of precisely detecting the temperature of the intake at high speed even in the low air mass flow zone can be provided.
摘要翻译：提供了即使在低空气质量流量区域也能够高精度地检测进气温度的进气温度传感器。在具有插入到设置在进气管3内的进气管3中的开口中的温度检测元件6的进气温度传感器中，温度检测元件与直接暴露于进气流动的散热器4机械接合在进气管中，并且基于从温度检测元件获得的输出来输出进气温度。因此，可以降低温度检测元件相对于进气流的热阻; 因此，即使在低空气质量流量区域中也能够高精度地检测进气温度的进气温度传感器。

7. 发明申请

US20140159174A1 FLOWMETER 有权
标题翻译：流量计
公开(公告)号：US20140159174A1
公开(公告)日：2014-06-12
申请号：US14131125
申请日：2011-07-13
申请人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
发明人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
IPC分类号： G01F1/34
CPC分类号： G01F1/34 , G01F1/6845 , G01F1/692 , H01L2224/48247
摘要： A flowmeter that improves a corrosion resistance is provided.The flowmeter includes a silicon substrate having a diaphragm where a heater is formed, an aluminum pad formed on a silicon substrate, an organic protective film laminated on the silicon substrate, and a mold resin that covers the silicon substrate. The diaphragm has an exposed portion exposed from the organic protective film, an adhesion surface high in adhesion property to the mold resin is laminated on the silicon substrate, and an adhesion film of the mold resin to the adhesion film is provided between the exposed portion and the aluminum pad.
摘要翻译：提供了提高耐腐蚀性的流量计。流量计包括具有形成有加热器的隔膜的硅基板，形成在硅基板上的铝焊盘，层叠在硅基板上的有机保护膜，以及覆盖硅基板的模制树脂。隔膜具有从有机保护膜露出的露出部分，将与模制树脂粘附性高的粘合表面层合在硅基板上，并且将模制树脂与粘合膜的粘合膜设置在暴露部分和铝垫。

8. 发明申请

US20120160024A1 INTAKE TEMPERATURE SENSOR 有权
标题翻译：摄入温度传感器
公开(公告)号：US20120160024A1
公开(公告)日：2012-06-28
申请号：US13337398
申请日：2011-12-27
申请人： Masahiro MATSUMOTO , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
发明人： Masahiro MATSUMOTO , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
IPC分类号： G01F1/684 , G01K13/02
CPC分类号： G01K13/02 , G01F1/6842 , G01F5/00 , G01F15/185 , G01K1/16 , G01K2205/02
摘要： An intake temperature sensor capable of precisely detecting the temperature of intake at high speed even in a low air mass flow zone is provided. In an intake temperature sensor having a temperature detecting element 6 inserted in an opening provided in an intake pipe 3 to be disposed in the intake pipe, a temperature detecting element is mechanically joined with a heat sink 4 directly exposed to the flow of the intake flowing in the intake pipe, and the temperature of the intake is output based on an output obtained from the temperature detecting element. Thus, the thermal resistance of the temperature detecting element with respect to the intake flow can be reduced; therefore, the intake temperature sensor capable of precisely detecting the temperature of the intake at high speed even in the low air mass flow zone can be provided.
摘要翻译：提供了即使在低空气质量流量区域也能够高精度地检测进气温度的进气温度传感器。在具有插入到设置在进气管3内的进气管3中的开口中的温度检测元件6的进气温度传感器中，温度检测元件与直接暴露于进气流动的散热器4机械接合在进气管中，并且基于从温度检测元件获得的输出来输出进气温度。因此，可以降低温度检测元件相对于进气流的热阻; 因此，即使在低空气质量流量区域中也能够高精度地检测进气温度的进气温度传感器。

9. 发明授权

US09772208B2 Thermal type flowmeter with particle guide member 有权
公开(公告)号：US09772208B2
公开(公告)日：2017-09-26
申请号：US14359161
申请日：2012-01-18
申请人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
IPC分类号： G01F1/692 , G01F1/684 , G01F1/696 , G01F15/00 , G01F5/00
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/696 , G01F5/00 , G01F15/00
摘要： Provided is a thermal type flowmeter in which contamination of a sensor element is reduced. The flowmeter includes a sensor element including a heating resistor formed in a thin film part, the thin film part being provided on a diaphragm formed on a substrate; a support member to locate the sensor element thereon; a secondary channel that includes part of the support member and takes in part of intake air flowing through an air intake pipeline; and a guide member provided on the support member or the sensor element that lies on a line L that extends along an air flow in the secondary channel and passing over the thin film part, the guide member allowing fine particles to be guided in a direction away from the line L, the fine particles coming together with an air flow along the surface of the support member or the sensor element.

10. 发明申请

US20130199280A1 Thermal Flow Meter 有权
标题翻译：热流量计
公开(公告)号：US20130199280A1
公开(公告)日：2013-08-08
申请号：US13813094
申请日：2011-07-28
申请人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
IPC分类号： G01F1/692
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/699
摘要： An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element according to the present invention includes a semiconductor substrate, a cavity portion formed on the semiconductor substrate, a heating resistor formed on the cavity portion via an electrically insulating film, a heating temperature sensor for detecting heating temperature of the heating resistor, and a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor. The heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
摘要翻译：本发明的目的是提供一种提供高灵敏度和改善的可靠性的热式流量传感器。根据本发明的传感器元件包括半导体衬底，形成在半导体衬底上的空腔部分，通过电绝缘膜形成在空腔部分上的发热电阻器，用于检测加热电阻器的加热温度的加热温度传感器，以及使用由加热温度传感器检测到的温度来控制加热电阻器的加热温度的驱动电路。加热温度传感器包括具有根据温度变化的电阻值的温度敏感电阻器，并且设置在相对于加热电阻器的被测量流体的流动方向的上游和下游以及垂直于该方向的方向上下侧要测量的流体相对于加热电阻器的流动。

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