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    • 10. 发明申请
    • Plasma surface treatment electrode assembly and arrangement
    • 等离子体表面处理电极的组装和布置
    • US20050235915A1
    • 2005-10-27
    • US10832447
    • 2004-04-27
    • Yeu-Chuan HoRobert SeverBalazs HunekJeffrey Wallace
    • Yeu-Chuan HoRobert SeverBalazs HunekJeffrey Wallace
    • C23C16/00H01J37/32
    • H01J37/32009H01J37/32724
    • An electrode assembly for an arrangement of electrodes used in a plasma surface treatment apparatus. The electrode assembly includes an electrode body formed of a dielectric material and having two spaced end walls. One or more flow channels are defined between the end walls for passage of cooling fluid to cool the electrode body. The flow channel(s) are configured such that a direct flow path exists for the cooling fluid from one of the end walls to the other of the two end walls to inhibit recirculation of the cooling fluid and therefore hot spots developing in the electrode body. Openings within the end walls are provided for passage of the cooling fluid. A high voltage conductor is located within the flow passage(s) so that heat produced at the high voltage conductor is dissipated by the cooling fluid.
    • 一种用于等离子体表面处理装置中使用的电极布置的电极组件。 电极组件包括由介电材料形成并具有两个间隔开的端壁的电极体。 在所述端壁之间限定一个或多个流动通道,以使冷却流体通过以冷却电极体。 流动通道被构造成使得存在用于冷却流体从两个端壁中的一个端壁到另一个端壁中的另一个的直接流动路径,以阻止冷却流体的再循环,因此在电极体中形成热点。 提供端壁内的开口用于冷却流体的通过。 高压导体位于流动通道内,使得在高压导体处产生的热量被冷却流体消散。