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    • 1. 发明申请
    • NONVOLATILE MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME
    • 非易失性存储器件及其制造方法
    • US20110233680A1
    • 2011-09-29
    • US12886007
    • 2010-09-20
    • Saku HASHIURAShinichi WATANABETakeshi SHIMANENorihisa ARAI
    • Saku HASHIURAShinichi WATANABETakeshi SHIMANENorihisa ARAI
    • H01L27/088H01L21/336
    • H01L21/823462H01L21/823412H01L27/115
    • According to one embodiment, a nonvolatile memory device including MOS transistors formed in a surface of one semiconductor substrate is provided. The device includes a first and second MOS transistors. The first MOS transistor includes a first source and drain regions spaced from each other, a first gate insulating film provided on the surface, a first gate electrode provided on the first gate insulating film, and a first channel region located immediately below the first gate insulating film and containing impurities of both conductivity types. The second MOS transistor includes a second source and drain regions spaced from each other, a second gate insulating film provided on the surface, a second gate electrode provided on the second gate insulating film, and a second channel region located immediately below the second gate insulating film and having an identical concentration profile of the impurity to the first channel region.
    • 根据一个实施例,提供一种包括形成在一个半导体衬底的表面中的MOS晶体管的非易失性存储器件。 该器件包括第一和第二MOS晶体管。 第一MOS晶体管包括彼此间隔开的第一源极和漏极区域,设置在表面上的第一栅极绝缘膜,设置在第一栅极绝缘膜上的第一栅极电极和位于第一栅极绝缘膜正下方的第一沟道区域 膜和含有两种导电类型的杂质。 第二MOS晶体管包括彼此间隔开的第二源极和漏极区域,设置在表面上的第二栅极绝缘膜,设置在第二栅极绝缘膜上的第二栅极电极和位于第二栅极绝缘膜正下方的第二沟道区域 并且具有与第一通道区域相同的杂质浓度分布。