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    • 5. 发明申请
    • Reduced edge effect from recesses in imagers
    • 降低成像器凹槽的边缘效应
    • US20080198248A1
    • 2008-08-21
    • US11708790
    • 2007-02-20
    • Saijin Liu
    • Saijin Liu
    • H04N5/335
    • G02B5/201G02B3/0056
    • Methods for making a recessed color filter array for a semiconductor imager employing a sidewall spacer for reducing an edge effect from the array are disclosed. In one embodiment, a substrate is provided having an upper surface. Then, a recess is formed into the upper surface of the substrate. The recess has a bottom and a sidewall. Subsequently, a sidewall spacer is formed on the sidewall of the recess. A color resist is deposited into the recess after forming the sidewall spacer. In the embodiment, the sidewall spacer is formed of a material having a surface energy lower than that of a material defining the bottom of the recess. The color resist, when deposited into the recess, adheres less to the sidewall than to the bottom of the recess. Thus, the color resist does not conform to a shape of an edge portion of the recess where the sidewall and the bottom meet, thereby reducing the edge effect.
    • 公开了一种制造用于半导体成像器的凹陷滤色器阵列的方法,所述半导体成像器采用侧壁间隔件以减少阵列的边缘效应。 在一个实施例中,提供具有上表面的基板。 然后,在基板的上表面形成凹部。 凹部具有底部和侧壁。 随后,在凹槽的侧壁上形成侧壁间隔物。 在形成侧壁间隔物之后,将彩色抗蚀剂沉积到凹槽中。 在该实施例中,侧壁间隔件由表面能低于限定凹部底部的材料的表面能的材料形成。 当沉积到凹槽中时,抗彩色剂比凹槽的底部更少地粘附到侧壁上。 因此,抗蚀剂不符合侧壁和底部相遇的凹部的边缘部分的形状,从而降低了边缘效果。
    • 8. 发明授权
    • Reduced edge effect from recesses in imagers
    • 降低成像器凹槽的边缘效应
    • US07952155B2
    • 2011-05-31
    • US11708790
    • 2007-02-20
    • Saijin Liu
    • Saijin Liu
    • H01L31/0232
    • G02B5/201G02B3/0056
    • Methods for making a recessed color filter array for a semiconductor imager employing a sidewall spacer for reducing an edge effect from the array are disclosed. In one embodiment, a substrate is provided having an upper surface. Then, a recess is formed into the upper surface of the substrate. The recess has a bottom and a sidewall. Subsequently, a sidewall spacer is formed on the sidewall of the recess. A color resist is deposited into the recess after forming the sidewall spacer. In the embodiment, the sidewall spacer is formed of a material having a surface energy lower than that of a material defining the bottom of the recess. The color resist adheres less to the sidewall than to the bottom of the recess. Thus, the color resist does not conform to a shape of an edge portion of the recess, thereby reducing the edge effect.
    • 公开了一种制造用于半导体成像器的凹陷滤色器阵列的方法,所述半导体成像器采用侧壁间隔件以减少阵列的边缘效应。 在一个实施例中,提供具有上表面的基板。 然后,在基板的上表面形成凹部。 凹部具有底部和侧壁。 随后,在凹槽的侧壁上形成侧壁间隔物。 在形成侧壁间隔物之后,将彩色抗蚀剂沉积到凹槽中。 在该实施例中,侧壁间隔件由表面能低于限定凹部底部的材料的表面能的材料形成。 彩色抗蚀剂比凹槽的底部更靠近侧壁。 因此,抗蚀剂不符合凹部的边缘部的形状,从而降低边缘效果。