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1. 发明授权

US10825701B2 Baking device for a wafer coated with a coating containing a solvent 有权
公开(公告)号：US10825701B2
公开(公告)日：2020-11-03
申请号：US14948877
申请日：2015-11-23
申请人： SUSS MicroTec Lithography GmbH
发明人： Gregory George , Aaron Foley , Oliver Treichel
IPC分类号： H01L21/67 , F27D3/00 , F27B3/02
摘要： A baking device for a wafer coated with a coating containing a solvent is described, having a baking chamber, a support for the wafer, an inlet for a purge gas, and an evacuation for the purge gas charged with solvent evaporated from the coating. The inlet is formed as a diffusion element arranged above the wafer so as to admit the purge gas evenly over substantially the entire surface of the wafer, and the evacuation is formed as an evacuation ring which radially surrounds the diffusion element and is arranged at a ceiling of the baking chamber.

2. 发明申请

US20160148823A1 BAKING DEVICE FOR A WAFER COATED WITH A COATING CONTAINING A SOLVENT 审中-公开
标题翻译：用于涂覆包含溶剂的涂层的烘烤装置
公开(公告)号：US20160148823A1
公开(公告)日：2016-05-26
申请号：US14948877
申请日：2015-11-23
申请人： SUSS MicroTec Lithography GmbH
发明人： Gregory George , Aaron Foley , Oliver Treichel
IPC分类号： H01L21/67 , F27D7/00
摘要： A baking device for a wafer coated with a coating containing a solvent is described, having a baking chamber, a support for the wafer, an inlet for a purge gas, and an evacuation for the purge gas charged with solvent evaporated from the coating. The inlet is formed as a diffusion element arranged above the wafer so as to admit the purge gas evenly over substantially the entire surface of the wafer, and the evacuation is formed as an evacuation ring which radially surrounds the diffusion element and is arranged at a ceiling of the baking chamber.
摘要翻译：描述了涂覆有含有溶剂的涂层的晶片的烘烤装置，其具有烘烤室，用于晶片的支撑体，用于吹扫气体的入口以及用于从涂层蒸发的溶剂的吹扫气体的抽真空。入口形成为布置在晶片上方的扩散元件，以便将净化气体均匀地接纳在晶片的基本上整个表面上，并且抽空形成为径向包围扩散元件的排气环，并且布置在天花板的烘烤室。

3. 发明授权

US09458002B2 Bottle supply system and bottle cap adapter 有权
标题翻译：瓶子供应系统和瓶盖适配器
公开(公告)号：US09458002B2
公开(公告)日：2016-10-04
申请号：US14682565
申请日：2015-04-09
申请人： SUSS MicroTec Lithography GmbH
发明人： Oliver Treichel , Suayib Kartal , Kader Mekias , Aaron Foley , Greg George
IPC分类号： B67D7/02 , G03F7/16 , B05C11/10 , B67D7/32 , B67D7/76
CPC分类号： B67D7/0288 , B05C11/10 , B67D7/02 , B67D7/3227 , B67D7/763 , G03F7/16
摘要： A bottle cap adapter for supplying liquids, particularly viscous liquids, comprising: a body part; and a vent tube comprising a first opening and a second opening, the first opening being configured to be put inside a bottle in the vicinity of the bottom of the bottle, wherein the body part further comprises a first surface and a second surface, the first surface being perpendicular to the vent tube and the second surface being parallel to or tilted to the first surface, e.g., by an angle of 0° to 40°, wherein the body part further comprises a channel from the first surface to the second surface, wherein at least one part of the channel comprises a connector extending to the second surface, the connector being complementary to a connector of the bottle, wherein the body part is further configured to be coupled to a bottle supply system, and wherein the vent tube is at least partially located in the channel of the body part. Also a bottle supply system for supplying liquids, particularly viscous liquids, comprising: a top part configured to house a bottle cap adapter; a bottom part comprising a reservoir configured to receive an amount of liquid from a bottle inserted in the bottle cap adapter and comprising a pressure sensor configured to measure a fluid level in the bottle; and an output connected to the reservoir.
摘要翻译：一种用于供应液体，特别是粘稠液体的瓶盖适配器，包括：主体部分; 以及排气管，其包括第一开口和第二开口，所述第一开口构造成放置在所述瓶的底部附近的瓶内，其中所述主体部还包括第一表面和第二表面，所述第一表面表面垂直于通气管并且第二表面平行于或倾斜到第一表面，例如以0°至40°的角度，其中主体部分还包括从第一表面到第二表面的通道，其中所述通道的至少一部分包括延伸到所述第二表面的连接器，所述连接器与所述瓶的连接器互补，其中所述主体部分还被配置为联接到瓶子供应系统，并且其中所述排气管是至少部分地位于身体部分的通道中。还有一种用于供应液体，特别是粘稠液体的瓶子供应系统，包括：顶部，其构造成容纳瓶盖适配器; 底部部分包括储存器，其被配置为从插入瓶盖适配器中的瓶子接收一定量的液体，并且包括构造成测量瓶子中的液位的压力传感器; 以及连接到储存器的输出。

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