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1. 发明申请

US20200166856A1 OBJECTIVE LENS PROTECTION DEVICE, OBJECTIVE LENS SYSTEM AND LITHOGRAPHIC DEVICE 审中-公开
公开(公告)号：US20200166856A1
公开(公告)日：2020-05-28
申请号：US16632812
申请日：2018-07-23
申请人： SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
发明人： Xianming LI , Baotong HAO
IPC分类号： G03F7/20 , G02B27/00
摘要： An objective lens protection device, objective lens system and lithographic device. The objective lens protection device includes a main structure provided with, oppositely disposed, an air supply unit and extraction unit. The air supply unit is used to output air. The extraction unit extracts air output by the air supply unit to form at least one layer of air curtain between the air supply unit and extraction unit. The objective lens protection device can effectively control the flow rate of wind discharge, controlling wind in a laminar flow state and ensuring uniform flow field of the air curtain, and can effectively block organic matters volatilized from the bottom up, eliminate opportunity for a direct contact of the organic matters with the lens, and prevent objective lens from contamination by the volatilization of the organic matters of photoresist, thus ensuring the imaging quality of the objective lens.

2. 发明申请

US20190187561A1 LENS CONTAMINATION PREVENTION DEVICE AND METHOD 审中-公开
公开(公告)号：US20190187561A1
公开(公告)日：2019-06-20
申请号：US16329496
申请日：2017-08-29
申请人： SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
发明人： Baotong HAO , Dongchun LANG
IPC分类号： G03F7/20
摘要： A lens anti-contamination device is disclosed, including a first device (300) and a second device (400) connected to the first device (300), the first device (300) being closer to a lens (100) relative to the second device (400), wherein the first device (300) is used to output protective layer gas, and the protective layer gas is enabled to uniformly flow in close contact with the lower surface of the lens (100) through a nozzle (330), such that the contaminated lens (100) can be cleaned and a protective layer is funned to prevent the lens from being contaminated again; the second device (400) is used to take away gas close to a contamination source, and the contamination gas enters an annular cavity (420) through small holes (410) and is exhausted into a distant environment through the suction and exhaust power of an exhaust passage (200). A lens anti-contamination method is also disclosed. Before exposure, the first device (300) is turned on and then the second device (400) is turned on; and after 12 hours after exposure, the second device (400) may be turned off. This device and method can better solve the problem that organic matters in photoresist are volatilized and contaminate the lens, it is simple to mount, the service life is long, the cost is low, the reliability is high, and it guarantees that contaminants are fully removed without entering the object lens.

3. 发明申请

US20200149792A1 LIQUID TEMPERATURE-CONTROL APPARATUS AND METHOD 审中-公开
公开(公告)号：US20200149792A1
公开(公告)日：2020-05-14
申请号：US16627580
申请日：2018-06-26
申请人： SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
发明人： Ming WANG , Baotong HAO , Liuyang DU
IPC分类号： F25B41/06 , F25B49/02 , F25D17/02
摘要： A liquid temperature-control apparatus and method. The liquid temperature-control apparatus comprises: a circulating cooling unit for providing thermal energy and a cooling capacity for an object to be cooled; a circulating coolness application unit connected to the circulating cooling unit and used for circularly providing coolness to the object to be cooled; a heat exchange unit for carrying out heat exchange between the circulating cooling unit and the circulating coolness application unit; and a temperature detection and control unit for monitoring the temperature of the circulating cooling unit and that of the circulating coolness application unit. With the most fundamental circulating cooling unit, there is no need to weld and add any component to the circulating cooling unit, there are less welding spots in the circulating cooling unit, and there is no risk of refrigerant leakage, such that the reliability is relatively improved.

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