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1. 发明申请

US20220082942A1 PERIPHERAL PROCESSING METHOD 有权
公开(公告)号：US20220082942A1
公开(公告)日：2022-03-17
申请号：US17531858
申请日：2021-11-22
申请人： SCREEN Holdings Co., Ltd.
发明人： Joji KUWAHARA , Mitsuya KUSUHARA
IPC分类号： G03F7/42 , B08B3/08 , B08B3/02 , B08B11/02 , B08B13/00
摘要： Inclination identifying information for identifying inclination of a substrate with respect to a reference plane is detected. Based on the detected inclination identifying information and a first angle, a holding position of the substrate held by a rotation holder is corrected in a direction that is in parallel to the reference plane such that a distance between a portion of the substrate that is to be processed by a peripheral region processor and the center of the substrate is maintained constant. In this state, processing having directivity of inclination with respect to the reference plane by the first angle is performed on a peripheral region of the substrate by the peripheral region processor while the substrate is rotated by the rotation holder.

2. 发明申请

US20200098612A1 INDEXER APPARATUS, SUBSTRATE TREATING APPARATUS, METHOD FOR CONTROLLING INDEXER APPARATUS, AND METHOD FOR CONTROLLING SUBSTRATE TREATING APPARATUS 审中-公开
公开(公告)号：US20200098612A1
公开(公告)日：2020-03-26
申请号：US16556293
申请日：2019-08-30
申请人： SCREEN Holdings Co., Ltd.
发明人： Joji KUWAHARA , Seiji MURAI
IPC分类号： H01L21/677
摘要： Each of first and second substrate transportation mechanisms transports a substrate for a FOUP placed not on, for example, each of two openers disposed laterally but on, for example, each of two openers disposed in an upward/downward direction. Thus, even if the number of openers increases, the substrate is transported not by sliding a hand capable of moving forward and backward, but by lifting, lowering, and rotating the hand. Thus, transportation of the substrate can be simplified. Accordingly, standby time of substrate transportation can be reduced, and a decrease in substrate transportation efficiency can be prevented.

3. 发明申请

US20200098609A1 SUBSTRATE TREATING APPARATUS 审中-公开
公开(公告)号：US20200098609A1
公开(公告)日：2020-03-26
申请号：US16520459
申请日：2019-07-24
申请人： SCREEN Holdings Co., Ltd.
发明人： Joji KUWAHARA
IPC分类号： H01L21/677 , H01L21/67
摘要： A substrate treating apparatus includes first and second transport mechanisms, an intermediate transport mechanism, first and second intermediate parts, and a controller. The intermediate transport mechanism is disposed between the first and second transport mechanisms. The first intermediate part is disposed within a first overlapped area where the first transport mechanism and the intermediate transport mechanism are capable of transporting a substrate. The substrate is placed in the first intermediate part. The second intermediate part is disposed within a second overlapped area where the intermediate transport mechanism and the second transport mechanism are capable of transporting the substrate. The substrate is placed in the second intermediate part. The intermediate transport mechanism repeats cycle operation based on the controller's control. The cycle operation by the intermediate transport mechanism includes only a first access operation of accessing the first intermediate part and a second access operation of accessing the second intermediate part.

4. 发明申请

US20220134389A1 SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD 有权
公开(公告)号：US20220134389A1
公开(公告)日：2022-05-05
申请号：US17576325
申请日：2022-01-14
申请人： SCREEN Holdings Co., Ltd.
发明人： Joji KUWAHARA , Koji KANEYAMA
IPC分类号： B08B3/04 , H01L21/677
摘要： A substrate treating apparatus and a substrate transporting method wherein a platform is disposed on a first ID block, and a platform is placed on a second ID block. A currently-used carrier platform is provided only on the first ID block. Accordingly, a substrate is transported in both a forward path and a return path between the first ID block and a second treating block. The substrate is returned not to the first ID block but to the second ID block disposed between the two treating blocks in the return path.

5. 发明申请

US20190049865A1 SUBSTRATE PROCESSING APPARATUS, ALIGNMENT DEVICE, SUBSTRATE PROCESSING METHOD AND ALIGNMENT METHOD 审中-公开
公开(公告)号：US20190049865A1
公开(公告)日：2019-02-14
申请号：US16041139
申请日：2018-07-20
申请人： SCREEN HOLDINGS CO., LTD.
发明人： Joji KUWAHARA
IPC分类号： G03F9/00 , H01L21/68 , G03F7/20
摘要： In a substrate processing apparatus, an optical sensor is provided at a hand that transports a substrate to a processing unit, and an optical fiber is provided at a fixed member that has a certain positional relationship with a spin chuck in the processing unit. When the hand has a predetermined positional relationship with the spin chuck in the processing unit, the light emitted from a first light emitter of the optical sensor is received by a second light receiver of the optical fiber and guided to a second light emitter of the optical fiber, and the light emitted from the second light emitter is received by a first light receiver. A light receiving signal corresponding to an amount of light received by the first light receiver is output from the optical sensor.

6. 发明申请

US20180299780A1 PERIPHERAL PROCESSING APPARATUS AND PERIPHERAL PROCESSING METHOD 审中-公开
公开(公告)号：US20180299780A1
公开(公告)日：2018-10-18
申请号：US15952281
申请日：2018-04-13
申请人： SCREEN HOLDINGS CO., LTD.
发明人： Joji KUWAHARA , Mitsuya KUSUHARA
IPC分类号： G03F7/42 , B08B3/08
摘要： Inclination identifying information for identifying inclination of a substrate with respect to a reference plane is detected. Based on the detected inclination identifying information and a first angle, a holding position of the substrate held by a rotation holder is corrected in a direction that is in parallel to the reference plane such that a distance between a portion of the substrate that is to be processed by a peripheral region processor and the center of the substrate is maintained constant. In this state, processing having directivity of inclination with respect to the reference plane by the first angle is performed on a peripheral region of the substrate by the peripheral region processor while the substrate is rotated by the rotation holder.

7. 发明申请

US20180231952A1 SUBSTRATE TRANSPORT DEVICE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SUBSTRATE TRANSPORT DEVICE, AND SUBSTRATE TRANSPORT METHOD 审中-公开
公开(公告)号：US20180231952A1
公开(公告)日：2018-08-16
申请号：US15861716
申请日：2018-01-04
申请人： SCREEN Holdings Co., Ltd.
发明人： Joji KUWAHARA
IPC分类号： G05B19/19 , G05B19/418
CPC分类号： G05B19/19 , G05B19/4189 , Y02P90/02
摘要： A portion position calculator calculates positions of first to fifth portions of a substrate on a hand based on detection signals of first to fifth detectors. An imaginary circle calculator calculates four different imaginary circles based on the positions of the first to fourth portions, respectively, to calculate a center position of each imaginary circle. A substrate position determiner calculates a plurality of amounts of deviation among the plurality of center positions. When all of the plurality of amounts of deviation are not more than a threshold value, the substrate position determiner determines a position of the substrate on the hand based on any or all of the four imaginary circles. When at least one of the plurality of amounts of deviation exceeds the threshold value, the substrate position determiner selects an imaginary circle of the four imaginary circles, which passes through the position of the fifth portion, and determines the position of the substrate on the hand based on the selected imaginary circle. A substrate transport operation is controlled based on a result of the determination.

8. 发明申请

US20150314314A1 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD 审中-公开
标题翻译：基板处理装置和基板处理方法
公开(公告)号：US20150314314A1
公开(公告)日：2015-11-05
申请号：US14697675
申请日：2015-04-28
申请人： SCREEN Holdings Co., Ltd.
发明人： Joji KUWAHARA
IPC分类号： B05B12/12 , B08B3/02 , B05C13/00
CPC分类号： H01L21/67253 , B05B12/122 , B05C13/00 , B08B3/02
摘要： A rotation holding device is rotated about a rotation axis, and a controller calculates a rotation direction offset amount, an X offset amount and a Y offset amount based on position data that is acquired from a line sensor. An X direction movable portion and a Y direction movable portion are moved such that the X offset amount and the Y offset amount become 0, and the rotation holding device is rotated such that the rotation direction offset amount becomes 0. A film thickness measurement device sequentially measures the thickness of a film on a substrate while the X direction movable portion is moved in an X direction.
摘要翻译：旋转保持装置围绕旋转轴线旋转，并且控制器基于从线传感器获取的位置数据来计算旋转方向偏移量，X偏移量和Y偏移量。移动X方向可动部和Y方向可动部，使得X偏移量和Y偏移量变为0，旋转保持装置旋转，使得旋转方向偏移量变为0.膜厚测量装置顺序地在X方向可动部分沿X方向移动时，测量衬底上的膜的厚度。

9. 发明申请

US20210020475A1 SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD 有权
公开(公告)号：US20210020475A1
公开(公告)日：2021-01-21
申请号：US16931523
申请日：2020-07-17
申请人： SCREEN Holdings Co., Ltd.
发明人： Joji KUWAHARA
IPC分类号： H01L21/67 , H01L21/677 , G03F7/20 , G03F7/16 , B65G47/90
摘要： Disclosed are a substrate treating apparatus and a substrate transporting method for the substrate treating apparatus. Two treating blocks are arranged so as not to be stacked, and a first treating block, an ID block, and a second treating block are linearly connected horizontally. Accordingly, the number of treatment layers is increasable while a height of the substrate treating apparatus is suppressed. The first and second treating blocks are each connected to the ID block directly. This enables suppression in step of passing a substrate through a treating block without performing any treatment on the substrate, leading to prevention of decrease in throughput. In addition, a substrate buffer is placed in the middle of the two treating blocks. The two treating blocks enable transportation of substrates W with the substrate buffer. Thus, reduction in footprint of the substrate treating apparatus is obtainable.

10. 发明申请

US20200211880A1 SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD 审中-公开
公开(公告)号：US20200211880A1
公开(公告)日：2020-07-02
申请号：US16724429
申请日：2019-12-23
申请人： SCREEN Holdings Co., Ltd.
发明人： Joji KUWAHARA
IPC分类号： H01L21/677 , G03F7/20 , H01L21/67
摘要： Disclosed are a substrate treating apparatus and a substrate transporting method. A platform is placed on a first ID block, and a platform is placed on a second ID block. A currently-used carrier platform is provided only on the first ID block. Accordingly, a substrate is transported in both a forward path and a return path between the first ID block and an IF block. According to the disclosure, the substrate is sent in the return path from the IF block to the second ID block disposed between a coating block and a developing block without being transported from the IF block to the first ID block. Consequently, transportation process in the return path by the coating block disposed between the first ID block and the second ID block is reduced. As a result, an entire throughput of a substrate treating apparatus can be enhanced.

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