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    • 6. 发明授权
    • Insulated gate bipolar transistor
    • 绝缘栅双极晶体管
    • US09318589B2
    • 2016-04-19
    • US13751916
    • 2013-01-28
    • SAMSUNG ELECTRO-MECHANICS CO., LTD.
    • Jaehoon ParkChang Su JangIn Hyuk SongKee Ju UmDong Soo Seo
    • H01L29/739H01L29/10
    • H01L29/7397H01L29/1095
    • There is provided an insulated gate bipolar transistor including: a first semiconductor area of a first conductivity type; a second semiconductor area of a second conductivity type formed on one surface of the first semiconductor area; third semiconductor areas of the first conductivity type continuously formed in a length direction on one surface of the second semiconductor area; a plurality of trenches formed between the third semiconductor areas, extending to an inside of the second semiconductor area, and being continuous in the length direction; a fourth semiconductor area of the second conductivity type formed on one surface of the third semiconductor areas, insulation layers formed inside the trenches; gate electrodes buried inside the insulation layers; and a barrier layer formed in at least one of locations corresponding to the third semiconductor areas inside the second semiconductor area.
    • 提供了一种绝缘栅双极晶体管,包括:第一导电类型的第一半导体区域; 形成在第一半导体区域的一个表面上的第二导电类型的第二半导体区域; 在第二半导体区域的一个表面上沿长度方向连续形成的第一导电类型的第三半导体区域; 多个沟槽,形成在第三半导体区域之间,延伸到第二半导体区域的内部,并且在长度方向上是连续的; 形成在第三半导体区域的一个表面上的第二导电类型的第四半导体区域,形成在沟槽内的绝缘层; 掩埋在绝缘层内的栅电极; 以及形成在与所述第二半导体区域内的所述第三半导体区域对应的位置中的至少一个的阻挡层。