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热词
    • 9. 发明授权
    • Thin film transistor and method of forming the same
    • 薄膜晶体管及其形成方法
    • US08895977B2
    • 2014-11-25
    • US13673195
    • 2012-11-09
    • Samsung Display Co., Ltd.
    • Doo Hyoung LeeBo Sung KimChan Woo YangSeung-Ho JungYeon Taek JeongJune Whan ChoiTae-Young Choi
    • H01L21/786H01L29/786H01L21/385
    • H01L29/66969H01L21/02565H01L21/02614H01L21/385H01L21/441H01L21/477H01L29/7869
    • A thin film transistor includes a substrate, an oxide semiconductor layer that is disposed on the substrate, a gate electrode that overlaps with the oxide semiconductor layer, a gate insulating layer that is disposed between the oxide semiconductor layer and the gate electrode, and a source electrode and a drain electrode that at least partially overlap with the oxide semiconductor layer and are spaced from each other. The gate insulating layer includes an oxide including a first material. The oxide semiconductor layer includes an oxide which includes a same material as the first material and a second material, and the source electrode and the drain electrode include an oxide that includes a same material as the second material and a third material, and a grain boundary is not formed on an interface between at least one of the gate insulating layer and the oxide semiconductor layer or between the oxide semiconductor layer, and the source electrode and the drain electrode.
    • 薄膜晶体管包括衬底,设置在衬底上的氧化物半导体层,与氧化物半导体层重叠的栅电极,设置在氧化物半导体层和栅电极之间的栅极绝缘层,以及源极 电极和与氧化物半导体层至少部分重叠并且彼此间隔开的漏电极。 栅极绝缘层包括包含第一材料的氧化物。 氧化物半导体层包括与第一材料相同的材料和第二材料的氧化物,源电极和漏极包括包含与第二材料相同的材料的氧化物和第三材料,以及晶界 不形成在栅极绝缘层和氧化物半导体层中的至少一个之间或氧化物半导体层以及源电极和漏电极之间的界面上。