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    • 5. 发明申请
    • METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS, DEPOSITION APPARATUS USING THE METHOD, AND ORGANIC LIGHT-EMITTING DISPLAY APPARATUS MANUFACTURED BY USING THE METHOD
    • 制造有机发光显示装置的方法,使用该方法的沉积装置和使用该方法制造的有机发光显示装置
    • US20140284559A1
    • 2014-09-25
    • US13941424
    • 2013-07-12
    • Samsung Display Co., Ltd.
    • Dong-Wook Kim
    • H01L51/56H01L27/32
    • H01L51/56H01L51/0011
    • A method of manufacturing an organic light-emitting display apparatus, a deposition apparatus using the method, and an organic light-emitting display apparatus manufactured by the method, in which substrate effluence is blocked during transportation of a transport unit. The method includes: rotating a transfer unit, to which a substrate is placed or is to be placed, by first and second flip transport units, in a first rotational direction or in an opposite rotational direction to the first rotational direction, by a set angle; forming a layer by depositing a material emitted from a deposition assembly, on the substrate while placing the deposition assembly and the substrate to be separated from each other by a set distance and moving the substrate relatively with respect to the deposition assembly in a first direction via a first transfer unit; and transporting the transport unit in the opposite direction to the first direction after deposition.
    • 使用该方法制造有机发光显示装置的方法,使用该方法的沉积装置和通过该方法制造的有机发光显示装置,其中在运输单元的运输期间基板流出被阻挡。 该方法包括:通过第一和第二翻转输送单元,在第一旋转方向或与第一旋转方向相反的旋转方向上旋转放置或待放置基板的转印单元,设定角度 ; 通过将从沉积组件发射的材料沉积在衬底上而形成层,同时将沉积组件和待分离的衬底放置一定距离,并使衬底相对于沉积组件相对于第一方向在第一方向上移动,通过 第一传输单元; 并且在沉积之后沿与第一方向相反的方向传送传送单元。