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    • 10. 发明申请
    • METHOD AND APPARATUS FOR ACTIVATING COMPOUND SEMICONDUCTOR
    • 用于激活化合物半导体的方法和装置
    • US20110163076A1
    • 2011-07-07
    • US12984389
    • 2011-01-04
    • Norihito KAWAGUCHI
    • Norihito KAWAGUCHI
    • B23K26/00
    • H01L21/268H01L21/02538H01L21/02686
    • A compound semiconductor is placed in a reaction vessel (12) of which the inner gas is subjected to replacement with a low-vapor-pressure gas (2) whose equilibrium vapor pressure at the melting point of the compound semiconductor is 1 atm or lower. The low-vapor-pressure gas is urged to flow along the surface of the compound semiconductor while keeping the internal pressure of the reaction vessel at a value not lower than that equilibrium vapor pressure. The surface of the compound semiconductor is irradiated with a pulsed-laser light (3) whose photon energy is higher than the band gap of the compound semiconductor. Thus, only that part of the compound semiconductor which is located at the pulsed-laser light irradiation position is instantly heated and melted while keeping the atmospheric temperature of the low-vapor-pressure gas at a room temperature or a temperature equal to or lower than the decomposition temperature.
    • 化合物半导体放置在反应容器(12)中,其内部气体用化合物半导体的熔点的平衡蒸气压为1atm以下的低蒸汽压气体(2)进行置换。 促使低蒸气压气体沿着化合物半导体的表面流动,同时将反应容器的内部压力保持在不低于该平衡蒸汽压力的值。 用光子能量高于化合物半导体的带隙的脉冲激光(3)照射化合物半导体的表面。 因此,仅将位于脉冲激光照射位置的化合物半导体的那部分即时加热熔融,同时保持低气压气体的大气温度为室温或等于或低于 分解温度。