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    • 1. 发明授权
    • Multibit ΔΣ modulation DA converter
    • 多位DeltaSigma调制DA转换器
    • US07268716B2
    • 2007-09-11
    • US11379975
    • 2006-04-24
    • Ryoji SakiyamaKazuhiro Kimura
    • Ryoji SakiyamaKazuhiro Kimura
    • H03M3/00
    • H03M3/366H03M3/502
    • A DA converter comprises a high-pass filter that outputs a multibit digital signal with a predetermined frequency or lower thereof attenuated if a signal level of the input multibit digital signal is less than a predetermined threshold, the high-pass filter outputting the multibit digital signal without attenuation if the signal level is at the threshold or higher; a ΔΣ modulator that performs ΔΣ modulation of the signal output from the filter unit; a dynamic element matching circuit that divides the signal output from the ΔΣ modulator to a plurality of signals; and a plurality of internal DA converters that convert the plurality of signals output from the dynamic element matching circuit to an analog signal.
    • 如果输入多位数字信号的信号电平小于预定阈值,则DA转换器包括高通滤波器,其输出预定频率或更低频率的多位数字信号被衰减,高通滤波器输出多位数字信号 如果信号电平在阈值以上,则无衰减; DeltaSigma调制器,其对从所述滤波器单元输出的信号执行DeltaSigma调制; 动态元件匹配电路,其将从DeltaSigma调制器输出的信号分割成多个信号; 以及将从动态元件匹配电路输出的多个信号转换为模拟信号的多个内部DA转换器。
    • 2. 发明申请
    • MULTIBIT DELTA SIGMA MODULATION DA CONVERTER
    • 多字符DELTA SIGMA调制DA转换器
    • US20060255992A1
    • 2006-11-16
    • US11379975
    • 2006-04-24
    • Ryoji SakiyamaKazuhiro Kimura
    • Ryoji SakiyamaKazuhiro Kimura
    • H03M3/00
    • H03M3/366H03M3/502
    • A DA converter comprises a high-pass filter that outputs a multibit digital signal with a predetermined frequency or lower thereof attenuated if a signal level of the input multibit digital signal is less than a predetermined threshold, the high-pass filter outputting the multibit digital signal without attenuation if the signal level is at the threshold or higher; a ΔΣ modulator that performs ΔΣ modulation of the signal output from the filter unit; a dynamic element matching circuit that divides the signal output from the ΔΣ modulator to a plurality of signals; and a plurality of internal DA converters that convert the plurality of signals output from the dynamic element matching circuit to an analog signal.
    • 如果输入多位数字信号的信号电平小于预定阈值,则DA转换器包括高通滤波器,其输出具有预定频率或更低频率的多位数字信号被衰减,高通滤波器输出多位数字信号 如果信号电平在阈值以上,则无衰减; DeltaSigma调制器,其对从所述滤波器单元输出的信号执行DeltaSigma调制; 动态元件匹配电路,其将从DeltaSigma调制器输出的信号分割成多个信号; 以及将从动态元件匹配电路输出的多个信号转换为模拟信号的多个内部DA转换器。
    • 6. 发明申请
    • Device for processing substrate and method of manufacturing semiconductor device
    • 用于处理衬底的器件和制造半导体器件的方法
    • US20100136714A1
    • 2010-06-03
    • US12656497
    • 2010-02-01
    • Kazuhiro YuasaKazuhiro KimuraYasuhiro Megawa
    • Kazuhiro YuasaKazuhiro KimuraYasuhiro Megawa
    • H01L21/66B05C11/10
    • H01L21/67253Y10S438/908Y10S438/913
    • Provided is a substrate processing apparatus and a method of manufacturing a semiconductor device, which are hard to cause a defect in processing a substrate owing to that a pressure inside a process chamber is not kept constant, and which enable a better processing of a substrate. The substrate processing apparatus has: a process chamber for processing a substrate; a reactive gas-supplying module for supplying a reactive gas into the process chamber; a reactive gas-supplying line for supplying the reactive gas from the reactive gas-supplying module into the process chamber; an exhaust line for exhausting an inside of the process chamber; a pump provided in the exhaust line for vacuumizing the inside of the process chamber; a pressure-adjusting valve provided in the exhaust line for adjusting a pressure in the process chamber; a first pressure-measuring instrument for measuring an inside pressure of the process chamber; a second pressure-measuring instrument for measuring a differential pressure between the inside pressure of the process chamber and an outside pressure thereof; and a controller which controls the pressure-adjusting valve based on a value of the inside pressure of the process chamber measured by the first pressure-measuring instrument so as to keep the inside pressure of the process chamber constant, and controls the reactive gas-supplying module based on a value of the differential pressure measured by the second pressure-measuring instrument so as to allow supply of the reactive gas into the process chamber in a case of the inside pressure of the process chamber being smaller than the outside pressure thereof, and so as to preclude supply of the reactive gas into the process chamber in a case of the inside pressure of the process chamber being larger than the outside pressure thereof when processing the substrate.
    • 提供了由于处理室内的压力不保持恒定而难以引起基板处理缺陷的基板处理装置和半导体装置的制造方法,能够更好地处理基板。 基板处理装置具有:处理基板的处理室; 用于将反应性气体供应到处理室中的反应气体供应模块; 用于将来自反应气体供应模块的反应气体供应到处理室中的反应气体供应管线; 用于排出处理室内部的排气管线; 设置在排气管线中的用于对处理室的内部进行抽真空的泵; 设置在所述排气管路中用于调节所述处理室中的压力的​​压力调节阀; 用于测量处理室的内部压力的第一压力测量仪器; 用于测量处理室的内部压力与其外部压力之间的压差的第二压力测量仪器; 以及控制器,其基于由所述第一压力测量仪测量的所述处理室的内部压力的值来控制所述压力调节阀,以便保持所述处理室的内部压力恒定,并且控制所述反应性气体供给 模块,其基于由所述第二压力测量仪测量的所述压差的值,以便在所述处理室的内部压力小于其外部压力的情况下允许将所述反应气体供应到所述处理室中;以及 在处理基板时,在处理室的内部压力大于其外部压力的情况下,防止反应气体供应到处理室中。
    • 7. 发明授权
    • Dictionary management apparatus and a dictionary server
    • 字典管理装置和字典服务器
    • US06282508B1
    • 2001-08-28
    • US09035767
    • 1998-03-06
    • Kazuhiro KimuraHideki HirakawaAkira Kumano
    • Kazuhiro KimuraHideki HirakawaAkira Kumano
    • G06F1721
    • G06F17/2735G06F17/2863
    • The dictionary management apparatus of the present invention updates each dictionary included in a plurality of language processing system. A request section requests download of dictionary data for a dictionary server according to a user's request or a predetermined condition. The dictionary server stores the dictionary data to be supplied to the language processing system. An update section updates the dictionary of the plurality of language processing system according to the dictionary data downloaded from the dictionary server. A collection section collects a user dictionary data updated in the dictionary of at least one language processing system. An upload section sends the user dictionary data collected by the collection section to the dictionary server as upload data.
    • 本发明的字典管理装置更新包括在多个语言处理系统中的每个字典。 请求部分请求根据用户的请求或预定条件下载字典服务器的字典数据。 字典服务器存储要提供给语言处理系统的字典数据。 更新部根据从字典服务器下载的字典数据来更新多个语言处理系统的字典。 收集部分收集在至少一个语言处理系统的字典中更新的用户字典数据。 上传部分将收集部分收集的用户字典数据作为上传数据发送到字典服务器。
    • 9. 发明授权
    • Synchronization regeneration circuit
    • 同步再生电路
    • US5809094A
    • 1998-09-15
    • US654858
    • 1996-05-29
    • Takahiko MasumotoKazuhiro KimuraHiroshi Kaneko
    • Takahiko MasumotoKazuhiro KimuraHiroshi Kaneko
    • H04H40/18H04J3/06H04L7/00
    • H04J3/0608H04H40/18H04H2201/13
    • An offset circuit (2) detects an offset word serving as a synchronization pattern. By being triggered by the detection, main and subordinate synchronization detection circuits (5 and 6) detect the periodicity of the offset word only during a predetermined backward guard period. Both synchronization detection circuits (5 and 6) detect offset words at different timings. Therefore, if one synchronization detection circuit (5 or 6) fails in detection of synchronization, it is possible to use a detection result of the other synchronization detection circuit (5 or 6). Moreover, received data during the backward guard period is stored in a data memory (11). Therefore, it is possible to use the stored data as received data after detection of synchronization. Even after establishment of synchronization, the synchronization detection circuit (5 or 6) continuously detects the periodicity of an offset word at a timing different from an established timing. Therefore, when established synchronization is incorrect, it can immediately be corrected.
    • 偏移电路(2)检测作为同步模式的偏移字。 通过检测触发,主要和从属同步检测电路(5和6)仅在预定的后退保护周期期间检测偏移字的周期。 两个同步检测电路(5和6)在不同的定时检测偏移字。 因此,如果一个同步检测电路(5或6)在同步检测中失败,则可以使用另一个同步检测电路(5或6)的检测结果。 此外,在后向保护期间的接收数据存储在数据存储器(11)中。 因此,可以在检测到同步之后将所存储的数据用作接收数据。 即使在同步建立之后,同步检测电路(5或6)在与建立的定时不同的定时连续检测偏移字的周期。 因此,当建立同步不正确时,可以立即进行更正。