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    • 4. 发明授权
    • Process for producing fluoropolymer particles
    • 含氟聚合物颗粒的制造方法
    • US08378063B2
    • 2013-02-19
    • US12644306
    • 2009-12-22
    • Susumu SaitoTetsuji ShimohiraTakashi SaekiJunichi Tayanagi
    • Susumu SaitoTetsuji ShimohiraTakashi SaekiJunichi Tayanagi
    • C08F6/00
    • C08F6/24C08F6/001C08F6/003C08F6/12C08F6/20C08F6/22C08F14/18C08L27/12C08F2/04
    • A process for producing fluoropolymer particles includes preparing a solution/dispersion containing fluoropolymer dissolved/dispersed in a first solvent such that the swelling of fluoropolymer by the first solvent is from 50 to 1,200%, and mixing the solution/dispersion with a second solvent such that fluoropolymer forms particles and the swelling of fluoropolymer by the mixture of the first and second solvents is from 0 to 100%. WC/WB is in the range of from 1 to 5, WB represents mass of the first solvent, WC/ represents mass of the second solvent, WC/WB represents a ratio of the mass of the second solvent to the mass of the first solvent. SBC/SB is at most 0.5. SBC represents the swelling by the mixture of the first and second solvents, SB represents the swelling by the first solvent, and SBC/SB represents a ratio of the swelling by the mixture to the swelling by the first solvent.
    • 制备含氟聚合物颗粒的方法包括制备溶解/分散在第一溶剂中的含氟聚合物的溶液/分散体,使得第一溶剂的含氟聚合物的溶胀为50-1200%,并将溶液/分散体与第二溶剂混合使得 氟聚合物形成颗粒,并且通过第一和第二溶剂的混合物的含氟聚合物的溶胀为0至100%。 WC / WB在1至5的范围内,WB表示第一溶剂的质量,WC /表示第二溶剂的质量,WC / WB表示第二溶剂的质量与第一溶剂的质量的比率 。 SBC / SB最多为0.5。 SBC表示第一溶剂和第二溶剂的混合物的溶胀,SB表示第一溶剂的溶胀,SBC / SB表示混合物的溶胀与第一溶剂溶胀的比例。
    • 6. 发明授权
    • Fuel cell system
    • 燃料电池系统
    • US08182951B2
    • 2012-05-22
    • US12828710
    • 2010-07-01
    • Satoru HommuraSusumu SaitoTetsuji ShimohiraAtsushi WatakabeJunichi Tayanagi
    • Satoru HommuraSusumu SaitoTetsuji ShimohiraAtsushi WatakabeJunichi Tayanagi
    • H01M8/04H01M8/10
    • H01M8/1067C08J5/2237C08J2327/12H01M8/04358H01M8/04768H01M8/04835H01M8/1025H01M8/1039
    • To provide a fuel cell system provided with a polymer electrolyte fuel cell which is excellent in the power generation characteristics under high temperature and low or no humidity conditions.A fuel cell system 20 comprising a polymer electrolyte fuel cell 22 having a membrane/electrode assembly 10 having a catalyst layer containing a polymer (H) which has repeating units based on a perfluoromonomer having an alicyclic structure and has ion exchange groups, a temperature controlling means for controlling temperature of the polymer electrolyte fuel cell 22, a temperature sensor 38 for detecting temperature of the polymer electrolyte fuel cell 22, and a controlling device 40 for controlling the temperature controlling means based on temperature information from the temperature sensor 38 so that the maximum temperature of the polymer electrolyte fuel cell 22 becomes within the range of from 90 to 140° C.
    • 提供一种设置有在高温低湿条件下发电特性优异的聚合物电解质型燃料电池的燃料电池系统。 一种燃料电池系统20,包括具有膜/电极组件10的聚合物电解质燃料电池22,所述膜/电极组件10具有含有聚合物(H)的催化剂层,所述聚合物(H)具有基于具有脂环结构的全氟单体的重复单元并具有离子交换基团,温度控制 用于控制聚合物电解质燃料电池22的温度的装置,用于检测聚合物电解质燃料电池22的温度的温度传感器38,以及用于基于来自温度传感器38的温度信息来控制温度控制装置的控制装置40, 聚合物电解质燃料电池22的最高温度在90〜140℃的范围内。
    • 7. 发明授权
    • Etching amount calculating method, storage medium, and etching amount calculating apparatus
    • 蚀刻量计算方法,存储介质和蚀刻量计算装置
    • US08014891B2
    • 2011-09-06
    • US12353457
    • 2009-01-14
    • Susumu Saito
    • Susumu Saito
    • G06F19/00G01L21/30C23F1/00G01B9/02
    • H01J37/32963H01J37/32935H01J37/32972H01L22/26
    • An etching amount calculating method that can stably and accurately calculate the amount of etching even if a disturbance is added. Superposed interference light resulting from superposition of interference light of reflected light from a mask film and reflected light from the bottom of a concave portion on other interference light is received. A waveform in a predetermined time period is extracted from a superposed interference wave calculated from the superposed interference light. The period of an interference wave of the reflected light from the mask film and the reflected light from the bottom is detected from the distribution of frequencies of the extracted waveform. The steps described above are repeated while shifting the predetermined time period by a predetermined time, and the detected periods are integrated and averaged at each repetition. The etching amount of the concave portion is calculated based on the integrated and averaged periods.
    • 即使添加了干扰,也能够稳定,准确地计算蚀刻量的蚀刻量计算方法。 接收来自掩模膜的反射光的干涉光的叠加和来自凹部的底部的反射光在其他干涉光上的叠加干涉光。 从叠加干涉光计算的叠加干扰波中提取预定时间段内的波形。 从提取的波形的频率的分布中检测来自掩模膜的反射光的干涉波的周期和来自底部的反射光的周期。 在将预定时间段移动预定时间的同时重复上述步骤,并且在每次重复时对所检测的周期进行积分和平均。 基于积分和平均周期来计算凹部的蚀刻量。
    • 9. 发明申请
    • PLASMA PROCESSING APPARATUS FOR PERFORMING ACCURATE END POINT DETECTION
    • 用于执行精确的端点检测的等离子体处理装置
    • US20100089532A1
    • 2010-04-15
    • US12637955
    • 2009-12-15
    • Kosuke OGASAWARASusumu SaitoSyuji Nozawa
    • Kosuke OGASAWARASusumu SaitoSyuji Nozawa
    • H01L21/3065
    • H01J37/32935H01J37/32963H01L22/26
    • A plasma processing apparatus for generating a plasma of a processing gas by applying a high frequency power to an electrode provided in a processing chamber and processing a substrate using the plasma is provided. The plasma processing apparatus includes an optical data detection unit, a data storage unit and a control unit. The optical data detection unit detects optical data when plasma processing the substrate. The data storage unit stores correlation data representing a correlation between type data corresponding to a plurality of types classified based on a type of a mask or a film to be processed disposed on the substrate and optical data to be detected by the optical data detection unit, and end point detection setting data sets, each of the setting data sets serving to detect a plasma processing end point and corresponding to one of the types.
    • 提供了一种等离子体处理装置,其通过向设置在处理室中的电极施加高频功率并使用等离子体处理衬底来产生处理气体的等离子体。 等离子体处理装置包括光学数据检测单元,数据存储单元和控制单元。 光学数据检测单元在等离子体处理衬底时检测光学数据。 数据存储单元存储表示与基于掩膜的类型分类的多种类型的类型数据之间的相关性的相关性数据,以及由光学数据检测单元检测的要被检测的光学数据, 和终点检测设定数据组,每个设定数据组用于检测等离子体处理终点并对应于其中一种类型。
    • 10. 发明申请
    • POLYMER ELECTROLYTE MEMBRANE FOR POLYMER ELECTROLYTE FUEL CELLS, AND MEMBRANE/ELECTRODE ASSEMBLY
    • 用于聚合物电解质燃料电池的聚合物电解质膜和膜/电极组件
    • US20100009236A1
    • 2010-01-14
    • US12483315
    • 2009-06-12
    • Seigo KoteraTetsuji ShimohiraSatoru HommuraSusumu Saito
    • Seigo KoteraTetsuji ShimohiraSatoru HommuraSusumu Saito
    • H01M8/10
    • H01B1/122H01M8/1023H01M8/1039H01M8/106H01M8/1067
    • To provide a polymer electrolyte membrane for polymer electrolyte fuel cells having high mechanical strength and excellent dimensional stability when it contains water even when it is made thin and the concentration of ionic groups is increased so as to reduce the electrical resistance, and a membrane/electrode assembly providing high output and having excellent durability.A polymer electrolyte membrane 15, which comprises a fluorinated proton conductive polymer (i) having a proton conductivity of at least 0.06 S/cm in an atmosphere at a temperature of 80° C. under a relative humidity of 50%, and (ii) having repeating units based on a vinyl ether type monomer with a mass (equivalent weight) of at most 400 per 1 mol of ionic groups and repeating units based on a perfluoromonomer (except for the above vinyl ether type monomer) and a fluorinated reinforcing material; and a membrane/electrode assembly 10 comprising the polymer electrolyte membrane 15 interposed between an anode 13 and a cathode 14.
    • 为了提供具有高机械强度和优异的尺寸稳定性的高分子电解质膜的高分子电解质膜,即使在含有水的情况下也含有水分,并且提高离子基团的浓度以降低电阻,并且提供膜/电极 组装提供高输出并具有优异的耐久性。 在相对湿度为50%的温度为80℃的气氛中,包含质子传导率为0.06S / cm以上的质子传导性聚合物(i)的高分子电解质膜15,(ii) 具有基于每1mol离子基质量(当量)至多400个/基于全氟单体(除上述乙烯基醚型单体除外)和氟化增强材料的重复单元)的乙烯基醚型单体的重复单元; 以及包含介于阳极13和阴极14之间的聚合物电解质膜15的膜/电极组件10。