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1. 发明授权

US06932946B2 Ozone generator 有权
标题翻译：臭氧发生器
公开(公告)号：US06932946B2
公开(公告)日：2005-08-23
申请号：US09885102
申请日：2001-06-21
申请人： Ryoichi Shinjo , Minoru Harada , Yukiko Nishioka
发明人： Ryoichi Shinjo , Minoru Harada , Yukiko Nishioka
IPC分类号： C01B13/11 , H01T23/00 , B01J19/08
CPC分类号： C01B13/11 , C01B2201/12 , C01B2201/22
摘要： An ozone generator comprises a pair of spaced opposing electrodes, electrically conductive members connecting the pair of electrodes to a high-voltage alternating-current power source to generate an electric discharge between the electrodes, and a dielectric provided between the opposing electrodes. A gas flow passage for allowing flow of a material gas therethrough is defined by the surfaces of the electrodes. At least one of the surfaces of the pair of electrodes has a plurality of parallel grooves. The material gas flows in a space between the plurality of grooves and the dielectric, in a direction transverse to the grooves.
摘要翻译：臭氧发生器包括一对间隔的相对电极，将该对电极连接到高压交流电源的导电构件，以在电极之间产生放电，以及设置在相对电极之间的电介质。用于允许材料气体流过其中的气体流动通道由电极的表面限定。该对电极的至少一个表面具有多个平行的凹槽。材料气体在横向于槽的方向上在多个槽和电介质之间的空间中流动。

2. 发明授权

US5538695A Ozonizer 失效
标题翻译：臭氧发生器
公开(公告)号：US5538695A
公开(公告)日：1996-07-23
申请号：US85152
申请日：1993-07-02
申请人： Ryoichi Shinjo , Ichiro Kamiya , Minoru Harada , Yukiko Nishioka
发明人： Ryoichi Shinjo , Ichiro Kamiya , Minoru Harada , Yukiko Nishioka
IPC分类号： C01B13/10 , C01B13/11 , B01J19/12
CPC分类号： C01B13/11 , C01B2201/22 , C01B2201/64 , C01B2201/66 , C01B2201/74
摘要： In an electric discharge type ozonizer using highly pure oxygen gas having a purity of not lower than 99.99% as a raw material gas, the pressure of a gas in the discharge space of a discharger is raised to a level higher than atmospheric pressure by at least 1.1 kgf/cm.sup.2, and/or in which a liquid-cooled discharger is used, and the temperature of the cooling liquid is set at a level not lower than 15.degree. C., whereby the ozonizer is capable of stably producing ozone gas at a high ozone concentration without causing lowering of the ozone concentration with time.
摘要翻译：在使用纯度不低于99.99％的高纯氧气作为原料气体的放电式臭氧发生器中，放电器的放电空间中的气体压力至少升高至大气压以上 1.1kgf / cm2，和/或其中使用液冷式排出器，冷却液的温度设定在不低于15℃的水平，由此臭氧发生器能够在臭氧浓度高而不会随时间降低臭氧浓度。

3. 发明授权

US5549874A Discharge reactor 失效
标题翻译：放电反应堆
公开(公告)号：US5549874A
公开(公告)日：1996-08-27
申请号：US49866
申请日：1993-04-20
申请人： Ichiro Kamiya , Ryoichi Shinjo , Takeshi Murakami , Yukiko Nishioka , Minoru Harada
发明人： Ichiro Kamiya , Ryoichi Shinjo , Takeshi Murakami , Yukiko Nishioka , Minoru Harada
IPC分类号： H01J49/02 , C01B13/11 , B01J19/08
CPC分类号： C01B13/11 , C01B2201/34 , Y10S422/907
摘要： A discharge reactor that generates silent discharge and/or creeping discharge between dielectric and high voltage electrode and/or grounded electrode, said dielectric being located between high voltage electrode and grounded electrode, and which generates clean ozone in the discharge space 1 as it passes through said discharge space 1 or as it is held within said discharge space 1, which discharge reactor is characterized in that the dielectric is made of highly purified quartz glass (SiO.sub.2) or single-crystal sapphire which is a highly purified crystallized aluminium oxide or high-purity alumina ceramics which is the firing of highly purified aluminum oxide. Further, in order to obtain cleaner and highly concentration ozone, at least the electrode or electrodes in the area of the discharge space which is to be exposed to discharge are made of a high-purity aluminum material and at least the area of the discharge space which is to be exposed to discharge is further coated with an anodic oxidation film.
摘要翻译：一种在电介质和高电压电极和/或接地电极之间产生静电放电和/或爬电放电的放电反应器，所述电介质位于高电压电极和接地电极之间，并且在放电空间1中通过时产生干净的臭氧所述放电空间1或其保持在所述放电空间1内，该放电反应器的特征在于电介质由高度纯化的石英玻璃（SiO 2）或单晶蓝宝石制成，其是高度纯化的结晶的氧化铝或高纯度的结晶的氧化铝，纯度高的氧化铝陶瓷，是高纯度氧化铝的烧制。此外，为了获得更清洁和高浓度的臭氧，至少要放电的放电空间区域中的电极或电极由高纯度铝材料制成，并且至少放电空间的区域进一步用阳极氧化膜进行曝光。

4. 发明授权

US5488842A Method for deodorizing and refreshing for dry cleaning and dry cleaning apparatus using such method 失效
标题翻译：使用这种方法的干洗和干洗设备的除臭和清爽方法
公开(公告)号：US5488842A
公开(公告)日：1996-02-06
申请号：US293338
申请日：1994-08-24
申请人： Yukiko Nishioka , Ichiro Kamiya , Ryoichi Shinjo , Yoshihiro Ishii , Koichi Kosaka
发明人： Yukiko Nishioka , Ichiro Kamiya , Ryoichi Shinjo , Yoshihiro Ishii , Koichi Kosaka
IPC分类号： D06F43/08
CPC分类号： D06F43/085
摘要： The present invention provides a method for deodorizing and refreshing petroleum group solvent used in a dry cleaning apparatus, and a dry cleaning apparatus using such a method, which can maintain the circulating solvent in a fresh condition for a long time, eliminate a bad smell of the solvent, provide highly stable cleaning ability and good cleaning finish, and prevent ignition and explosion of the solvent to ensure safety. In the dry cleaning apparatus, the petroleum group solvent in a solvent storage tank 2 is pumped by a circulating pump 5, is supplied to a cleaning bath 8 through a filter 6 and carbon absorbent 7 and then is returned from the cleaning bath 8 to the solvent storage tank 2 through a button trap 3, and an ozone generating device 10 is provided for generating ozone gas and a diffuser 11 for pouring the ozone gas produced by the ozone generating device 10 Into the petroleum group solvent as fine bubbles are arranged to be contacted with a bottom surface of the solvent storage tank 2 or the button trap 3.
摘要翻译：本发明提供了一种用于干燥设备中使用的石油溶剂的除臭和清新方法，以及使用这种可长时间保持循环溶剂处于新鲜状态的方法的干洗设备，消除了不良气味溶剂，提供高度稳定的清洁能力和良好的清洁洁净度，并防止溶剂的点火和爆炸，以确保安全。在干洗设备中，溶剂储罐2中的石油溶剂通过循环泵5泵送，通过过滤器6和碳吸收剂7供给到清洗槽8，然后从清洗槽8返回到溶剂储存罐2通过按钮捕获器3设置，臭氧发生装置10用于产生臭氧气体，扩散器11用于将由臭氧发生装置10产生的臭氧气体倾倒到石油基溶剂中，因为细小气泡被布置为与溶剂储存罐2或按钮捕获器3的底面接触。

5. 发明授权

US5511264A Method for deodorizing and refreshing for dry cleaning 失效
标题翻译：干洗除臭方法
公开(公告)号：US5511264A
公开(公告)日：1996-04-30
申请号：US488415
申请日：1995-06-07
申请人： Yukiko Nishioka , Ichiro Kamiya , Ryoichi Shinjo , Yoshihiro Ishii , Koichi Kosaka
发明人： Yukiko Nishioka , Ichiro Kamiya , Ryoichi Shinjo , Yoshihiro Ishii , Koichi Kosaka
IPC分类号： D06F43/08
CPC分类号： D06F43/085
摘要： The present invention provides a method for deodorizing and refreshing petroleum group solvent used in a dry cleaning apparatus, and a dry cleaning apparatus using such a method, which can maintain the circulating solvent in a fresh condition for a long time, eliminate a bad smell of the solvent, provide highly stable cleaning ability and good cleaning finish, and prevent ignition and explosion of the solvent to ensure safety. In the dry cleaning apparatus, the petroleum group solvent in a solvent storage tank 2 is pumped by a circulating pump 5, is supplied to a cleaning bath 8 through a filter 6 and carbon absorbent 7 and then is returned from the cleaning bath 8to the solvent storage tank 2 through a button trap 3, and an ozone generating device 10 is provided for generating ozone gas and a diffuser 11 for pouring the ozone gas produced by the ozone generating device 10 into the petroleum group solvent as fine bubbles are arranged to be contacted with a bottom surface of the solvent storage tank 2 or the button trap 3.
摘要翻译：本发明提供了一种用于干燥设备中使用的石油溶剂的除臭和清新方法，以及使用这种可长时间保持循环溶剂处于新鲜状态的方法的干洗设备，消除了不良气味溶剂，提供高度稳定的清洁能力和良好的清洁洁净度，并防止溶剂的点火和爆炸，以确保安全。在干洗设备中，溶剂储罐2中的石油溶剂通过循环泵5泵送，通过过滤器6和碳吸收剂7供给到清洗槽8，然后从清洗槽8返回溶剂存储罐2通过按钮捕获器3设置，臭氧发生装置10用于产生臭氧气体，扩散器11用于将由臭氧发生装置10产生的臭氧气体倾倒入石油基溶剂中，因为微小气泡被布置成接触与溶剂储存罐2的底表面或按钮陷阱3。

6. 发明授权

US5688289A Method of laundering clothes and textiles 失效
标题翻译：洗衣服和纺织品的方法
公开(公告)号：US5688289A
公开(公告)日：1997-11-18
申请号：US637342
申请日：1996-04-25
申请人： Yukiko Nishioka , Ryoichi Shinjo , Yoshihiro Ishii , Tadao Yamanaka
发明人： Yukiko Nishioka , Ryoichi Shinjo , Yoshihiro Ishii , Tadao Yamanaka
IPC分类号： D06F17/12 , D06F35/00 , D06L4/50 , D06L3/04
CPC分类号： D06F35/006 , D06L3/04
摘要： An improved method of laundering clothes and textiles comprises: providing a washing machine having a tub furnished with a fixed outer shell 11 and an inner cylinder 12 that is provided within the outer shell 11, that is rotatably supported on a horizontal rotating shaft 13 and that has a plurality of orifices in the outer peripheral wall through which a washing solution can pass; putting the clothes and textiles into the inner cylinder 12; charging the outer shell 11 with a washing solution Q having a polyelectrolyte containing detergent dissolved therein; and laundering the clothes and textiles with ozone gas from an ozonizer 21 being introduced from an ozone gas supply port 24a directly into the washing solution Q at a temperature of from about 40.degree. C. to less than 50.degree. C., preferably from about 40.degree. C. to about 45.degree. C. between the outer shell 11 and inner cylinder 12. The method has such a great laundering power that severe soiling of the collar and yellowing can be removed in a regular washing cycle without employing any preliminary or post treatments. In addition, the method can be implemented with existing commercial washing machines with ozone being readily introduced into washing solutions even if no special means is employed to mix them with ozone gas.
摘要翻译：一种改进的衣物和纺织品洗涤方法包括：提供一种洗衣机，其具有装有固定外壳11和设置在外壳11内的内筒12的桶，该外筒11可旋转地支撑在水平旋转轴13上，并且在外周壁上具有多个孔，洗涤液可以穿过该孔; 将衣服和纺织品放入内筒12中; 用溶解有聚电解质的洗涤剂的洗涤液Q对外壳11进行充电; 用来自臭氧气体21的臭氧气体从臭氧气体供给口24a直接进入洗涤液Q的臭氧气体在约40℃至小于50℃的温度下洗涤衣物和纺织品，优选约40℃ 在外壳11和内筒12之间的温度为约-45℃。该方法具有如此大的洗涤能力，即可以在常规洗涤循环中清除衣领的严重污染并且不会使用任何预处理或后处理。此外，该方法可以用现有的商业洗衣机来实现，即使没有采用特殊方法将臭氧与臭氧气体混合，臭氧也容易引入洗涤溶液中。

7. 发明申请

US20050252535A1 Substrate cleaning apparatus and method 审中-公开
标题翻译：基板清洗装置及方法
公开(公告)号：US20050252535A1
公开(公告)日：2005-11-17
申请号：US10536961
申请日：2004-05-26
申请人： Yukiko Nishioka , Koji Ato , Ryosuke Yonekura , Yoshikazu Ariga
发明人： Yukiko Nishioka , Koji Ato , Ryosuke Yonekura , Yoshikazu Ariga
IPC分类号： H01L21/304 , B08B7/00 , H01L21/00
CPC分类号： H01L21/67028 , H01L21/67051
摘要： A substrate cleaning apparatus is used for cleaning and drying a substrate such as a semiconductor wafer used in a semiconductor fabricating process or the like. The substrate cleaning apparatus includes a substrate holding mechanism (10) configured to hold the substrate (W), and a rotating mechanism (20) configured to rotate the substrate holding mechanism (10). At least one of components of the substrate cleaning apparatus has a surface structure to which droplets are hardly attached.
摘要翻译：基板清洗装置用于清洗和干燥半导体制造工艺等中使用的半导体晶片等基板。基板清洗装置具备：保持基板（W）的基板保持机构（10）和旋转基板保持机构（10）的旋转机构（20）。基板清洗装置的至少一个部件具有难以附着液滴的表面结构。

8. 发明申请

US20100105154A1 METHOD AND APPARATUS FOR PROCESSING SUBSTRATE 审中-公开
标题翻译：用于处理基板的方法和装置
公开(公告)号：US20100105154A1
公开(公告)日：2010-04-29
申请号：US12685820
申请日：2010-01-12
申请人： XINMING WANG , Daisuke Takagi , Akihiko Tashiro , Yukio Fukunaga , Akira Fukunaga , Akira Owatari , Yukiko Nishioka
发明人： XINMING WANG , Daisuke Takagi , Akihiko Tashiro , Yukio Fukunaga , Akira Fukunaga , Akira Owatari , Yukiko Nishioka
IPC分类号： H01L21/66 , H01L21/46
CPC分类号： H01L21/02068 , C23C18/1632 , C23C18/1689 , C23C18/1844 , H01L21/02074 , H01L21/288 , H01L21/67028 , H01L21/76849 , H01L21/76874 , H01L21/76883
摘要： A substrate processing method can securely form a metal film by electroless plating on an exposed surface of a base metal, such as interconnects, with increased throughput and without the formation of voids in the base metal. The substrate processing method includes: cleaning a surface of a substrate having a base metal formed in the surface with a cleaning solution comprising an aqueous solution of a carboxyl group-containing organic acid or its salt and a surfactant as an additive; bringing the surface of the substrate after the cleaning into contact with a processing solution comprising a mixture of the cleaning solution and a solution containing a catalyst metal ion, thereby applying the catalyst to the surface of the substrate; and forming a metal film by electroless plating on the catalyst-applied surface of the substrate.
摘要翻译：基板处理方法可以通过在贱金属（例如互连）的暴露表面上通过无电解电镀牢固地形成金属膜，具有增加的生产量并且在母材中不形成空隙。基板处理方法包括：用包含含羧基的有机酸或其盐和表面活性剂的水溶液作为添加剂的清洗溶液清洗在表面形成的基体金属的基材的表面; 使清洗后的基板的表面与包含清洗液和含有催化剂金属离子的溶液的混合物的处理溶液接触，从而将催化剂施加到基板的表面; 以及通过在基板的催化剂涂覆表面上通过无电镀形成金属膜。

9. 发明申请

US20080000509A1 Cleaning apparatus and cleaning method 审中-公开
标题翻译：清洁装置和清洁方法
公开(公告)号：US20080000509A1
公开(公告)日：2008-01-03
申请号：US11882565
申请日：2007-08-02
申请人： Ryosuke Yonekura , Yukiko Nishioka , Mitsuo Miyashita , Yoshikazu Ariga
发明人： Ryosuke Yonekura , Yukiko Nishioka , Mitsuo Miyashita , Yoshikazu Ariga
IPC分类号： B08B9/00
CPC分类号： H01L21/67051 , B08B3/02 , H01L21/67028
摘要： A cleaning apparatus in which cleaning and drying can be carried out without the risk of reverse contamination of the cleaned object after the drying process. The cleaning apparatus includes a supporting device for supporting an object to be cleaned, and a cleaning cup surrounding the supporting device to prevent splashing of a cleaning liquid. The cleaning apparatus includes a cleaning device for cleaning an inner wall of the cleaning cup with a cleaning liquid.
摘要翻译：可以进行清洁和干燥的清洁装置，而不会在干燥过程之后被清洁物体反向污染的风险。清洁装置包括用于支撑待清洁物体的支撑装置和围绕支撑装置的清洁杯，以防止清洗液体飞溅。清洁装置包括用清洁液清洁清洁杯的内壁的清洁装置。

10. 发明申请

US20050050946A1 Cleaning evaluation method for a substrate 失效
标题翻译：基材清洗评估方法
公开(公告)号：US20050050946A1
公开(公告)日：2005-03-10
申请号：US10932083
申请日：2004-09-02
申请人： Yukiko Nishioka , Yoshikazu Ariga
发明人： Yukiko Nishioka , Yoshikazu Ariga
IPC分类号： H01L21/304 , B08B13/00 , G01M99/00 , H01L23/544 , H01L21/66 , G01M19/00
CPC分类号： B08B13/00 , H01L22/34 , H01L2924/0002 , H01L2924/00
摘要： The present invention relates to a cleaning evaluation method for evaluating a surface cleanliness of a substrate which has been cleaned after being polished. This method includes, preparing a dummy substrate having a metal film formed on a surface thereof and a monitor substrate on which a cleaning evaluation is performed, polishing the dummy substrate, after polishing the dummy substrate, polishing the monitor substrate without dressing a polishing surface of a polishing table, cleaning the monitor substrate, and evaluating the surface cleanliness of the monitor substrate which has been cleaned.
摘要翻译：本发明涉及一种用于评价在抛光后被清洗的基板的表面清洁度的清洁评估方法。该方法包括：准备在其表面上形成有金属膜的虚设基板和进行清洁评估的监视基板，对该虚设基板进行研磨后对该虚设基板进行研磨，对该监视基板进行研磨，抛光台，清洁监视器基板，以及评估已清洁的监视器基板的表面清洁度。

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