专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20050194550A1 Gas flow restricting cathode system for ion implanter and related method 有权
标题翻译：用于离子注入机的气流限制阴极系统及相关方法
公开(公告)号：US20050194550A1
公开(公告)日：2005-09-08
申请号：US10794850
申请日：2004-03-05
申请人： Russell Low , Joseph Olson , Curt Bergeron , Eric Cobb , Jeffrey Burgess
发明人： Russell Low , Joseph Olson , Curt Bergeron , Eric Cobb , Jeffrey Burgess
IPC分类号： H01J37/08
CPC分类号： H01J37/08 , H01J37/3171 , H01J2237/006 , H01J2237/061 , H01J2237/06308 , H01J2237/082
摘要： A cathode system having a cathode element configured to extend through an aperture in a wall of an arc chamber of an ion implanter system. A gas flow through a spacing between the cathode element and the aperture is restricted by a restriction member. A method of ionizing a source gas and a cathode element incorporating the restriction member are also provided.
摘要翻译：一种具有阴极元件的阴极系统，其被配置为延伸穿过离子注入系统的电弧室的壁中的孔。通过限制部件限制通过阴极元件和孔之间的间隔的气流。还提供了一种电离源气体和结合有限制构件的阴极元件的方法。

2. 发明申请

US20080240948A1 DEVICE FOR CONTAINING CATASTROPHIC FAILURE OF A TURBOMOLECULAR PUMP 有权
标题翻译：用于包含涡轮分子泵的特殊故障的装置
公开(公告)号：US20080240948A1
公开(公告)日：2008-10-02
申请号：US11691165
申请日：2007-03-26
申请人： Jeffrey Burgess
发明人： Jeffrey Burgess
IPC分类号： F04B17/00
CPC分类号： F04D19/042 , F04D27/0292 , F04D29/601 , Y10S414/141
摘要： A device for containing the catastrophic failure of a vacuum pumping system is described. The vacuum pumping system includes a turbo-molecular pump (TMP) configured to be coupled to a vacuum processing system at an inlet end. The TMP includes a longitudinal axis substantially parallel to an axis of rotation of the TMP and a first lateral axis substantially perpendicular to the longitudinal axis. The vacuum system also includes a containment device configured to mitigate the catastrophic failure of the TMP by impeding only one translational degree of freedom (DOF) and only one rotational DOF of the movement of the TMP. Impeding only one translational DOF includes impeding translational motion of the TMP in a first lateral direction substantially parallel to the first lateral axis. Impeding only one rotational DOF includes impeding rotation of the TMP about the longitudinal axis.
摘要翻译：描述了一种用于容纳真空泵系统的灾难性故障的装置。真空泵系统包括涡轮分子泵（TMP），其构造成在入口端处耦合到真空处理系统。 TMP包括基本上平行于TMP的旋转轴线的纵向轴线和基本上垂直于纵向轴线的第一横向轴线。真空系统还包括一个容纳装置，其配置成通过仅阻止一个平移自由度（DOF）和仅TMP运动的一个旋转自由度来减轻TMP的灾难性故障。仅阻挡一个平移DOF包括阻止TMP在基本上平行于第一横向轴线的第一横向方向上的平移运动。仅阻挡一个旋转DOF包括阻止TMP围绕纵向轴线的旋转。

3. 发明授权

US07767023B2 Device for containing catastrophic failure of a turbomolecular pump 有权
标题翻译：包含涡轮分子泵的灾难性故障的装置
公开(公告)号：US07767023B2
公开(公告)日：2010-08-03
申请号：US11691165
申请日：2007-03-26
申请人： Jeffrey Burgess
发明人： Jeffrey Burgess
IPC分类号： C23C16/00 , F01D1/36 , F03B5/00 , F04B35/04 , C23F1/00 , H01L21/306
CPC分类号： F04D19/042 , F04D27/0292 , F04D29/601 , Y10S414/141
摘要： A device for containing the catastrophic failure of a vacuum pumping system is described. The vacuum pumping system includes a turbo-molecular pump (TMP) configured to be coupled to a vacuum processing system at an inlet end. The TMP includes a longitudinal axis substantially parallel to an axis of rotation of the TMP and a first lateral axis substantially perpendicular to the longitudinal axis. The vacuum system also includes a containment device configured to mitigate the catastrophic failure of the TMP by impeding only one translational degree of freedom (DOF) and only one rotational DOF of the movement of the TMP. Impeding only one translational DOF includes impeding translational motion of the TMP in a first lateral direction substantially parallel to the first lateral axis. Impeding only one rotational DOF includes impeding rotation of the TMP about the longitudinal axis.
摘要翻译：描述了一种用于容纳真空泵系统的灾难性故障的装置。真空泵系统包括涡轮分子泵（TMP），其构造成在入口端处耦合到真空处理系统。 TMP包括基本上平行于TMP的旋转轴线的纵向轴线和基本上垂直于纵向轴线的第一横向轴线。真空系统还包括一个容纳装置，其配置成通过仅阻止一个平移自由度（DOF）和仅TMP运动的一个旋转自由度来减轻TMP的灾难性故障。仅阻挡一个平移DOF包括阻止TMP在基本上平行于第一横向轴线的第一横向方向上的平移运动。仅阻挡一个旋转DOF包括阻止TMP围绕纵向轴线的旋转。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式