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    • 8. 发明授权
    • Semiconductor circuit configuration and associated fabrication method
    • 半导体电路配置及相关制造方法
    • US06800893B2
    • 2004-10-05
    • US10446491
    • 2003-05-28
    • Danny ShumGeorg Tempel
    • Danny ShumGeorg Tempel
    • H01L2972
    • H01L27/11521H01L27/115H01L27/11568
    • The invention relates to a semiconductor circuit configuration and to an associated fabrication method, in which a semiconductor substrate has a plurality of word lines and a plurality of bit lines for the row by row and column by column driving of a matrix of switching elements. In this case, a plurality of electrically conductive connection strips for connecting source and drain regions in the active region to the respective bit lines are formed between the word lines such that they directly make contact with the source and drain regions at the surface of the semiconductor substrate in the active region. In this way, a particularly compact cell area is obtained in conjunction with very simple lithographic conditions.
    • 本发明涉及一种半导体电路结构及相关的制造方法,其中半导体衬底具有用于逐行驱动开关元件矩阵的多个字线和多个位线。 在这种情况下,在字线之间形成多个用于将有源区中的源区和漏区连接到各位线的导电连接条,使得它们直接与半导体的表面处的源极和漏极区接触 底物在活性区域。 以这种方式,结合非常简单的光刻条件获得特别紧凑的单元区域。