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    • 9. 发明授权
    • Scanning probe microscope apparatus for use in a scanning electron
microscope
    • 用于扫描电子显微镜的扫描探针显微镜装置
    • US5510615A
    • 1996-04-23
    • US478479
    • 1995-06-07
    • Huddee HoPaul E. West
    • Huddee HoPaul E. West
    • G01Q10/04G01Q30/02G01Q30/16G01Q30/18G01Q70/02H01J37/28H01J37/067
    • G01Q30/02B82Y35/00G01Q30/18G01Q70/02H01J37/28H01J2237/2818Y10S977/86
    • The scanning probe microscope translation apparatus includes a scanning probe microscope for examining a specimen, with a specimen stage for mounting the specimen for examination by the scanning probe microscope, and a first translator mounted to the scanning probe microscope for translating the specimen stage relative to the scanning probe microscope. A support frame is dimensioned and adapted to be mounted in a specimen chamber of a scanning electron microscope, and a second translator is provided for scanning the scanning probe microscope relative to the support frame. The second translator is mounted on dual mass plates provided for isolating the scanning probe microscope from external vibrations, and suspension device are provided for suspending the mass plates from the support frame. A vacuum load lock system permits moving the scanning probe microscope, specimen stage, first translator, and mounting assembly into and out of the vacuum of the scanning electron microscope vacuum chamber.
    • 扫描探针显微镜转印装置包括用于检查样本的扫描探针显微镜,具有用于通过扫描探针显微镜安装用于检查的样本的样本台和安装到扫描探针显微镜上的第一平移器,用于将样本台相对于 扫描探针显微镜。 支撑框架尺寸适于安装在扫描电子显微镜的样本室中,并且提供第二平移器用于相对于支撑框架扫描扫描探针显微镜。 第二个翻译器安装在双重质量板上,用于将扫描探针显微镜与外部振动隔离,并提供悬挂装置,用于将质量板从支撑架悬挂下来。 真空负载锁定系统允许将扫描探针显微镜,样品台,第一平移器和安装组件移入和移出扫描电子显微镜真空室的真空。
    • 10. 发明授权
    • High resolution electromechanical translation device
    • 高分辨率机电翻译装置
    • US5260622A
    • 1993-11-09
    • US765082
    • 1991-09-24
    • Paul E. West
    • Paul E. West
    • H01L41/09H01L41/08
    • H02N2/023H02N2/028
    • The electromechanical translation apparatus includes a translation drive assembly having front and rear drive leg members coupled together with central extension piezoelectric members, and piezoelectric clamping members which clamp the drive leg members between opposing bearing members of a lower base. The translation drive assembly may directly carry an object for precise positioning of the object, or may carry an upper movable base which in turn may be translated along an axis perpendicular to the direction of movement along the lower base, so that an object placed upon the upper movable base can be precisely positioned.
    • 机电平移装置包括平移驱动组件,其具有与中心延伸压电部件联接在一起的前驱动支腿部件和后驱动支腿部件,以及将驱动支腿部件夹在下基板的相对轴承部件之间的压电夹紧部件。 平移驱动组件可以直接携带用于物体精确定位的物体,或者可以承载上部可移动基座,该上部可移动基座又可以沿着沿着下部基座的沿着移动方向的轴线平移,使得放置在 上可移动底座可以精确定位。