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1. 发明授权

US09255801B2 Yaw rate sensor 有权
标题翻译：偏航率传感器
公开(公告)号：US09255801B2
公开(公告)日：2016-02-09
申请号：US13922801
申请日：2013-06-20
申请人： Burkhard Kuhlmann , Rolf Scheben , Daniel Christoph Meisel , Benjamin Schmidt , Thorsten Balslink
发明人： Burkhard Kuhlmann , Rolf Scheben , Daniel Christoph Meisel , Benjamin Schmidt , Thorsten Balslink
IPC分类号： G01P3/44 , G01C19/56 , G01C19/5747
CPC分类号： G01C19/56 , G01C19/5747
摘要： A yaw rate sensor, including a substrate and a main extension plane, for detecting a yaw rate around a first direction in parallel to the main extension plane, a first Coriolis mass, and a second Coriolis mass, and a drive device configured to drive the first and second Coriolis masses in parallel to a drive direction perpendicular to the first direction, the first and second Coriolis masses, for a yaw rate around the first direction, experiencing a Coriolis acceleration in parallel to a detection direction, which is perpendicular to the drive and first directions, the first and second Coriolis masses having first/second partial areas and third/fourth partial areas, respectively. The first and third partial areas are farther from the axis of symmetry in parallel to the first direction, and the second and fourth partial areas are closer to the axis of symmetry in parallel to the first direction.
摘要翻译：包括基板和主延伸平面的横摆角速度传感器，用于检测平行于主延伸平面的第一方向的横摆率，第一科里奥利质量和第二科里奥利质量，驱动装置被配置为驱动第一和第二科里奥利质量平行于垂直于第一方向的驱动方向，第一和第二科里奥利质量，对于围绕第一方向的横摆率，经历与垂直于驱动器的检测方向平行的科里奥利加速度和第一方向，分别具有第一/第二部分区域和第三/第四部分区域的第一和第二科里奥利群体。第一和第三部分区域平行于第一方向距离对称轴更远，并且第二和第四部分区域平行于第一方向更靠近对称轴。

2. 发明授权

US08844357B2 Yaw-rate sensor and method for operating a yaw-rate sensor 有权
标题翻译：偏航速率传感器和操作偏航率传感器的方法
公开(公告)号：US08844357B2
公开(公告)日：2014-09-30
申请号：US13294752
申请日：2011-11-11
申请人： Rolf Scheben , Burkhard Kuhlmann , Thorsten Balslink , Daniel Christoph Meisel , Benjamin Schmidt
发明人： Rolf Scheben , Burkhard Kuhlmann , Thorsten Balslink , Daniel Christoph Meisel , Benjamin Schmidt
IPC分类号： G01C19/56 , G01C19/5747
CPC分类号： G01C19/5747
摘要： A yaw-rate sensor includes: a substrate having a main extension plane for detecting a yaw rate about a first axis extending parallel to the main extension plane; a first Coriolis element; a second Coriolis element; a third Coriolis element; and a fourth Coriolis element. The first Coriolis element and the fourth Coriolis element are drivable in the same direction parallel to a second axis extending parallel to the main extension plane and perpendicularly to the first axis. The first Coriolis element and the second Coriolis element are drivable in opposite directions parallel to the second axis. The first Coriolis element and the third Coriolis element are drivable in opposite directions parallel to the second axis.
摘要翻译：偏航率传感器包括：具有用于检测围绕平行于主延伸平面延伸的第一轴线的横摆率的主延伸面的基板; 第一个科里奥利元素; 第二个科里奥利元素; 第三科里奥利元素; 和第四个科里奥利元素。第一科里奥利元件和第四科里奥利元件可以在平行于平行于主延伸平面并垂直于第一轴线延伸的第二轴线的相同方向上驱动。第一科里奥利元件和第二科里奥利元件可以在平行于第二轴线的相反方向上驱动。第一科里奥利元件和第三科里奥利元件可以在平行于第二轴线的相反方向上驱动。

3. 发明申请

US20120152019A1 Yaw-rate sensor and method for operating a yaw-rate sensor 有权
标题翻译：偏航速率传感器和操作偏航率传感器的方法
公开(公告)号：US20120152019A1
公开(公告)日：2012-06-21
申请号：US13305292
申请日：2011-11-28
申请人： Burkhard Kuhlmann , Rolf Scheben , Daniel Christoph Meisel , Benjamin Schmidt , Thorsten Balslink
发明人： Burkhard Kuhlmann , Rolf Scheben , Daniel Christoph Meisel , Benjamin Schmidt , Thorsten Balslink
IPC分类号： G01C19/56
CPC分类号： G01C19/5712
摘要： A yaw-rate sensor is described as having a substrate which has a main plane of extension for detecting a yaw rate about a first axis extending parallel to the main plane of extension is provided, the yaw-rate sensor having a first rotation element and a second rotation element, the first rotation element being drivable about a first axis of rotation, the second rotation element being drivable about a second axis of rotation, the first axis of rotation being situated perpendicularly to the main plane of extension, the second axis of rotation being situated perpendicularly to the main plane of extension, the first rotation element and the second rotation element being drivable in opposite directions.
摘要翻译：横摆率传感器被描述为设置有具有用于检测围绕平行于主平面延伸的第一轴延伸的横摆率的主扩展平面的基板，该偏航率传感器具有第一旋转元件和第二旋转元件，第一旋转元件围绕第一旋转轴线驱动，第二旋转元件围绕第二旋转轴线驱动，第一旋转轴线垂直于主平面延伸，第二旋转轴线垂直于延伸主平面定位，第一旋转元件和第二旋转元件可沿相反方向驱动。

4. 发明申请

US20120125099A1 YAW-RATE SENSOR AND METHOD FOR OPERATING A YAW-RATE SENSOR 有权
标题翻译： YAW速率传感器和操作传感器的方法
公开(公告)号：US20120125099A1
公开(公告)日：2012-05-24
申请号：US13294752
申请日：2011-11-11
申请人： Rolf Scheben , Burkhard Kuhlmann , Thorsten Balslink , Daniel Christoph Meisel , Benjamin Schmidt
发明人： Rolf Scheben , Burkhard Kuhlmann , Thorsten Balslink , Daniel Christoph Meisel , Benjamin Schmidt
IPC分类号： G01C19/56
CPC分类号： G01C19/5747
摘要： A yaw-rate sensor includes: a substrate having a main extension plane for detecting a yaw rate about a first axis extending parallel to the main extension plane; a first Coriolis element; a second Coriolis element; a third Coriolis element; and a fourth Coriolis element. The first Coriolis element and the fourth Coriolis element are drivable in the same direction parallel to a second axis extending parallel to the main extension plane and perpendicularly to the first axis. The first Coriolis element and the second Coriolis element are drivable in opposite directions parallel to the second axis. The first Coriolis element and the third Coriolis element are drivable in opposite directions parallel to the second axis.
摘要翻译：偏航率传感器包括：具有用于检测围绕平行于主延伸平面延伸的第一轴线的横摆率的主延伸面的基板; 第一个科里奥利元素; 第二个科里奥利元素; 第三科里奥利元素; 和第四个科里奥利元素。第一科里奥利元件和第四科里奥利元件可以在平行于平行于主延伸平面并垂直于第一轴线延伸的第二轴线的相同方向上驱动。第一科里奥利元件和第二科里奥利元件可以在平行于第二轴线的相反方向上驱动。第一科里奥利元件和第三科里奥利元件可以在平行于第二轴线的相反方向上驱动。

5. 发明授权

US08783105B2 Yaw-rate sensor and method for operating a yaw-rate sensor 有权
标题翻译：偏航速率传感器和操作偏航率传感器的方法
公开(公告)号：US08783105B2
公开(公告)日：2014-07-22
申请号：US13305292
申请日：2011-11-28
申请人： Burkhard Kuhlmann , Rolf Scheben , Daniel Christoph Meisel , Benjamin Schmidt , Thorsten Balslink
发明人： Burkhard Kuhlmann , Rolf Scheben , Daniel Christoph Meisel , Benjamin Schmidt , Thorsten Balslink
IPC分类号： G01C19/56
CPC分类号： G01C19/5712
摘要： A yaw-rate sensor is described as having a substrate which has a main plane of extension for detecting a yaw rate about a first axis extending parallel to the main plane of extension is provided, the yaw-rate sensor having a first rotation element and a second rotation element, the first rotation element being drivable about a first axis of rotation, the second rotation element being drivable about a second axis of rotation, the first axis of rotation being situated perpendicularly to the main plane of extension, the second axis of rotation being situated perpendicularly to the main plane of extension, the first rotation element and the second rotation element being drivable in opposite directions.
摘要翻译：横摆率传感器被描述为设置有具有用于检测围绕平行于主平面延伸的第一轴延伸的横摆率的主扩展平面的基板，该偏航率传感器具有第一旋转元件和第二旋转元件，第一旋转元件围绕第一旋转轴线驱动，第二旋转元件围绕第二旋转轴线驱动，第一旋转轴线垂直于主平面延伸，第二旋转轴线垂直于延伸主平面定位，第一旋转元件和第二旋转元件可沿相反方向驱动。

6. 发明授权

US08443668B2 Yaw rate sensor 有权
标题翻译：偏航率传感器
公开(公告)号：US08443668B2
公开(公告)日：2013-05-21
申请号：US12925750
申请日：2010-10-27
申请人： Torsten Ohms , Burkhard Kuhlmann , Markus Heitz , Robert Sattler , Daniel Christoph Meisel , Thorsten Balslink
发明人： Torsten Ohms , Burkhard Kuhlmann , Markus Heitz , Robert Sattler , Daniel Christoph Meisel , Thorsten Balslink
IPC分类号： G01C19/56
CPC分类号： G01C19/5747
摘要： A yaw rate sensor having a substrate, a first Coriolis element and a second Coriolis element is described, the first Coriolis element being excitable to a first vibration by first excitation means, and the second Coriolis element being excitable to a second vibration by second excitation means, and the first and second Coriolis elements being connected to one another by a spring structure, and the spring structure also including at least one rocker structure, the rocker structure being anchored on the substrate by at least one spring element.
摘要翻译：描述了具有基板，第一科里奥利元件和第二科里奥利元件的偏航率传感器，第一科里奥利元件可由第一激励装置激发到第一振动，第二科里奥利元件可被第二激励装置激发到第二振动并且所述第一和第二科里奥利元件通过弹簧结构彼此连接，并且所述弹簧结构还包括至少一个摇臂结构，所述摇臂结构通过至少一个弹簧元件锚固在所述基板上。

7. 发明申请

US20110132087A1 Yaw rate sensor 有权
标题翻译：偏航率传感器
公开(公告)号：US20110132087A1
公开(公告)日：2011-06-09
申请号：US12925750
申请日：2010-10-27
申请人： Torsten Ohms , Burkhard Kuhlmann , Markus Heitz , Robert Sattler , Daniel Christoph Meisel , Thorsten Balslink
发明人： Torsten Ohms , Burkhard Kuhlmann , Markus Heitz , Robert Sattler , Daniel Christoph Meisel , Thorsten Balslink
IPC分类号： G01C19/56
CPC分类号： G01C19/5747
摘要： A yaw rate sensor having a substrate, a first Coriolis element and a second Coriolis element is described, the first Coriolis element being excitable to a first vibration by first excitation means, and the second Coriolis element being excitable to a second vibration by second excitation means, and the first and second Coriolis elements being connected to one another by a spring structure, and the spring structure also including at least one rocker structure, the rocker structure being anchored on the substrate by at least one spring element.
摘要翻译：描述了具有基板，第一科里奥利元件和第二科里奥利元件的偏航率传感器，第一科里奥利元件可由第一激励装置激发到第一振动，第二科里奥利元件可由第二激励装置激发到第二振动并且所述第一和第二科里奥利元件通过弹簧结构彼此连接，并且所述弹簧结构还包括至少一个摇臂结构，所述摇臂结构通过至少一个弹簧元件锚固在所述基板上。

8. 发明申请

US20110023600A1 MICROMECHANICAL YAW-RATE SENSOR 有权
标题翻译：微电子传感器
公开(公告)号：US20110023600A1
公开(公告)日：2011-02-03
申请号：US12834953
申请日：2010-07-13
申请人： Martin WREDE , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
发明人： Martin WREDE , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
IPC分类号： G01C19/56
CPC分类号： G01C19/5712 , G01C19/5747
摘要： A micromechanical yaw-rate sensor comprising a first yaw-rate sensor element, which outputs a first sensor signal, which contains information about a rotation around a first rotational axis, a second yaw-rate sensor element, which outputs a second sensor signal, which contains information about a rotation around a second rotational axis, which is perpendicular to the first rotational axis, a drive, which drives the first yaw-rate sensor element, and a coupling link, which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another, so that driving of the first yaw-rate sensor element also causes driving of the second yaw-rate sensor element.
摘要翻译：一种微机械摆动速率传感器，包括第一偏转速率传感器元件，该第一偏转速率传感器元件输出包含关于围绕第一旋转轴线的旋转的信息的第一传感器信号，输出第二传感器信号的第二偏转速度传感器元件，包含关于围绕垂直于第一旋转轴线的第二旋转轴线的旋转的信息，驱动第一偏转速率传感器元件的驱动器和耦合连杆，其将第一横摆速率传感器元件和第二偏转速率传感器元件彼此之间，使得第一偏转速率传感器元件的驱动也引起第二偏转速率传感器元件的驱动。

9. 发明授权

US08490483B2 Micromechanical yaw-rate sensor 有权
标题翻译：微机械偏航率传感器
公开(公告)号：US08490483B2
公开(公告)日：2013-07-23
申请号：US12834953
申请日：2010-07-13
申请人： Martin Wrede , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
发明人： Martin Wrede , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
IPC分类号： G01C19/56
CPC分类号： G01C19/5712 , G01C19/5747
摘要： A micromechanical yaw-rate sensor comprising a first yaw-rate sensor element, which outputs a first sensor signal, which contains information about a rotation around a first rotational axis, a second yaw-rate sensor element, which outputs a second sensor signal, which contains information about a rotation around a second rotational axis, which is perpendicular to the first rotational axis, a drive, which drives the first yaw-rate sensor element, and a coupling link, which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another, so that driving of the first yaw-rate sensor element also causes driving of the second yaw-rate sensor element.
摘要翻译：一种微机械摆动速率传感器，包括第一偏转速率传感器元件，该第一偏转速率传感器元件输出包含关于围绕第一旋转轴线的旋转的信息的第一传感器信号，输出第二传感器信号的第二偏转速度传感器元件，包含关于围绕垂直于第一旋转轴线的第二旋转轴线的旋转的信息，驱动第一偏转速率传感器元件的驱动器和耦合连杆，其将第一横摆速率传感器元件和第二偏转速率传感器元件彼此之间，使得第一偏转速率传感器元件的驱动也引起第二偏转速率传感器元件的驱动。

10. 发明申请

US20130042664A1 Method for the functional checking of an inertial sensor and inertial sensor 审中-公开
标题翻译：惯性传感器和惯性传感器的功能检查方法
公开(公告)号：US20130042664A1
公开(公告)日：2013-02-21
申请号：US13586282
申请日：2012-08-15
申请人： Martin Wrede , Klaus Petzold , Burkhard Kuhlmann , Uwe Tellermann , Markus Brockmann , Marian Keck , Thorsten Balslink
发明人： Martin Wrede , Klaus Petzold , Burkhard Kuhlmann , Uwe Tellermann , Markus Brockmann , Marian Keck , Thorsten Balslink
IPC分类号： G01P15/097 , G01P21/00
CPC分类号： G01P15/097 , G01C19/5762 , G01C25/005 , G01P15/125 , G01P21/00
摘要： A method for providing functional checking of an inertial sensor, a first test signal having a first frequency being fed in at a test electrode of the inertial sensor for exciting a vibration of a vibration mass and a first response signal corresponding to the vibration mass is recorded, a second test signal having a second frequency different from the first frequency being fed in at the test electrode, a second response signal corresponding to the vibration mass being recorded, and the two response signals being evaluated. Also described is an inertial sensor.
摘要翻译：一种用于提供惯性传感器的功能检查的方法，记录了在惯性传感器的测试电极处馈送第一频率的第一测试信号，用于激发振动质量的振动和对应于振动质量的第一响应信号第二测试信号具有不同于在测试电极处馈入的第一频率的第二频率，对应于所记录的振动质量的第二响应信号，并且评估两个响应信号。还描述了惯性传感器。

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