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1. 发明申请

US20060181379A1 Stress bimorph MEMS switches and methods of making same 审中-公开
公开(公告)号：US20060181379A1
公开(公告)日：2006-08-17
申请号：US11399077
申请日：2006-04-05
申请人： Robert Schwartz , Ming Wu , Tsung-Yuan Hsu , Adele Schmitz , Robert Loo , James Schaffner , Gregory Tangonan
发明人： Robert Schwartz , Ming Wu , Tsung-Yuan Hsu , Adele Schmitz , Robert Loo , James Schaffner , Gregory Tangonan
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01G5/18 , H01G5/40 , H01H1/20 , H01H2059/0018 , H01H2059/0072 , H01H2059/0081
摘要： A micro-electromechanical system (MEMS) switch formed on a substrate, the switch comprising a transmission line formed on the substrate, a substrate electrostatic plate formed on the substrate, and an actuating portion. The actuating portion comprises a cantilever anchor formed on the substrate and a cantilevered actuator arm extending from the cantilever anchor. Attraction of the actuator arm toward the substrate brings an electrical contact into engagement with the portions of the transmission line separated by a gap, thus bridging the transmission line gap and closing the circuit. In order to maximize electrical isolation between the transmission line and the electrical contact in an OFF-state while maintaining a low actuation voltage, the actuator arm is bent such that the minimum separation distance between the transmission line and the electrical contact is equal to or greater than the maximum separation distance between the substrate electrostatic plate and arm electrostatic plate.

2. 发明授权

US06842097B2 Torsion spring for electro-mechanical switches and a cantilever-type RF micro-electromechanical switch incorporating the torsion spring 失效
公开(公告)号：US06842097B2
公开(公告)日：2005-01-11
申请号：US10844273
申请日：2004-05-11
申请人： Tsung-Yuan Hsu , Robert Loo , Adele Schmitz
发明人： Tsung-Yuan Hsu , Robert Loo , Adele Schmitz
IPC分类号： H01H1/06 , H01H1/20 , H01H59/00 , H01P1/12 , H04L12/56 , H01H51/22
CPC分类号： H01H59/0009 , H01G5/18 , H01G5/40 , H01H1/06 , H01H1/20 , H01P1/127
摘要： A torsion spring for an electro-mechanical switch is presented. The torsion spring comprises a set of tines including at least one tine extending from the free end of the armature of a switch. A terminus portion is rotatably suspended between the tines, and includes a conducting transmission line, at least a portion of which is exposed for electrical contact. The conducting transmission line has a length selected such that the exposed portion of the transmission line forms a circuit between the input and output of the micro-electro-mechanical switch when the micro-electro-mechanical switch is urged into a closed position, with the terminus portion rotating via the tines to form a conformal connection between the exposed portion of the conducting transmission line and the input and output of the switch, thus optimizing the electrical flow therebetween. The switch is also applied to MEMS devices.

3. 发明授权

US07405641B1 Micro-electro-mechanical switch 失效
标题翻译：微机电开关
公开(公告)号：US07405641B1
公开(公告)日：2008-07-29
申请号：US11112925
申请日：2005-04-21
申请人： Tsung-Yuan Hsu , Adele Schmitz , David Chang , Robert Loo
发明人： Tsung-Yuan Hsu , Adele Schmitz , David Chang , Robert Loo
IPC分类号： H01H51/22
CPC分类号： H01H59/0009
摘要： A micro-electro-mechanical switch is described. The switch comprises a substrate, with a signal transmission portion and an activation portion attached with the substrate. The activation portion includes an armature activation electrode positioned above a substrate activation electrode. The signal transmission portion includes a metal contact extending from a conducting transmission line and through a bottom insulating layer of the signal transmission portion, thereby being exposed for electrical contact. A mechanical linkage connects the activation portion with the signal transmission portion so that the activation portion and the signal transmission portion move in concert. When an activation signal is applied along the activation portion, both the activation portion and the signal transmission portion are drawn toward the substrate to a substantially closed position, where the metal contact of the signal transmission portion electrically contacts a signal transmission electrode.
摘要翻译：描述了微机电开关。开关包括具有信号传输部分和与基板连接的激活部分的基板。激活部分包括位于基板激活电极上方的电枢激活电极。信号传输部分包括从导电传输线延伸并通过信号传输部分的底部绝缘层的金属接触，从而暴露于电接触。机械连杆将激活部分与信号传输部分相连接，使得激活部分和信号传输部分一起移动。当沿着激活部分施加激活信号时，激活部分和信号传输部分都朝向基板被拉到基本关闭的位置，其中信号传输部分的金属接点与信号传输电极电接触。

4. 发明授权

US06847277B2 Torsion spring for electro-mechanical switches and a cantilever-type RF micro-electromechanical switch incorporating the torsion spring 失效
标题翻译：用于机电开关的扭转弹簧和结合扭簧的悬臂式RF微机电开关
公开(公告)号：US06847277B2
公开(公告)日：2005-01-25
申请号：US10844271
申请日：2004-05-11
申请人： Tsung-Yuan Hsu , Robert Loo , Adele Schmitz
发明人： Tsung-Yuan Hsu , Robert Loo , Adele Schmitz
IPC分类号： H01H1/06 , H01H1/20 , H01H59/00 , H01P1/12 , H04L12/56 , H01H51/22
CPC分类号： H01H59/0009 , H01G5/18 , H01G5/40 , H01H1/06 , H01H1/20 , H01P1/127
摘要： A torsion spring for an electro-mechanical switch is presented. The torsion spring comprises a set of tines including at least one tine extending from the free end of the armature of a switch. A terminus portion is rotatably suspended between the tines, and includes a conducting transmission line, at least a portion of which is exposed for electrical contact. The conducting transmission line has a length selected such that the exposed portion of the transmission line forms a circuit between the input and output of the micro-electro-mechanical switch when the micro-electro-mechanical switch is urged into a closed position, with the terminus portion rotating via the tines to form a conformal connection between the exposed portion of the conducting transmission line and the input and output of the switch, thus optimizing the electrical flow therebetween. The switch is also applied to MEMS devices.
摘要翻译：提出了一种用于机电开关的扭簧。扭转弹簧包括一组尖齿，其包括从开关的电枢的自由端延伸的至少一个齿。末端部分可旋转地悬挂在尖齿之间，并且包括导电传输线，其至少一部分暴露以进行电接触。导电传输线具有选定的长度，使得当微机电开关被迫进入关闭位置时，传输线的暴露部分形成微机电开关的输入和输出之间的电路，通过齿旋转，以在导电传输线的暴露部分与开关的输入和输出之间形成共形连接，从而优化其间的电流。该开关也适用于MEMS器件。

5. 发明授权

US06768403B2 Torsion spring for electro-mechanical switches and a cantilever-type RF micro-electromechanical switch incorporating the torsion spring 失效
标题翻译：用于机电开关的扭转弹簧和结合扭簧的悬臂式RF微机电开关
公开(公告)号：US06768403B2
公开(公告)日：2004-07-27
申请号：US10097632
申请日：2002-03-12
申请人： Tsung-Yuan Hsu , Robert Loo , Adele Schmitz
发明人： Tsung-Yuan Hsu , Robert Loo , Adele Schmitz
IPC分类号： H01H5122
CPC分类号： H01H59/0009 , H01G5/18 , H01G5/40 , H01H1/06 , H01H1/20 , H01P1/127
摘要： A torsion spring for an electro-mechanical switch is presented. The torsion spring comprises a set of tines including at least one tine extending from the free end of the armature of a switch. A terminus portion is rotatably suspended between the tines, and includes a conducting transmission line, at least a portion of which is exposed for electrical contact. The conducting transmission line has a length selected such that the exposed portion of the transmission line forms a circuit between the input and output of the micro-electro-mechanical switch when the micro-electro-mechanical switch is urged into a closed position, with the terminus portion rotating via the tines to form a conformal connection between the exposed portion of the conducting transmission line and the input and output of the switch, thus optimizing the electrical flow therebetween. The switch is also applied to MEMS devices.
摘要翻译：提出了一种用于机电开关的扭簧。扭转弹簧包括一组尖齿，其包括从开关的电枢的自由端延伸的至少一个齿。末端部分可旋转地悬挂在尖齿之间，并且包括导电传输线，其至少一部分暴露以进行电接触。导电传输线具有选定的长度，使得当微机电开关被迫进入关闭位置时，传输线的暴露部分形成微机电开关的输入和输出之间的电路，通过齿旋转，以在导电传输线的暴露部分与开关的输入和输出之间形成共形连接，从而优化其间的电流。该开关也适用于MEMS器件。

6. 发明申请

US20050035915A1 Phased array antenna 有权
标题翻译：相控阵天线
公开(公告)号：US20050035915A1
公开(公告)日：2005-02-17
申请号：US10239346
申请日：2002-02-06
申请人： Stan Livingston , Jar Lee , James Schaffner , Robert Loo
发明人： Stan Livingston , Jar Lee , James Schaffner , Robert Loo
IPC分类号： H01Q1/42 , H01Q21/00 , H01Q21/06 , H01Q19/06
CPC分类号： H01Q1/422 , H01Q21/0093 , H01Q21/064
摘要： A reconfigurable wide band phased array antenna for generating multiple antenna beams for multiple transmit and receive functions. The antenna array comprises multiple long non-resonant TEM slot antenna apertures with RF MEMS switches disposed within the slots. The RF MEMS switches are positioned directly within the feed lines across the slots to directly control the coupling of RF energy to the slots. Multiple RF MEMS switches are used within each slot, which allows multiple transmit/receive functions and/or multiple frequencies to be supported by each slot. The frequency coverage provided by the slot antenna has a greater than 10:1 frequency range.
摘要翻译：一种用于产生多个发射和接收功能的多个天线波束的可重构宽带相控阵天线。天线阵列包括多个长非谐振TEM缝隙天线孔径，RF MEMS开关设置在槽内。射频MEMS开关直接位于插槽的馈电线内，以直接控制RF能量与插槽的耦合。在每个时隙内使用多个RF MEMS开关，这允许每个时隙支持多个发射/接收功能和/或多个频率。缝隙天线提供的频率覆盖范围大于10：1。

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