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    • 8. 发明授权
    • Systems and methods for monitoring material properties using microwave
energy
    • 使用微波能量监测材料性质的系统和方法
    • US5648038A
    • 1997-07-15
    • US531045
    • 1995-09-20
    • Zakaryae FathiRichard S. GarardJianghua WeiMichael L. Hampton
    • Zakaryae FathiRichard S. GarardJianghua WeiMichael L. Hampton
    • G01N22/00B29C71/04B29C35/08
    • H05B6/705G01N22/00
    • Systems and methods for monitoring workpiece and workpiece material characteristics using microwave energy are disclosed. A system includes a chamber, including means for generating variable frequency microwave energy; means for positioning a workpiece within the chamber; means for subjecting the workpiece to a plurality of different microwave frequencies; and means for monitoring characteristics of the workpiece. One or more characteristics of a workpiece, or workpiece material, may be monitored by positioning the workpiece within a chamber having means for generating variable frequency microwave energy; subjecting the workpiece to microwave irradiation at a plurality of frequencies; detecting power reflection for each one of the plurality of microwave frequencies to provide power reflection data; and comparing the power reflection data to a predetermined set of power reflection data. The result of signature analysis can be coupled with a product process controller to achieve a real-time feedback control on monitoring and adjusting of process parameters.
    • 公开了使用微波能量监测工件和工件材料特性的系统和方法。 一种系统包括一个室,包括产生可变频率微波能量的装置; 用于将工件定位在所述腔室内的装置; 用于使所述工件经受多个不同微波频率的装置; 以及用于监测工件特性的装置。 可以通过将工件定位在具有用于产生可变频率微波能量的装置的腔室内来监测工件或工件材料的一个或多个特性; 以多个频率对工件进行微波照射; 检测所述多个微波频率中的每一个的功率反射以提供功率反射数据; 以及将功率反射数据与预定的功率反射数据集进行比较。 签名分析的结果可以与产品过程控制器相结合,以实现对过程参数的监控和调整的实时反馈控制。