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1. 发明申请

US20050083983A1 Relax gas discharge laser lithography light source 有权
标题翻译：放气放电激光光刻光源
公开(公告)号：US20050083983A1
公开(公告)日：2005-04-21
申请号：US10956784
申请日：2004-10-01
申请人： Richard Sandstrom , William Partlo , Daniel Brown , Thomas Yager , Alexander Ershov , Robert Rafac , German Rylov
发明人： Richard Sandstrom , William Partlo , Daniel Brown , Thomas Yager , Alexander Ershov , Robert Rafac , German Rylov
IPC分类号： B23K26/06 , B23K26/40 , G01J1/42 , G01J9/02 , G02B26/00 , G02B26/08 , G03F7/20 , H01S20060101 , H01S3/00 , H01S3/1055 , H01S3/22 , H01S3/225
CPC分类号： G01J1/429 , B23K26/0622 , B23K2101/40 , G01J9/02 , G02B26/002 , G02B26/0875 , G03F7/70041 , G03F7/70575 , H01S3/005 , H01S3/0057 , H01S3/1055 , H01S3/225
摘要： An apparatus and method are disclosed for operating a narrow band short pulse duration gas discharge laser output light pulse beam producing system, producing a beam comprising laser output light pulses at a selected pulse repetition rate, which may comprise: a dispersive center wavelength selection optic selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on the dispersive wavelength selection optic; a tuning mechanism operative to select at least one angle of incidence of a first spatially defined portion of the laser light pulse beam containing the respective pulse upon the dispersive center wavelength selection optic; and, the tuning mechanism comprising a variably refractive optical element defining a plurality of refractive angular displacements of the first spatially defined portion of the laser light pulse beam passing through the variably refractive optical element at one of a plurality of positions of incidence of the laser light pulse beam on the variably refractive optical element. The variably refractive optical element may comprise: a first generally flat face defining a surface of incidence for the laser light pulse beam; and, a second multifaceted or curved face defining a plurality of generally flat surfaces of exit or a continuously varying surface of exit for the laser light beam. Other aspects of pulse parameter metrology and pulse modulation control, including in response to signals from the utilization tool are disclosed, e.g., relating to proper dose control with differing center wavelength spectra.
摘要翻译：公开了一种用于操作窄带短脉冲持续时间气体放电激光输出光脉冲束产生系统的装置和方法，产生包括选定脉冲重复频率的激光输出光脉冲的光束，其可以包括：色散中心波长选择光学选择用于每个脉冲的至少一个中心波长至少部分地由分散波长选择光学器件上包含相应脉冲的激光束的入射角确定; 调谐机构，用于在色散中心波长选择光学器件上选择包含相应脉冲的激光束脉冲光束的第一空间限定部分的至少一个入射角; 并且所述调谐机构包括可变折射光学元件，所述可变折射光学元件限定所述激光束的所述第一空间限定部分的多个折射角位移通过所述可变折射光学元件在所述激光的入射的多个位置中的一个位置脉冲光束在可变折射光学元件上。可变折射光学元件可以包括：限定用于激光束脉冲束的入射面的第一大致平坦的面; 以及限定用于激光束的出口的多个大致平坦的表面或出口的连续变化的表面的第二多面或弯曲面。脉冲参数测量和脉冲调制控制的其它方面包括响应来自利用工具的信号，例如涉及具有不同中心波长光谱的适当剂量控制。

2. 发明申请

US20080037010A1 Method and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light 有权
公开(公告)号：US20080037010A1
公开(公告)日：2008-02-14
申请号：US11973599
申请日：2007-10-08
申请人： Robert Rafac
发明人： Robert Rafac
IPC分类号： G01N21/00
CPC分类号： G01J3/02 , G01J3/0205 , G01J3/027 , G01J3/28 , G01J3/45
摘要： A bandwidth meter method and apparatus for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed, which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivariable equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter. The actual bandwidth parameter may comprise a spectrum full width at some percent of the maximum within the full width of the spectrum of light emitted from the laser (“FWXM”) or a width between two points on the spectrum enclosing some percentage of the energy of the full spectrum of the spectrum of light emitted from the laser (“EX”). The bandwidth monitor may comprise an etalon and the first output is representative of at least one of a width of a fringe of an optical output of the etalon at FWXM or a width between two points on the spectrum enclosing some percentage of the energy of the full spectrum of light emitted from the laser (“EX′”) and the second output is representative of at least one of a second FWX″M or EX′″, where X≠X′ and X′≠X′″. The precomputed calibration variables may be derived from a measurement of the value of the actual bandwidth parameter utilizing a trusted standard, correlated to the occurrence of the first and second outputs for a calibration spectrum. The value of the actual bandwidth parameter is calculated from the equation: estimated actual BW parameter=K*w1+L*w2+M, where w1=the first measured output representative of FWXM or EX′ and w2 is the second measured output representative of FWX′M or EX′″. The apparatus and method may be implemented in a laser lithography light source and/or in an integrated circuit lithography tool.

3. 发明授权

US07256893B2 Method and apparatus for measuring bandwidth of an optical spectrum output of a very small wavelength very narrow bandwidth high power laser 有权
标题翻译：用于测量非常小波长非常窄带宽大功率激光器的光谱输出带宽的方法和装置
公开(公告)号：US07256893B2
公开(公告)日：2007-08-14
申请号：US10609223
申请日：2003-06-26
申请人： Robert Rafac
发明人： Robert Rafac
IPC分类号： G01B9/02
CPC分类号： G01J3/02 , G01J1/4257 , G01J3/027 , G01J3/28 , G01J3/45 , G01J9/00 , H01S3/1305 , H01S3/225
摘要： An apparatus and method for controlling a laser system is disclosed which may comprise a spectrometer adapted to measure an unknown bandwidth of a spectrum of light emitted from the laser, which may comprise an optical bandwidth measuring unit adapted to provide as an output a measured parameter, which is indicative of a parameter of the unknown bandwidth of the spectrum being measured; a reported parameter computing unit adapted to compute a reported parameter of the unknown bandwidth of the spectrum being measured according to the formula: Reported Parameter(“RP”)=A*(Measured Parameter(“MP”))+C, wherein the RP and MP are a different type of parameter and the values of A and C are determined based upon calibration of the optical bandwidth measuring unit MP response for light of known valued of RP.
摘要翻译：公开了一种用于控制激光系统的装置和方法，其可以包括适于测量从激光器发射的光谱的未知带宽的光谱仪，其可以包括光带宽测量单元，其适于提供测量参数作为输出，其表示正被测量的频谱的未知带宽的参数; 报告参数计算单元，用于根据以下公式计算被测量的未知带宽的报告参数：报告参数（“RP”）= A *（测量参数（“MP”））+ C，其中RP 并且MP是不同类型的参数，并且基于对已知值RP的光的光学带宽测量单元MP响应的校准来确定A和C的值。

4. 发明申请

US20080037025A1 Methods and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light 有权
公开(公告)号：US20080037025A1
公开(公告)日：2008-02-14
申请号：US11973448
申请日：2007-10-08
申请人： Robert Rafac
发明人： Robert Rafac
IPC分类号： G01J3/45
CPC分类号： G01J3/02 , G01J3/0205 , G01J3/027 , G01J3/28 , G01J3/45
摘要： A bandwidth meter method and apparatus for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed, which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivariable equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter. The actual bandwidth parameter may comprise a spectrum full width at some percent of the maximum within the full width of the spectrum of light emitted from the laser (“FWXM”) or a width between two points on the spectrum enclosing some percentage of the energy of the full spectrum of the spectrum of light emitted from the laser (“EX”). The bandwidth monitor may comprise an etalon and the first output is representative of at least one of a width of a fringe of an optical output of the etalon at FWXM or a width between two points on the spectrum enclosing some percentage of the energy of the full spectrum of light emitted from the laser (“EX'”) and the second output is representative of at least one of a second FWX″M or EX′″, where X≠X″ and X′≠X′″. The precomputed calibration variables may be derived from a measurement of the value of the actual bandwidth parameter utilizing a trusted standard, correlated to the occurrence of the first and second outputs for a calibration spectrum. The value of the actual bandwidth parameter is calculated from the equation: estimated actual BW parameter=K*w1+L*w2+M, where w1=the first measured output representative of FWXM or EX′ and w2 is the second measured output representative of FWX″M or EX′″. The apparatus and method may be implemented in a laser lithography light source and/or in an integrated circuit lithography tool.

5. 发明申请

US20050286599A1 Method and apparatus for gas discharge laser output light coherency reduction 审中-公开
公开(公告)号：US20050286599A1
公开(公告)日：2005-12-29
申请号：US10881533
申请日：2004-06-29
申请人： Robert Rafac , Scot Smith
发明人： Robert Rafac , Scot Smith
IPC分类号： G01J1/42 , G01J3/02 , G01J3/12 , G01J3/26 , G01J9/02 , G02B5/04 , G02B5/28 , G02B27/48 , G03F7/20 , H01S3/00 , H01S3/08 , H01S3/22
CPC分类号： G01J3/02 , G01J1/4257 , G01J3/0205 , G01J3/027 , G01J3/0291 , G01J3/0297 , G01J3/1256 , G01J3/26 , G01J9/02 , G01J2009/0249 , G01J2009/0257 , G02B5/04 , G02B5/284 , G02B27/48 , G03F7/70025 , G03F7/70583 , H01S3/005
摘要： A method and apparatus for producing with a gas discharge laser an output laser beam comprising output laser light pulses, for delivery as a light source to a utilizing tool is disclosed which may comprise a beam path and a beam homogenizer in the beam path. The beam homogenizer may comprise at least one beam image inverter or spatial rotator, which may comprise a spatial coherency cell position shifter. The homogenizer may comprise a delay path which is longer than, but approximately the same delay as the temporal coherence length of the source beam. The homogenizer may comprise a pair of conjoined dove prisms having a partially reflective coating at the conjoined surfaces of each, a right triangle prism comprising a hypotenuse face facing the source beam and fully reflective adjoining side faces or an isosceles triangle prism having a face facing the source beam and fully reflective adjoining side faces or combinations of these, which may serve as a source beam multiple alternating inverted image creating mechanism. The beam path may be part of a bandwidth measuring the bandwidths of an output laser beam comprising output laser light in the range of below 500 femtometers at accuracies within tens of femtometers. The homogenizer may comprise a rotating diffuser which may be a ground glass diffuser which may also be etched. The wavemeter may also comprise a collimator in the beam path collimating the diffused light; a confocal etalon creating an output based upon the collimated light entering the confocal etalon; and a detector detecting the output of the confocal etalon and may also comprise a scanning mechanism scanning the angle of incidence of the collimated light entering the confocal etalon which may scan the collimated light across the confocal etalon or scan the etalon across the collimated light, and may comprise an acousto-optical scanner. The confocal etalon may have a free spectral range approximately equal to the E95 width of the beam being measured. The detector may comprise a photomultiplier detecting an intensity pattern of the output of the confocal etalon.

6. 发明申请

US20070229849A1 Bandwidth measuring device for high pulse repetition rate pulsed laser 有权
标题翻译：高脉冲重复率脉冲激光器带宽测量装置
公开(公告)号：US20070229849A1
公开(公告)日：2007-10-04
申请号：US11394513
申请日：2006-03-31
申请人： Robert Rafac
发明人： Robert Rafac
IPC分类号： G01B9/02
CPC分类号： G01J3/02 , G01J3/027 , G01J3/26 , G01J3/2803 , G01J9/0246
摘要： A method and apparatus is disclosed which may comprise detecting the bandwidth of laser output light pulses of a pulsed laser utilizing an array of light detecting elements by the steps which may comprise passing a portion of the laser output light produced by the pulsed laser to the array of light detecting elements in a manner that shifts the portion of the laser beam across the array of light detecting elements to avoid aliasing artifacts in output of the light detecting array. The portion of the image formed by the laser output light may be under-sampled, e.g., in the spatial or time domains. The relevant feature size of an image of an output of a fringe pattern generating element being sampled may comprise a size that is small with respect to the size of individual light detecting elements in the array of light detecting elements. sity of the fringe image.
摘要翻译：公开了一种方法和装置，其可以包括通过步骤检测利用光检测元件阵列的脉冲激光器的激光输出光脉冲的带宽，该步骤可以包括将由脉冲激光产生的激光输出光的一部分传递到阵列的光检测元件，其方式是将激光束的该部分移动穿过光检测元件阵列，以避免光检测阵列的输出中的伪像。由激光输出光形成的图像的部分可能在例如空间或时域中被低采样。被采样的条纹图案生成元件的输出的图像的相关特征尺寸可以包括相对于光检测元件阵列中的各个光检测元件的尺寸小的尺寸。边缘形象的精神。

7. 发明申请

US20070013913A1 Spectral metrology for high repetition rate gas discharge laser 有权
标题翻译：高重复气体放电激光的光谱测量
公开(公告)号：US20070013913A1
公开(公告)日：2007-01-18
申请号：US11169202
申请日：2005-06-27
申请人： Robert Rafac
发明人： Robert Rafac
IPC分类号： G01J3/45 , G01B9/02
CPC分类号： G01J3/26 , G01J3/02 , G01J3/0202 , G01J3/0237 , G01J3/027 , G01J3/0286 , G01J3/0291 , G01J3/28
摘要： A bandwidth meter apparatus and method for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivariable equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter; the multivariable equation comprising a symmetry sensitive term.
摘要翻译：公开了一种用于测量从激光输入到带宽计的发射光谱的带宽的带宽计量仪装置和方法，其可以包括光带宽监视器，其提供表示第一参数的第一输出，第一参数指示从激光器发射的光和表示从激光器发射的光的带宽的第二参数的第二输出; 以及使用所述第一输出和所述第二输出的实际带宽计算装置作为使用所述光学带宽监视器特有的预定校准变量的多变量方程的一部分来计算实际带宽参数; 包含对称敏感项的多变量方程式。

8. 发明申请

US20050008789A1 Method and apparatus for stabilizing optical dielectric coatings 审中-公开
标题翻译：用于稳定光学介电涂层的方法和装置
公开(公告)号：US20050008789A1
公开(公告)日：2005-01-13
申请号：US10608521
申请日：2003-06-26
申请人： Robert Rafac , Alexei Lukashev , Weiman Zhang Kevin
发明人： Robert Rafac , Alexei Lukashev , Weiman Zhang Kevin
IPC分类号： B05D3/06 , G02B1/10 , B05D3/00
CPC分类号： G02B1/10 , B05D3/065
摘要： A method for stabilizing a multi-layered dielectric reflectivity coating subject to compaction/densification upon exposure to DUV or shorter wavelength light, is disclosed which may comprise: applying the reflectivity coating to a reflective surface forming a coating bulk on the surface; exposing the coating bulk to a pretreatment of a sufficient amount of DUV radiation to induce sufficient densification in enough of the coating bulk to inhibit subsequent densification during continued exposure to DUV or shorter wavelength radiation. The method may also comprise the pretreatment radiation exposure amounting to energy of at least the equivalent of about 2 Bp at 9 mJ per pulse. The method may also comprise the pretreatment radiation exposure amounting the energy being delivered in at about 3 KHz pulse repetition rate. The method may also comprise the pretreatment radiation exposure amounts to energy of at least the equivalent of 15-18 mJ per pulse delivered over about 700 M-1 B pulses, i.e., about 4 days at 3 Khz or 2-3 days at 4 Khz pulse rates.
摘要翻译：公开了一种用于在暴露于DUV或更短波长的光时进行压实/致密化的多层电介质反射率涂层的稳定化方法，其可以包括：将反射性涂层施加到在表面上形成涂层体积的反射表面; 将涂层体积暴露于足够量的DUV辐射的预处理以在足够的涂层体积下诱导足够的致密化，以在持续暴露于DUV或较短波长辐射期间抑制随后的致密化。该方法还可以包括在9mJ /脉冲下达到至少等于约2Bp的能量的预处理辐射暴露。该方法还可以包括预处理辐射照射量，以大约3KHz的脉冲重复频率输送能量。该方法还可以包括预处理辐射暴露量等于在约700M-1B脉冲上递送的每脉冲至少相当于15-18mJ的能量，即在3KHz下约4天，在4KHz下2-3天脉搏率。

9. 发明申请

US20050007600A1 Optical bandwidth meter for laser light 有权
公开(公告)号：US20050007600A1
公开(公告)日：2005-01-13
申请号：US10615321
申请日：2003-07-07
申请人： Robert Rafac
发明人： Robert Rafac
IPC分类号： G01J1/42 , G01J3/02 , G01J3/28 , G01J3/45 , G01B9/02
CPC分类号： G01J1/4257 , G01J1/0228 , G01J3/02 , G01J3/027 , G01J3/28 , G01J3/45
摘要： A method and apparatus for measuring bandwidth of light emitted from a laser is disclosed which may comprise: a first and second wavelength sensitive optical bandwidth detectors providing, respectively, an output representative of a first parameter indicative of the bandwidth of the emitted light as measured respectively by the first and second bandwidth detectors, and an actual bandwidth calculation apparatus adapted to utilize these two outputs as part of a multivariable linear equation employing predetermined calibration variables specific to either the first or the second bandwidth detector, to calculate a first actual bandwidth parameter or a second actual bandwidth parameter. The first actual bandwidth parameter may be a spectrum full width at some percent of the maximum (“FWXM”), and the second actual bandwidth parameter may be a portion containing some percentage of the energy (“EX”). The first and second bandwidth detectors may an etalon and the outputs may be representative of a fringe width of a fringe of an optical output of the respective etalon at FWXM. The precomputed calibration variables may be derived from respective three dimensional plots representing, respectively, detector outputs in relation to a calibrating input light with known values of the first and second actual bandwidth parameters, which may be FWXM and EX. The first/second three dimensional plot may provide a solution: (first/second output)=(a/d*(calibrating input light known value of FWXM))+(b/e*(calibrating input light known value of EX)+c/f; and the actual bandwidth calculation apparatus may use the derived equation: (first actual bandwidth parameter)=((b*(second output))−(e*(first output))+ce−bf)/(bd−ae), or the equation: (second actual bandwidth parameter)=((a*(second output))−(d*(first output))+cd−af)/(ae−bd). FWXM may be FWHM and EX may be E95. The transfer function of the first optical bandwidth detector may be selected to be much more sensitive to FWXM than to EX and the transfer function of the second optical bandwidth detector may be selected to be much more sensitive to EX than to FWXM.

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