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    • 1. 发明授权
    • Probability constrained optimization for electrical fabrication control
    • 概率约束优化电气制造控制
    • US06959224B2
    • 2005-10-25
    • US10335748
    • 2003-01-02
    • Richard P. GoodGregory A. CherryJin Wang
    • Richard P. GoodGregory A. CherryJin Wang
    • G03F7/20G05B19/418H01L21/66G06F19/00
    • G03F7/705G05B19/41885G05B2219/32015G05B2219/50129H01L22/20Y02P90/26
    • A method includes defining a model of a process for manufacturing a device, the process including a plurality of steps. A plurality of inline process targets are defined for at least a subset of the process steps. The model relates the inline process targets to a plurality of process output parameters. A first set of probabilistic constraints for the inline process targets is defined. A second set of probabilistic constraints for the process output parameters is defined. An objective function is defined based on the model and the plurality of process output parameters. A trajectory of the process output parameters is determined by optimizing the objective function subject to the first and second sets of probabilistic constraints for each process step to determine values for the inline process targets at each process step, the optimization being iterated after completion of each process step for the remaining process steps.
    • 一种方法包括定义用于制造设备的过程的模型,该过程包括多个步骤。 为进程步骤的至少一个子集定义了多个内联过程目标。 该模型将内联过程目标与多个过程输出参数相关联。 定义了内联流程目标的第一组概率约束。 定义了过程输出参数的第二组概率约束。 基于模型和多个过程输出参数定义目标函数。 过程输出参数的轨迹通过优化目标函数来确定,该目标函数受制于每个处理步骤的第一和第二组概率约束,以确定每个处理步骤中的内联过程目标的值,优化在每个过程完成之后重复 步骤剩下的过程步骤。
    • 3. 发明授权
    • Method and apparatus for adaptive sampling based on process covariance
    • 基于过程协方差自适应采样的方法和装置
    • US06985825B1
    • 2006-01-10
    • US10619843
    • 2003-07-15
    • Richard P. GoodTimothy L. JacksonBrian K. Cusson
    • Richard P. GoodTimothy L. JacksonBrian K. Cusson
    • G06F19/00G01N37/00
    • G05B19/41865G05B2219/32199G05B2219/37448G05B2219/45031Y02P90/20Y02P90/22
    • A method includes processing a plurality of workpieces to form at least one feature on each workpiece. A plurality of characteristics of the feature is measured. A covariance matrix including diagonal and non-diagonal terms for the plurality of characteristics measured is constructed. At least the non-diagonal terms of the covariance matrix are monitored. A sampling plan for measuring the workpieces is determined based on the monitoring. A system includes a plurality of tools, at least one metrology tool, and a sampling controller. The tools are configured to process a plurality of workpieces to form at least one feature on each workpiece. The metrology tool is configured to measure a plurality of characteristics of the feature. The sampling controller is configured to construct a covariance matrix including diagonal and non-diagonal terms for the plurality of characteristics measured, monitor at least the non-diagonal terms of the covariance matrix, and determine a sampling plan for measuring the workpieces based on the monitoring.
    • 一种方法包括处理多个工件以在每个工件上形成至少一个特征。 测量该特征的多个特征。 构造了包括所测量的多个特征的对角和非对角项的协方差矩阵。 至少监视协方差矩阵的非对角项。 基于监测确定用于测量工件的抽样计划。 系统包括多个工具,至少一个计量工具和采样控制器。 工具被配置为处理多个工件以在每个工件上形成至少一个特征。 计量工具被配置为测量特征的多个特征。 采样控制器被配置为构建包括测量的多个特征的对角线和非对角项的协方差矩阵,至少监视协方差矩阵的非对角项,并且基于监视来确定用于测量工件的采样计划 。
    • 4. 发明授权
    • Time weighted moving average filter
    • 时间加权移动平均滤波器
    • US07542880B2
    • 2009-06-02
    • US11278840
    • 2006-04-06
    • Richard P. GoodKevin A. ChamnessUwe Schulze
    • Richard P. GoodKevin A. ChamnessUwe Schulze
    • G06F19/00H03F1/26H04B15/00G01N37/00G06F15/00G06F17/18G06F11/30G21C17/00G05B13/02G06F7/60G06F17/10
    • G05B19/41865G05B13/048G05B2219/32053G05B2219/37532G05B2219/45031Y02P90/20
    • A method for estimating a state associated with a process includes receiving a state observation associated with the process. The state observation has an associated process time. A weighting factor to discount the state observation is generated based on the process time. A state estimate is generated based on the discounted state observation. A system includes a process tool, a metrology tool, and a process controller. The process tool is operable to perform a process in accordance with an operating recipe. The metrology tool is operable to generate a state observation associated with the process. The process controller is operable to receive the state observation, the state observation having an associated process time, generate a weighting factor to discount the state observation based on the process time, generate a state estimate based on the discounted state observation, and determine at least one parameter of the operating recipe based on the state estimate.
    • 用于估计与过程相关联的状态的方法包括接收与该过程相关联的状态观察。 状态观察具有相关的处理时间。 基于处理时间生成打折状态观察的权重因子。 基于贴现状态观察来生成状态估计。 系统包括处理工具,计量工具和过程控制器。 处理工具可操作以根据操作配方执行处理。 计量工具可操作以产生与该过程相关联的状态观察。 过程控制器可操作以接收状态观察,具有相关联的处理时间的状态观察,基于处理时间生成加权因子以折扣状态观察,基于打折状态观察生成状态估计,并且至少确定 基于状态估计的操作配方的一个参数。