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    • 2. 发明授权
    • Monolithic linear variable filter and method of manufacture
    • 单片线性可变滤波器及其制造方法
    • US5872655A
    • 1999-02-16
    • US851407
    • 1997-05-05
    • Richard I. SeddonBasil L. SwabyRichard J. RyallScott E. SolbergErik W. Anthon
    • Richard I. SeddonBasil L. SwabyRichard J. RyallScott E. SolbergErik W. Anthon
    • G02B1/10G02B5/28
    • G02B5/285G02B1/10
    • A process suitable for forming multi-layer (up to at least several hundred layers) monotonic/linear variable/wedge filter coatings on a single substrate surface and for forming monolithic filter assemblies which incorporate such filters, is disclosed along with the designs for such filters. The monolithic process uses radially variable filter fabrication techniques in combination with ion-assisted deposition to form stress controlled, radially variable filter coatings of the desired varied optical profile, preferably using high and low index materials stich as tantala and silica. Stress is minimized by balancing the amount of ion assist and the coating rate. Slices are cut radially from the substrate to form quasi-linear variable filters. Other coatings such as, but not limited to, a wide band hot mirror can be formed on the opposite surface of the substrate from the radially variable LVF method. The method forms complex multi-layer thick filters with high yields on a single substrate surface such that the filter is free of precession or sideways leakage of light between the parallel surfaces. Also disclosed is an optical filter having stacks arranged so that the magnitude of the characteristic center wavelength of each stack increases from stack to stack along the desired direction of traversal of incident light through the filter. As a result of this sequential construction, diffuse leaks are blocked from transmission through the filter. The diffuse leak-suppressed filter can be formed by various processes, including the monolithic process.
    • 公开了适用于在单个衬底表面上形成多层(至多几百层)单调/线性可变/楔形过滤器涂层并且用于形成包括这种过滤器的整体式过滤器组件的方法以及用于这种过滤器的设计 。 单片工艺使用径向可变过滤器制造技术与离子辅助沉积相组合以形成所需变化的光学轮廓的应力控制的可径向​​变化的过滤器涂层,优选使用高和低折射率的材料,如钽铁和二氧化硅。 通过平衡离子辅助量和涂布速率来减小应力。 切片从基板径向切割以形成准线性可变滤波器。 可以在径向可变的LVF方法的基板的相对表面上形成其他涂层,例如但不限于宽带热镜。 该方法在单个基板表面上形成具有高产率的复杂多层厚滤波器,使得滤光器在平行表面之间没有光的进动或侧向泄漏。 还公开了一种滤光器,其具有堆叠,其布置成使得每个堆叠的特征中心波长的大小沿着沿入射光穿过滤光器的期望的方向从堆叠升到堆叠。 作为这种连续构造的结果,阻挡了通过过滤器的扩散泄漏。 扩散泄漏抑制过滤器可以通过各种工艺形成,包括单片工艺。