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1. 发明授权

US5873153A Method of making tunable thin film acoustic resonators 失效
标题翻译：制造可调谐薄膜声谐振器的方法
公开(公告)号：US5873153A
公开(公告)日：1999-02-23
申请号：US703716
申请日：1996-08-27
申请人： Richard C. Ruby , Paul Philip Merchant
发明人： Richard C. Ruby , Paul Philip Merchant
IPC分类号： H03H3/04 , H03H9/02 , H03H9/17 , H03H9/58 , H01L41/22
CPC分类号： H03H9/174 , H03H3/04 , H03H9/02133 , H03H9/02236 , H03H9/583 , H03H9/588 , H03H2009/02181 , Y10T29/42
摘要： An acoustical resonator comprising top and bottom electrodes that sandwich a PZ layer. The resonance frequency of the acoustical resonator may be adjusted after fabrication by utilizing heating elements included in the acoustical resonator and/or by adjusting the thickness of a tuning layer. In the preferred embodiment of the present invention, the electrodes comprise Mo layers. One embodiment of the present invention is constructed on a Si.sub.3 N.sub.4 membrane. A second embodiment of the present invention is constructed such that it is suspended over a substrate on metallic columns. In the preferred embodiment of the present invention, the electrodes are deposited by a method that minimizes the stress in the electrodes.
摘要翻译：包括夹着PZ层的顶部和底部电极的声学谐振器。可以通过利用声谐振器中包含的加热元件和/或通过调节调谐层的厚度来调整声学谐振器的共振频率。在本发明的优选实施例中，电极包括Mo层。本发明的一个实施方案构造在Si 3 N 4膜上。本发明的第二实施例构造成使得其悬挂在金属柱上的基板上。在本发明的优选实施例中，通过使电极中的应力最小化的方法来沉积电极。

2. 发明授权

US06507983B1 Method of making tunable thin film acoustic resonators 有权
标题翻译：制造可调谐薄膜声谐振器的方法
公开(公告)号：US06507983B1
公开(公告)日：2003-01-21
申请号：US09192163
申请日：1998-11-13
申请人： Richard C. Ruby , Paul Philip Merchant
发明人： Richard C. Ruby , Paul Philip Merchant
IPC分类号： H04R1700
CPC分类号： H03H9/174 , H03H3/04 , H03H9/02133 , H03H9/02236 , H03H9/583 , H03H9/588 , H03H2009/02181 , Y10T29/42
摘要： An acoustical resonator comprising top and bottom electrodes that sandwich a PZ layer. The resonance frequency of the acoustical resonator may be adjusted after fabrication by utilizing heating elements included in the acoustical resonator and/or by adjusting the thickness of a tuning layer. In the preferred embodiment of the present invention, the electrodes comprise Mo layers. One embodiment of the present invention is constructed on a Si3N4 membrane. A second embodiment of the present invention is constructed such that it is suspended over a substrate on metallic columns. In the preferred embodiment, the electrodes are deposited by a method that minimizes the stress in the electrodes.
摘要翻译：包括夹着PZ层的顶部和底部电极的声学谐振器。可以通过利用声谐振器中包含的加热元件和/或通过调节调谐层的厚度来调整声学谐振器的共振频率。在本发明的优选实施例中，电极包括Mo层。本发明的一个实施方案构造在Si 3 N 4膜上。本发明的第二实施例构造成使得其悬挂在金属柱上的基板上。在优选实施例中，通过使电极中的应力最小化的方法来沉积电极。

3. 发明授权

US09479139B2 Resonator device including electrode with buried temperature compensating layer 有权
公开(公告)号：US09479139B2
公开(公告)日：2016-10-25
申请号：US12769791
申请日：2010-04-29
申请人： Richard C. Ruby , Wei Pang , Qiang Zou , Donald Lee
发明人： Richard C. Ruby , Wei Pang , Qiang Zou , Donald Lee
IPC分类号： H01L41/08 , H03H9/13 , H03H3/04 , H03H9/02 , H03H9/17
CPC分类号： H03H9/131 , H03H3/04 , H03H9/02102 , H03H9/173 , H03H9/175
摘要： An acoustic resonator device includes a composite first electrode on a substrate, a piezoelectric layer on the composite electrode, and a second electrode on the piezoelectric layer. The first electrode includes a buried temperature compensating layer having a positive temperature coefficient. The piezoelectric layer has a negative temperature coefficient, and thus the positive temperature coefficient of the temperature compensating layer offsets at least a portion of the negative temperature coefficient of the piezoelectric layer.

4. 发明授权

US09154103B2 Temperature controlled acoustic resonator 有权
标题翻译：温度控制声谐振器
公开(公告)号：US09154103B2
公开(公告)日：2015-10-06
申请号：US13361724
申请日：2012-01-30
申请人： Richard C. Ruby
发明人： Richard C. Ruby
IPC分类号： H03H9/54 , H03H3/02 , H03H9/08 , H03H9/02
CPC分类号： H03H9/172 , H03H3/02 , H03H9/02102 , H03H9/08 , H03H9/54
摘要： An acoustic resonator device includes an annular acoustic resonator, a heater coil and a heat sensor. The annular acoustic resonator is positioned over a trench formed in a substrate of the acoustic resonator device. The heater coil is disposed around a perimeter of the annular acoustic resonator, the heater coil including a resistor configured to receive a heater current. The heat sensor is configured to adjust the heater current in response to a temperature of the heater coil.
摘要翻译：声谐振器装置包括环形声谐振器，加热器线圈和热传感器。环形声谐振器位于形成在声谐振器装置的衬底中的沟槽之上。加热器线圈围绕环形声谐振器的周边设置，加热器线圈包括被配置为接收加热器电流的电阻器。热传感器被配置为响应于加热器线圈的温度来调节加热器电流。

5. 发明授权

US07714684B2 Acoustic resonator performance enhancement using alternating frame structure 有权
标题翻译：使用交替框架结构的声谐振器性能提升
公开(公告)号：US07714684B2
公开(公告)日：2010-05-11
申请号：US12115666
申请日：2008-05-06
申请人： Richard C. Ruby , Ronald S. Fazzio , Hongjun Feng , Paul D. Bradley
发明人： Richard C. Ruby , Ronald S. Fazzio , Hongjun Feng , Paul D. Bradley
IPC分类号： H03H9/13 , H03H9/15 , H03H9/54
CPC分类号： H03H9/02086 , H03H3/02 , H03H9/02149 , H03H9/13 , H03H9/132 , H03H9/173 , H03H2003/0428
摘要： Disclosed is an acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and an alternating frame region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The alternating frame region is on one of the first and second electrodes.
摘要翻译：公开了一种包括基板，第一电极，压电材料层，第二电极和交替框架区域的声共振器。第一电极与衬底相邻，并且第一电极具有外周边。压电层与第一电极相邻。第二电极邻近压电层，第二电极具有外周。交替的框架区域在第一和第二电极之一上。

6. 发明申请

US20090079514A1 HYBRID ACOUSTIC RESONATOR-BASED FILTERS 审中-公开
标题翻译：基于混合谐振谐振器的滤波器
公开(公告)号：US20090079514A1
公开(公告)日：2009-03-26
申请号：US11860107
申请日：2007-09-24
申请人： Tiberiu Jamneala , Martha Small , Richard C. Ruby
发明人： Tiberiu Jamneala , Martha Small , Richard C. Ruby
IPC分类号： H03H9/70 , H03H9/58
CPC分类号： H03H9/60 , H03H9/584 , H03H9/585 , H03H9/587 , H03H9/589
摘要： A hybrid acoustic resonator filter and a communication device with a hybrid acoustic resonator filter is described.
摘要翻译：描述了一种混合声学谐振滤波器和具有混合声谐振滤波器的通信装置。

7. 发明授权

US06874211B2 Method for producing thin film bulk acoustic resonators (FBARs) with different frequencies on the same substrate by subtracting method and apparatus embodying the method 有权
标题翻译：通过减去实施该方法的方法和装置在同一基板上制造具有不同频率的薄膜体声共振器（FBAR）的方法
公开(公告)号：US06874211B2
公开(公告)日：2005-04-05
申请号：US09799205
申请日：2001-03-05
申请人： Paul D. Bradley , John D. Larson, III , Richard C. Ruby
发明人： Paul D. Bradley , John D. Larson, III , Richard C. Ruby
IPC分类号： H01L41/22 , H03H3/04 , H03H9/17 , H03H9/56 , H04R17/00 , H01B13/00 , H03H9/00
CPC分类号： H03H9/564 , H03H3/04 , H03H2003/0428 , H03H2003/0471 , Y10T29/42
摘要： A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by reducing mass from a top electrode layer. For a substrate having multiple resonators, mass is reduced from only selected resonator to provide resonators having different resonance frequencies on the same substrate.
摘要翻译：公开了一种用于制造谐振器，特别是薄膜体声波谐振器（FBAR）的方法和体现该方法的谐振器。通过减少从顶部电极层的质量而在衬底上制造FBAR。对于具有多个谐振器的衬底，仅从所选择的谐振器减小质量，以在同一衬底上提供具有不同谐振频率的谐振器。

8. 发明授权

US06483229B2 Method of providing differential frequency adjusts in a thin film bulk acoustic resonator (FBAR) filter and apparatus embodying the method 有权
公开(公告)号：US06483229B2
公开(公告)日：2002-11-19
申请号：US09799149
申请日：2001-03-05
申请人： John D. Larson, III , Paul D. Bradley , Richard C. Ruby
发明人： John D. Larson, III , Paul D. Bradley , Richard C. Ruby
IPC分类号： H01L4104
CPC分类号： H03H9/564 , H03H3/04 , H03H2003/0428 , H03H2003/0471
摘要： A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by mass loading piezoelectric (PZ) layer between two electrodes. For a substrate having multiple resonators, only selected resonator is mass loaded to provide resonators having different resonance frequencies on the same substrate.

9. 发明授权

US06469597B2 Method of mass loading of thin film bulk acoustic resonators (FBAR) for creating resonators of different frequencies and apparatus embodying the method 有权
标题翻译：用于产生不同频率的谐振器的薄膜体声共振器（FBAR）的质量加载方法和体现该方法的装置
公开(公告)号：US06469597B2
公开(公告)日：2002-10-22
申请号：US09799204
申请日：2001-03-05
申请人： Richard C. Ruby , Paul D. Bradley , John D. Larson, III
发明人： Richard C. Ruby , Paul D. Bradley , John D. Larson, III
IPC分类号： H03H956
CPC分类号： H03H9/564 , H03H3/04 , H03H2003/0428 , H03H2003/0471 , Y10T29/42
摘要： A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by introducing a mass loading electrode to a bottom electrode layer. For a substrate having multiple resonators, mass loading bottom electrode is introduced for only selected resonator to provide resonators having different resonance frequencies on the same substrate.
摘要翻译：公开了一种用于制造谐振器，特别是薄膜体声波谐振器（FBAR）的方法和体现该方法的谐振器。通过向底部电极层引入质量负载电极，在基板上制造FBAR。对于具有多个谐振器的基板，仅为所选择的谐振器引入质量负载底部电极，以在同一基板上提供具有不同谐振频率的谐振器。

10. 发明授权

US06384697B1 Cavity spanning bottom electrode of a substrate-mounted bulk wave acoustic resonator 有权
标题翻译：衬底安装的体声波谐振器的腔体跨越底部电极
公开(公告)号：US06384697B1
公开(公告)日：2002-05-07
申请号：US09566868
申请日：2000-05-08
申请人： Richard C. Ruby
发明人： Richard C. Ruby
IPC分类号： H03H900
CPC分类号： H03H9/587 , H03H3/02 , H03H3/04 , H03H9/173 , H03H9/585
摘要： A filter formed of acoustic resonators, where each resonator has its own cavity and a bottom electrode that spans the entirety of the cavity, so that the bottom electrode has an unsupported interior region surrounded by supported peripheral regions. In the preferred embodiment, the cavity is formed by etching a depression into the substrate, filling the depression with a sacrificial material, depositing the piezoelectric and electrode layers that define an FBAR or SBAR, and then removing the sacrificial material from the depression. Also in the preferred embodiment, the sacrificial material is removed via release holes that are limited to the periphery of the depression. Preferably, the bottom electrode is the only electrode that spans the cavity, thereby limiting the formation of parasitic FBARs or SBARs. In one embodiment, the bottom electrode includes a serpentine edge that leaves a portion of one side of the cavity free of overlap by the bottom electrode, so that a top electrode may overlap this portion. Thus, the top and bottom electrodes can overlap the same side without sandwiching the piezoelectric layer outside of the unsupported interior region.
摘要翻译：由声谐振器形成的滤波器，其中每个谐振器具有其自身的空腔和跨越整个空腔的底部电极，使得底部电极具有被支撑的周边区域包围的无支撑的内部区域。在优选实施例中，通过将凹陷蚀刻到基板中，用牺牲材料填充凹陷，沉积限定FBAR或SBAR的压电层和电极层，然后从凹陷中去除牺牲材料来形成空腔。同样在优选实施例中，通过限制在凹陷周边的释放孔去除牺牲材料。优选地，底部电极是跨越空腔的唯一电极，从而限制寄生FBAR或SBAR的形成。在一个实施例中，底部电极包括使空腔的一侧的一部分离开由底部电极重叠的蛇形边缘，使得顶部电极可能与该部分重叠。因此，顶部和底部电极可以重叠在同一侧，而不将压电层夹在未支撑的内部区域之外。

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