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1. 发明授权

US08864915B2 Cleaning methods for improved photovoltaic module efficiency 有权
标题翻译：提高光伏组件效率的清洁方法
公开(公告)号：US08864915B2
公开(公告)日：2014-10-21
申请号：US13197614
申请日：2011-08-03
申请人： Renhe Jia , Adam Brand , Liming Zhang , Dapeng Wang , Tzay-Fa Su , Vijay Parihar
发明人： Renhe Jia , Adam Brand , Liming Zhang , Dapeng Wang , Tzay-Fa Su , Vijay Parihar
IPC分类号： B08B3/00 , B08B3/12 , H01L31/18 , B23K26/16 , H01L31/0392 , B23K26/36 , B08B3/08
CPC分类号： B08B3/08 , B08B3/12 , B23K26/16 , B23K26/364 , H01L31/0392 , H01L31/18 , Y02E10/50
摘要： A method of processing a substrate having a transparent conductive oxide disposed thereon, including: exposing the substrate to a first cleaning solution comprising hydrogen peroxide and ammonium citrate; exposing the substrate to a second cleaning solution having a pH within a range from about 6 to about 7, the second cleaning solution different than the first cleaning solution; agitating the second cleaning solution; and depositing a silicon-containing film on the transparent conductive oxide.
摘要翻译：一种处理其上设置有透明导电氧化物的衬底的方法，包括：将衬底暴露于包含过氧化氢和柠檬酸铵的第一清洁溶液; 将所述基材暴露于pH在约6至约7的范围内的第二清洗溶液，所述第二清洗溶液不同于所述第一清洗溶液; 搅动第二清洗液; 以及在所述透明导电氧化物上沉积含硅膜。

2. 发明申请

US20120037181A1 CLEANING METHODS FOR IMPROVED PHOTOVOLTAIC MODULE EFFICIENCY 有权
标题翻译：用于改进光伏模块效率的清洁方法
公开(公告)号：US20120037181A1
公开(公告)日：2012-02-16
申请号：US13197614
申请日：2011-08-03
申请人： Renhe Jia , Adam Brand , Liming Zhang , Dapeng Wang , Tzay-Fa Su , Vijay Parihar
发明人： Renhe Jia , Adam Brand , Liming Zhang , Dapeng Wang , Tzay-Fa Su , Vijay Parihar
IPC分类号： C23G1/02 , B08B3/12
CPC分类号： B08B3/08 , B08B3/12 , B23K26/16 , B23K26/364 , H01L31/0392 , H01L31/18 , Y02E10/50
摘要： Embodiments of the present invention generally relate to methods for cleaning a substrate prior to a deposition process. The methods generally include multiple cleaning solutions for removing contaminants from a surface of a substrate. The multiple solutions generally have different compositions, and each of the solutions contain one or more additives selected to remove a variety of contaminants. Mechanical agitation may also be utilized to remove contaminants from the surface of a substrate. After cleaning a substrate, a material may be deposited on the substrate surface.
摘要翻译：本发明的实施例一般涉及在沉积工艺之前清洁衬底的方法。所述方法通常包括用于从基材表面去除污染物的多种清洁溶液。多种溶液通常具有不同的组成，并且每种溶液含有一种或多种选择用于除去各种污染物的添加剂。机械搅拌也可用于从基材表面去除污染物。在清洁衬底之后，材料可以沉积在衬底表面上。

3. 发明申请

US20090287446A1 PHOTOVOLTAIC CELL REFERENCE MODULE FOR SOLAR TESTING 审中-公开
标题翻译：用于太阳能测试的光电池参考模块
公开(公告)号：US20090287446A1
公开(公告)日：2009-11-19
申请号：US12428195
申请日：2009-04-22
申请人： Dapeng Wang , Michel R. Frei , Tzay-Fa Su , David Tanner
发明人： Dapeng Wang , Michel R. Frei , Tzay-Fa Su , David Tanner
IPC分类号： G06F19/00 , H01L31/18 , G01R31/00
CPC分类号： H01L31/042 , H01L31/02167 , H01L31/048 , H02S50/10 , Y02E10/50
摘要： The present invention generally includes an apparatus and method of forming a reference module device that is able to deliver a repeatable and desirable amount of power that does not degrade or change over time. The reference module can be used to help test and calibrate various testing equipment used in the production of a photovoltaic device that may be formed in a solar cell fab. The solar cell fab is generally an arrangement of processing modules and automation equipment that is used to form solar cell devices.
摘要翻译：本发明通常包括一种形成参考模块装置的装置和方法，所述装置和方法能够递送不会劣化或随时间改变的可重复且期望的功率量。参考模块可用于帮助测试和校准在太阳能电池制造中可能形成的光伏器件生产中使用的各种测试设备。太阳能电池制造厂通常是用于形成太阳能电池装置的处理模块和自动化设备的布置。

4. 发明申请

US20110126875A1 CONDUCTIVE CONTACT LAYER FORMED ON A TRANSPARENT CONDUCTIVE LAYER BY A REACTIVE SPUTTER DEPOSITION 审中-公开
标题翻译：通过反应溅射沉积形成透明导电层的导电接触层
公开(公告)号：US20110126875A1
公开(公告)日：2011-06-02
申请号：US12628569
申请日：2009-12-01
申请人： Hien-Minh Huu Le , Valery V. Komin , David Tanner , Mohd Fadzli Anwar Hassan , Tzay-Fa Su , Dapeng Wang
发明人： Hien-Minh Huu Le , Valery V. Komin , David Tanner , Mohd Fadzli Anwar Hassan , Tzay-Fa Su , Dapeng Wang
IPC分类号： H01L31/042 , C23C14/34 , H01L31/06
CPC分类号： C23C14/0036 , C23C14/08 , C23C14/3464 , H01L31/022466 , H01L31/02366 , H01L31/076 , H01L31/1884 , Y02E10/548
摘要： Methods for sputter depositing a transparent conductive layer and a conductive contact layer are provided in the present invention. In one embodiment, the method includes forming a transparent conductive layer on a substrate by materials sputtered from a first target disposed in a reactive sputter chamber, and forming a conductive contact layer on the transparent conductive layer by materials sputtered from a second target disposed in the reactive sputter chamber.
摘要翻译：在本发明中提供溅射沉积透明导电层和导电接触层的方法。在一个实施例中，该方法包括通过从设置在反应性溅射室中的第一靶溅射的材料在衬底上形成透明导电层，以及在透明导电层上形成导电接触层，该导电接触层由设置在反应溅射室。

5. 发明申请

US20100276571A1 CALIBRATION METHOD FOR SOLAR SIMULATORS USIED IN SINGLE JUNCTION AND TANDEM JUNCTION SOLAR CELL TESTING APPARATUS 审中-公开
标题翻译：太阳能模拟器在单节和串联太阳能电池测试装置中使用的校准方法
公开(公告)号：US20100276571A1
公开(公告)日：2010-11-04
申请号：US12772430
申请日：2010-05-03
申请人： Dapeng Wang , Michel Frei , Tzay-Fa Su , David Tanner
发明人： Dapeng Wang , Michel Frei , Tzay-Fa Su , David Tanner
IPC分类号： G01J1/32
CPC分类号： G01J1/08 , G01J1/32
摘要： A method of calibrating a light source used to simulate the sun in solar cell testing apparatus. The method comprises using a control cell to measure the intensity of light from the light source at a first wavelength range as a function of output short circuit current, comparing the measured intensity to a targeted intensity value, optionally adjusting power to the light source until the measured intensity is substantially equal to the targeted intensity value, repeatedly using a calibrated monitoring module to periodically measure monitoring measured values for monitoring module output short circuit current, monitoring module output open circuit voltage and monitoring module quantum efficiency, obtaining average values for monitoring module output short circuit current, monitoring module output open circuit voltage and monitoring module quantum efficiency, comparing the measured values with the average values, and determining if differences in measured values and average values are within an acceptable limit.
摘要翻译：一种在太阳能电池测试装置中校准用于模拟太阳的光源的方法。该方法包括使用控制单元来测量来自作为输出短路电流的函数的来自光源的来自光源的光的强度，作为输出短路电流的函数，将测量的强度与目标强度值进行比较，可选地调节光源的功率，直到测量强度基本上等于目标强度值，重复使用校准监控模块定期测量监测模块输出短路电流，监控模块输出开路电压和监控模块量子效率的监测值，获取监控模块输出的平均值短路电流，监控模块输出开路电压和监控模块量子效率，将测量值与平均值进行比较，并确定测量值和平均值之间的差异是否在可接受的极限内。

6. 发明申请

US20100197051A1 METROLOGY AND INSPECTION SUITE FOR A SOLAR PRODUCTION LINE 审中-公开
标题翻译：太阳能生产线的计量和检验套件
公开(公告)号：US20100197051A1
公开(公告)日：2010-08-05
申请号：US12698559
申请日：2010-02-02
申请人： Asaf Schlezinger , Michel R. Frei , Dapeng Wang , Tzay-Fa Su , Vicky Svidenko , Kashif Maqsood
发明人： Asaf Schlezinger , Michel R. Frei , Dapeng Wang , Tzay-Fa Su , Vicky Svidenko , Kashif Maqsood
IPC分类号： H01L31/18 , H01L21/66 , G06F17/00
CPC分类号： H01L31/188 , H01L31/022466 , Y02E10/50
摘要： Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, sectioning, bonding, and various inspection and testing processes to form multiple complete, functional, and tested solar cell devices that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system provides inspection of solar cell devices at various levels of formation, while collecting and using metrology data to diagnose, tune, or improve production line processes during the manufacture of solar cell devices.
摘要翻译：本发明的实施例一般涉及使用适于在太阳能电池器件的形成中执行一个或多个工艺的处理模块来形成太阳能电池器件的系统。在一个实施例中，该系统适于通过接受大的未处理衬底并执行多次沉积，材料去除，清洁，切片，结合以及各种检查和测试过程来形成薄膜太阳能电池器件，以形成多个完整，功能和测试然后太阳能电池装置可以运送到最终用户以安装在期望的位置以发电。在一个实施例中，系统提供在各种形成水平的太阳能电池装置的检查，同时收集和使用计量数据来诊断，调整或改进在制造太阳能电池装置期间的生产线工艺。

7. 发明授权

US08071420B2 Edge film removal process for thin film solar cell applications 失效
标题翻译：薄膜太阳能电池应用的边缘膜去除工艺
公开(公告)号：US08071420B2
公开(公告)日：2011-12-06
申请号：US12637214
申请日：2009-12-14
申请人： Tzay-Fa Su , David Morishige , Todd Martin , Uday Mahajan
发明人： Tzay-Fa Su , David Morishige , Todd Martin , Uday Mahajan
IPC分类号： H01L21/268 , H01L31/18
CPC分类号： H01L31/18 , B23K26/361 , B23K26/364 , B23K26/40 , B23K2103/172 , B23K2103/50
摘要： The present invention provides a method and apparatus for edge film stack removal process for fabricating photovoltaic devices. In one embodiment, a method for manufacturing solar cell devices on a substrate includes providing a substrate into a chemical vapor deposition chamber, contacting a shadow frame disposed in the deposition chamber to a periphery region of the substrate, depositing a silicon-containing layer on the substrate through an aperture defined by the shadow frame, transferring the substrate to a physical vapor deposition chamber, depositing a transparent conductive layer on the silicon-containing layer, transferring the substrate to a laser edge removal tool, and laser scribing the layers formed on the periphery region of the substrate.
摘要翻译：本发明提供了一种用于制造光伏器件的边缘膜叠层去除工艺的方法和装置。在一个实施例中，在衬底上制造太阳能电池器件的方法包括将衬底提供到化学气相沉积室中，将设置在淀积室中的阴影框与衬底的周边区域接触，将含硅层沉积在衬底通过由阴影框架限定的孔，将衬底转移到物理气相沉积室，在含硅层上沉积透明导电层，将衬底转移到激光边缘去除工具，以及激光划刻形成在衬底的周边区域。

8. 发明申请

US20110008947A1 APPARATUS AND METHOD FOR PERFORMING MULTIFUNCTION LASER PROCESSES 审中-公开
标题翻译：用于执行多功能激光工艺的装置和方法
公开(公告)号：US20110008947A1
公开(公告)日：2011-01-13
申请号：US12817499
申请日：2010-06-17
申请人： KEVIN LAUGHTON CUNNINGHAM , Carl Treadwell , Tzay-Fa Su , Uday Mahajan , Sarin Sundar Jainnagar Kuppuswamy
发明人： KEVIN LAUGHTON CUNNINGHAM , Carl Treadwell , Tzay-Fa Su , Uday Mahajan , Sarin Sundar Jainnagar Kuppuswamy
IPC分类号： H01L21/78 , B23K26/00
CPC分类号： H01L31/18 , B23K26/0853 , B23K26/364 , B23K26/40 , B23K2103/172 , B23K2103/50
摘要： Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, bonding, testing, and sectioning processes to form one or more complete, functional, and tested solar cell devices in custom sizes and/or shapes that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system is adapted to form one or more BIPV panels in custom sizes and/or shapes from a single large substrate for shipment to an end user.
摘要翻译：本发明的实施例一般涉及使用适于在太阳能电池器件的形成中执行一个或多个工艺的处理模块来形成太阳能电池器件的系统。在一个实施例中，该系统适于通过接受大的未处理衬底并执行多次沉积，材料去除，清洁，结合，测试和切片过程来形成薄膜太阳能电池器件，以形成一个或多个完整的，功能性和测试的太阳能自定义尺寸和/或形状的单元设备，然后可以运送到最终用户以安装在期望的位置以发电。在一个实施例中，系统适于从单个大的基板形成用于装运到最终用户的定制尺寸和/或形状的一个或多个BIPV面板。

9. 发明申请

US20100068835A1 THIN FILM SCRIBE PROCESS 失效
标题翻译：薄膜筛选工艺
公开(公告)号：US20100068835A1
公开(公告)日：2010-03-18
申请号：US12212535
申请日：2008-09-17
申请人： Fang Mei , David Tanner , Tzay-Fa Su
发明人： Fang Mei , David Tanner , Tzay-Fa Su
IPC分类号： H01L21/66
CPC分类号： H01L31/0392 , H01L31/022425 , H01L31/03923 , H01L31/186 , Y02E10/541 , Y02P70/521
摘要： A method and apparatus for improving a thin film scribing procedure is presented. Embodiments of the invention include a method and apparatus for determining a scribe setting for removal of an absorber layer of a photovoltaic device that improves contact resistance between a back contact layer and a front contact layer of the device.
摘要翻译：提出了一种改善薄膜划线程序的方法和装置。本发明的实施例包括一种用于确定用于去除光电装置的吸收层的划线设置的方法和装置，其改善了设备背面接触层和前接触层之间的接触电阻。

10. 发明申请

US20120015471A1 MULTIPLE-PATH LASER EDGE DELETE PROCESS FOR THIN-FILM SOLAR MODULES 审中-公开
标题翻译：薄膜太阳能模块的多路激光边缘去除工艺
公开(公告)号：US20120015471A1
公开(公告)日：2012-01-19
申请号：US13181401
申请日：2011-07-12
申请人： LI-PING WANG , Tzay-Fa Su , Sarin Sundar Jainnagar Kuppuswamy , Ole Luckner
发明人： LI-PING WANG , Tzay-Fa Su , Sarin Sundar Jainnagar Kuppuswamy , Ole Luckner
IPC分类号： H01L31/18
CPC分类号： H01L31/18 , B23K26/0622 , B23K26/361 , B23K26/40 , B23K2101/38 , B23K2103/172 , B23K2103/50 , H01L31/046 , Y02E10/50
摘要： Embodiments of the present invention provide methods for edge film stack removal for use in fabricating photovoltaic devices. In one embodiment, the method includes providing a substrate having a film stack deposited thereon, the film stack comprising a transparent conductive layer, a silicon-containing layer, and a metal back contact layer, removing the metal back contact layer and the silicon-containing layer formed on a periphery region along a side of the substrate using an electromagnetic radiation delivered at a first energy level, and removing the transparent conductive layer formed on the periphery region along the side of the substrate using electromagnetic radiation delivered at a second energy level that is higher than the first energy level.
摘要翻译：本发明的实施例提供了用于制造光伏器件的边缘膜叠层去除方法。在一个实施例中，该方法包括提供其上沉积有薄膜堆叠的衬底，薄膜叠层包括透明导电层，含硅层和金属背接触层，去除金属背接触层和含硅层，其使用以第一能级递送的电磁辐射在沿着衬底的侧面的周边区域上形成;以及使用以第二能级传送的电磁辐射，沿着衬底的侧面移除形成在周边区域上的透明导电层，高于第一能级。

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