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1. 发明授权

US08864915B2 Cleaning methods for improved photovoltaic module efficiency 有权
标题翻译：提高光伏组件效率的清洁方法
公开(公告)号：US08864915B2
公开(公告)日：2014-10-21
申请号：US13197614
申请日：2011-08-03
申请人： Renhe Jia , Adam Brand , Liming Zhang , Dapeng Wang , Tzay-Fa Su , Vijay Parihar
发明人： Renhe Jia , Adam Brand , Liming Zhang , Dapeng Wang , Tzay-Fa Su , Vijay Parihar
IPC分类号： B08B3/00 , B08B3/12 , H01L31/18 , B23K26/16 , H01L31/0392 , B23K26/36 , B08B3/08
CPC分类号： B08B3/08 , B08B3/12 , B23K26/16 , B23K26/364 , H01L31/0392 , H01L31/18 , Y02E10/50
摘要： A method of processing a substrate having a transparent conductive oxide disposed thereon, including: exposing the substrate to a first cleaning solution comprising hydrogen peroxide and ammonium citrate; exposing the substrate to a second cleaning solution having a pH within a range from about 6 to about 7, the second cleaning solution different than the first cleaning solution; agitating the second cleaning solution; and depositing a silicon-containing film on the transparent conductive oxide.
摘要翻译：一种处理其上设置有透明导电氧化物的衬底的方法，包括：将衬底暴露于包含过氧化氢和柠檬酸铵的第一清洁溶液; 将所述基材暴露于pH在约6至约7的范围内的第二清洗溶液，所述第二清洗溶液不同于所述第一清洗溶液; 搅动第二清洗液; 以及在所述透明导电氧化物上沉积含硅膜。

2. 发明申请

US20110177648A1 METHOD OF MANUFACTURING THIN FILM SOLAR CELLS HAVING A HIGH CONVERSION EFFICIENCY 失效
标题翻译：制造具有高转换效率的薄膜太阳能电池的方法
公开(公告)号：US20110177648A1
公开(公告)日：2011-07-21
申请号：US12980132
申请日：2010-12-28
申请人： David Tanner , Hien-Minh Huu Le , Quancheng (Tommy) Gu , Shuran Sheng , Yong Kee Chae , Tzay-Fa (Jeff) Su , Dapeng Wang
发明人： David Tanner , Hien-Minh Huu Le , Quancheng (Tommy) Gu , Shuran Sheng , Yong Kee Chae , Tzay-Fa (Jeff) Su , Dapeng Wang
IPC分类号： H01L31/0352
CPC分类号： H01L31/022466 , H01L21/67236 , H01L21/67736 , H01L31/02168 , H01L31/03921 , H01L31/056 , H01L31/075 , H01L31/076 , H01L31/202 , Y02E10/52 , Y02E10/548 , Y02P70/521
摘要： A method and apparatus for forming solar cells is provided. In one embodiment, a photovoltaic device includes a antireflection coating layer disposed on a first surface of a substrate, a barrier layer disposed on a second surface of the substrate, a first transparent conductive oxide layer disposed on the barrier layer, a conductive contact layer disposed on the first transparent conductive oxide layer, a first p-i-n junction formed on the conductive contact layer, and a second transparent conductive oxide layer formed on the first p-i-n junction.
摘要翻译：提供一种用于形成太阳能电池的方法和装置。在一个实施例中，光伏器件包括设置在衬底的第一表面上的抗反射涂层，设置在衬底的第二表面上的阻挡层，设置在阻挡层上的第一透明导电氧化物层，设置在导电接触层在第一透明导电氧化物层上形成在导电接触层上的第一pin结，以及形成在第一pin结上的第二透明导电氧化物层。

3. 发明申请

US20070173060A1 Methods of forming electrically conductive plugs and method of forming resistance variable elements 有权
标题翻译：形成导电插塞的方法和形成电阻可变元件的方法
公开(公告)号：US20070173060A1
公开(公告)日：2007-07-26
申请号：US11728492
申请日：2007-03-26
申请人： Zhaoli Sun , Jun Liu , Dapeng Wang
发明人： Zhaoli Sun , Jun Liu , Dapeng Wang
IPC分类号： H01L21/44
CPC分类号： H01L21/76849 , H01L45/085 , H01L45/1233 , H01L45/1253 , H01L45/143 , H01L45/16
摘要： A method of forming an electrically conductive plug includes providing an opening within electrically insulative material over a node location on a substrate. An electrically conductive material is formed within the opening and elevationally over the insulative material. Some of the conductive material is removed effective to recess an outermost surface of the conductive material to from about 100 Angstroms to about 200 Angstroms from an outermost surface of the insulative material after said removing of some of the conductive material. After removing some of the conductive material, remaining volume of the opening over the conductive material is overfilled with an electrically conductive metal material different from that of the conductive material. The metal material is polished effective to form an electrically conductive plug within the opening comprising the conductive material and the metal material. Other aspects and implementations are contemplated.
摘要翻译：一种形成导电插塞的方法包括在电绝缘材料上提供在衬底上的节点位置上的开口。导电材料形成在开口内并且在绝缘材料的正上方形成。在去除一些导电材料之后，一些导电材料被去除有效地将导电材料的最外表面从绝缘材料的最外表面离开约100埃至约200埃。在去除一些导电材料之后，在导电材料上的开口的剩余容积用不同于导电材料的导电金属材料填满。金属材料被抛光有效以在包括导电材料和金属材料的开口内形成导电塞。考虑了其他方面和实现。

4. 发明授权

US06498101B1 Planarizing pads, planarizing machines and methods for making and using planarizing pads in mechanical and chemical-mechanical planarization of microelectronic device substrate assemblies 有权
标题翻译：用于制造和使用平面化焊盘的平面化焊盘，平面化机器以及在微电子器件衬底组件的机械和化学机械平面化中的方法
公开(公告)号：US06498101B1
公开(公告)日：2002-12-24
申请号：US09514578
申请日：2000-02-28
申请人： Dapeng Wang
发明人： Dapeng Wang
IPC分类号： H01L2100
CPC分类号： B24B37/11
摘要： Planarizing pads and methods for making or using planarizing pads to polish or planarize semiconductor wafers, field emission displays, or other microelectronic substrates and substrate assemblies. In one embodiment, the planarizing pad comprises a compressible body and a plurality of discrete contact elements. The compressible body can comprise a base having a backside facing a support surface of a table and a front side facing away from the support surface. The contact elements can comprise raised sections of a single layer or separate plates. The contact elements have a bottom surface attached to the front side of the base and a top surface configured to contact a microelectronic substrate facing away from the base. The compressible body has a first hardness and the contact elements have a second hardness greater than the first hardness, and/or the body has a first compressibility and the contact elements have a second compressibility less than the first compressibility. The compressible body can be a compressible foam (e.g., foamed polyurethane), and the contact elements can be a hard, rigid material (e.g., polycarbonate, resin, polyester or high density polyurethane). In operation, the contact elements can move independently from one another in a direction transverse to the substrate.
摘要翻译：平面化焊盘和制造或使用平坦化焊盘来抛光或平面化半导体晶片，场发射显示器或其它微电子基板和基板组件的平板化焊盘和方法。在一个实施例中，平坦化焊盘包括可压缩主体和多个离散接触元件。可压缩体可以包括具有面向桌子的支撑表面的背面和背离支撑表面的前侧的底座。接触元件可以包括单层的凸起部分或单独的板。接触元件具有附接到基座的前侧的底表面和被配置为接触面向远离基座的微电子基板的顶表面。可压缩体具有第一硬度，并且接触元件具有大于第一硬度的第二硬度，和/或主体具有第一可压缩性，并且接触元件具有小于第一可压缩性的第二压缩率。可压缩体可以是可压缩泡沫（例如发泡聚氨酯），并且接触元件可以是硬质刚性材料（例如聚碳酸酯，树脂，聚酯或高密度聚氨酯）。在操作中，接触元件可以在横向于衬底的方向上彼此独立地移动。

5. 发明申请

US20130112264A1 METHODS FOR FORMING A DOPED AMORPHOUS SILICON OXIDE LAYER FOR SOLAR CELL DEVICES 审中-公开
标题翻译：用于形成用于太阳能电池装置的掺杂的非晶硅氧化物层的方法
公开(公告)号：US20130112264A1
公开(公告)日：2013-05-09
申请号：US13291288
申请日：2011-11-08
申请人： Dapeng Wang , Yong Kee Chae
发明人： Dapeng Wang , Yong Kee Chae
IPC分类号： H01L31/0376 , H01L21/20
CPC分类号： H01L21/02532 , H01L21/02579 , H01L21/0262 , H01L31/03762 , H01L31/076 , H01L31/202 , Y02E10/548 , Y02P70/521
摘要： Embodiments of the present invention relate to methods for forming a doped amorphous silicon oxide layer utilized in thin film solar cells. In one embodiment, a method for forming a doped p-type amorphous silicon containing layer on a substrate includes providing a substrate in a processing chamber, supplying a gas mixture having a hydrogen-based gas, a silicon-based gas and a carbon and oxygen containing gas into the processing chamber, the gas mixture having a volumetric flow ratio of the hydrogen-based gas to the silicon-based gas between about 5 and about 15, wherein a volumetric flow ratio of the carbon and oxygen containing gas to the total combined flow of hydrogen-based gas and the silicon-based gas is between about 10 percent and about 50 percent; and maintaining a process pressure of the gas mixture within the processing chamber at between about 1 Torr and about 10 Torr while forming a doped p-type amorphous silicon containing layer.
摘要翻译：本发明的实施例涉及用于形成薄膜太阳能电池中使用的掺杂的非晶氧化硅层的方法。在一个实施例中，在衬底上形成掺杂的p型非晶硅层的方法包括在处理室中提供衬底，提供具有氢基气体，硅基气体和碳和氧的气体混合物所述气体混合物具有约5至约15的所述氢基气体与所述硅基气体的体积流量比，其中所述含碳和含氧气体的体积流量比与所述总体组合氢基气体和硅基气体的流动在约10％至约50％之间; 以及在处理室内的气体混合物的处理压力保持在约1托和约10托之间，同时形成掺杂的p型非晶硅含硅层。

6. 发明申请

US20110180122A1 FLOATING GRID MODULE DESIGN FOR THIN FILM SILICON SOLAR CELLS 审中-公开
标题翻译：薄膜太阳能电池浮动网格模块设计
公开(公告)号：US20110180122A1
公开(公告)日：2011-07-28
申请号：US12694113
申请日：2010-01-26
申请人： David Tanner , Hien-minh Huu Le , Tzay-fa Su , Dapeng Wang
发明人： David Tanner , Hien-minh Huu Le , Tzay-fa Su , Dapeng Wang
IPC分类号： H01L31/042 , H01L31/18
CPC分类号： H01L31/1884 , H01L31/02245 , H01L31/022466 , H01L31/075 , Y02E10/548
摘要： A photovoltaic device is provided. In one embodiment, a photovoltaic device includes a transparent conductive oxide (TCO) layer deposited over the substrate, and a plurality of electrical conductive paths disposed in electrical contact with the TCO layer, wherein the plurality of electrical conductive paths extend discontinuously across opposing sides of the substrate.
摘要翻译：提供光伏器件。在一个实施例中，光伏器件包括沉积在衬底上的透明导电氧化物（TCO）层，以及设置成与TCO层电接触的多个导电路径，其中多个导电路径不连续地延伸穿过衬底的相对侧底物。

7. 发明申请

US20110174362A1 MANUFACTURE OF THIN FILM SOLAR CELLS WITH HIGH CONVERSION EFFICIENCY 审中-公开
标题翻译：具有高转换效率的薄膜太阳能电池的制造
公开(公告)号：US20110174362A1
公开(公告)日：2011-07-21
申请号：US12980135
申请日：2010-12-28
申请人： David Tanner , Hien-Minh Huu Le , Quancheng (Tommy) Gu , Shuran Sheng , Yong Kee Chae , Tzay-Fa (Jeff) Su , Dapeng Wang
发明人： David Tanner , Hien-Minh Huu Le , Quancheng (Tommy) Gu , Shuran Sheng , Yong Kee Chae , Tzay-Fa (Jeff) Su , Dapeng Wang
IPC分类号： H01L31/0248 , H01L31/02
CPC分类号： H01L31/022466 , H01L21/67236 , H01L21/67736 , H01L31/02168 , H01L31/03921 , H01L31/056 , H01L31/075 , H01L31/076 , H01L31/202 , Y02E10/52 , Y02E10/548 , Y02P70/521
摘要： A method and apparatus for forming solar cells is provided. In one embodiment, a photovoltaic device includes a antireflection coating layer disposed on a first surface of a substrate, a barrier layer disposed on a second surface of the substrate, a first transparent conductive oxide layer disposed on the barrier layer, a conductive contact layer disposed on the first transparent conductive oxide layer, a first p-i-n junction formed on the conductive contact layer, and a second transparent conductive oxide layer formed on the first p-i-n junction.
摘要翻译：提供一种用于形成太阳能电池的方法和装置。在一个实施例中，光伏器件包括设置在衬底的第一表面上的抗反射涂层，设置在衬底的第二表面上的阻挡层，设置在阻挡层上的第一透明导电氧化物层，设置在导电接触层在第一透明导电氧化物层上形成在导电接触层上的第一pin结，以及形成在第一pin结上的第二透明导电氧化物层。

8. 发明申请

US20090287446A1 PHOTOVOLTAIC CELL REFERENCE MODULE FOR SOLAR TESTING 审中-公开
标题翻译：用于太阳能测试的光电池参考模块
公开(公告)号：US20090287446A1
公开(公告)日：2009-11-19
申请号：US12428195
申请日：2009-04-22
申请人： Dapeng Wang , Michel R. Frei , Tzay-Fa Su , David Tanner
发明人： Dapeng Wang , Michel R. Frei , Tzay-Fa Su , David Tanner
IPC分类号： G06F19/00 , H01L31/18 , G01R31/00
CPC分类号： H01L31/042 , H01L31/02167 , H01L31/048 , H02S50/10 , Y02E10/50
摘要： The present invention generally includes an apparatus and method of forming a reference module device that is able to deliver a repeatable and desirable amount of power that does not degrade or change over time. The reference module can be used to help test and calibrate various testing equipment used in the production of a photovoltaic device that may be formed in a solar cell fab. The solar cell fab is generally an arrangement of processing modules and automation equipment that is used to form solar cell devices.
摘要翻译：本发明通常包括一种形成参考模块装置的装置和方法，所述装置和方法能够递送不会劣化或随时间改变的可重复且期望的功率量。参考模块可用于帮助测试和校准在太阳能电池制造中可能形成的光伏器件生产中使用的各种测试设备。太阳能电池制造厂通常是用于形成太阳能电池装置的处理模块和自动化设备的布置。

9. 发明申请

US20090256581A1 SOLAR PARAMETRIC TESTING MODULE AND PROCESSES 失效
标题翻译：太阳能参数测试模块和过程
公开(公告)号：US20090256581A1
公开(公告)日：2009-10-15
申请号：US12409732
申请日：2009-03-24
申请人： Danny Cam Toan Lu , Michael Marriott , Vicky Svidenko , Dapeng Wang , Michel R. Frei
发明人： Danny Cam Toan Lu , Michael Marriott , Vicky Svidenko , Dapeng Wang , Michel R. Frei
IPC分类号： G01R27/08 , B65G47/00 , H01L21/683
CPC分类号： H01L21/681 , H01L21/67253 , H02S50/10
摘要： Embodiments of the present invention generally relate to a module that can test and analyze various regions of a solar cell device in an automated or manual fashion after one or more steps have been completed in the solar cell formation process. The module used to perform the automated testing and analysis processes can also be adapted to test a partially formed solar cell at various stages of the solar cell formation process within an automated solar cell production line. The automated solar cell production line is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices.
摘要翻译：本发明的实施例一般涉及一种可以在太阳能电池形成过程中完成一个或多个步骤之后以自动或手动方式测试和分析太阳能电池装置的各个区域的模块。用于执行自动化测试和分析过程的模块还可以适用于在自动太阳能电池生产线内的太阳能电池形成过程的各个阶段测试部分形成的太阳能电池。自动化太阳能电池生产线通常是用于形成太阳能电池器件的自动化处理模块和自动化设备的布置。

10. 发明授权

US07568970B2 Chemical mechanical polishing pads 失效
标题翻译：化学机械抛光垫
公开(公告)号：US07568970B2
公开(公告)日：2009-08-04
申请号：US11447741
申请日：2006-06-05
申请人： Dapeng Wang
发明人： Dapeng Wang
IPC分类号： B24B7/22
CPC分类号： B24B37/22 , B24B37/24 , B24B37/26 , H01L21/30625
摘要： The present invention provides a deformable pad useful for chemical mechanical polishing (“CMP”), a CMP apparatus incorporating the deformable pad of the present invention, and methods for using the deformable pad and CMP apparatus of the present invention. The deformable pad of the present invention includes a plurality of solid supports which substantially eliminate the nonuniform polishing rates in known CMP processes and may be tailored to optimize a wide array of CMP processes. The CMP apparatus of the present invention incorporates a deformable pad of the present invention and may include several other known features, such as a polishing pad, a substrate carrier, mechanical assemblies for agitating the polishing pad or substrate carrier, etc. The methods falling within the scope of the present invention include providing a CMP polishing apparatus, providing a deformable pad of the present invention, providing a polishing pad attached to the deformable pad of the present invention, and bringing a substrate having a material layer to be polished in contact with the polishing pad. As will be appreciated by one of skill in the art, the CMP apparatus and the methods of the present invention may be easily adapted for use in virtually all CMP processes.
摘要翻译：本发明提供了一种可用于化学机械抛光（“CMP”）的可变形焊盘，包括本发明的可变形焊盘的CMP装置，以及使用本发明的可变形焊盘和CMP装置的方法。本发明的可变形焊盘包括多个固体支撑件，其基本上消除了已知CMP工艺中的不均匀抛光速率，并且可以被调整以优化广泛的CMP工艺阵列。本发明的CMP装置包括本发明的可变形焊盘，并且可以包括几个其他已知的特征，例如抛光垫，衬底载体，用于搅动抛光垫或衬底载体的机械组件等。本发明的范围包括提供CMP抛光装置，提供本发明的可变形焊盘，提供附接到本发明的可变形焊盘的抛光垫，以及将具有待抛光材料层的基板与抛光垫。如本领域技术人员将理解的，CMP装置和本发明的方法可以容易地适用于几乎所有CMP工艺中。

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