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    • 6. 发明授权
    • Template type cavity-formation device for low temperature cofired
ceramic (LTCC) sheets
    • 用于低温共烧陶瓷(LTCC)片材的模板型腔形成装置
    • US5855803A
    • 1999-01-05
    • US752111
    • 1996-11-20
    • Alex BaileyRonnie StarlingJohn ChinoTapan Gupta
    • Alex BaileyRonnie StarlingJohn ChinoTapan Gupta
    • B28B11/12H01L21/48H05K3/00C23F1/00B32B31/00
    • B28B11/12H01L21/4807H05K3/0014H05K3/0044Y10T156/1056Y10T156/1062
    • A cavity pattern for a laminated structure such as a substrate for integrated circuitry is formed in a sheet of unfired low temperature cofired ceramic (LTCC) material also known as "green" tape. One sheet at a time is placed in a flexible ram forming die including a resilient rubber pressure pad and a template including the pattern to be formed in the sheet. A pair of outer pressure plates hold the pressure pad and template in place. When a sheet of unfired LTCC material is placed between the pressure pad and template and pressurization is applied to the outer plates, extrusion of the rubber material through the template causes the tape to be sheared off at the edges of the holes in the template, thus effectively cutting the required pattern in the sheet. Following pressurization, the sheet now with the pattern cut therein is removed from the die and the residual tape cut-outs are subsequently removed from the template by a vacuum.
    • 用于层叠结构的空腔图案,例如用于集成电路的基板,形成在未烧制的低温共烧陶瓷(LTCC)材料片材中,也称为“绿色”带。 一次一片地放置在包括弹性橡胶压力垫的柔性冲头成型模具和包含要在板材中形成的图案的模板上。 一对外压板将压力垫和模板固定在适当位置。 当将一片未烧的LTCC材料放置在压垫和模板之间,并且对外板施加加压时,橡胶材料通过模板的挤出使得带在模板中的孔的边缘处被剪切,因此 有效地切割片材中所需的图案。 在加压之后,现在将其中切割的图案从模具中取出,然后通过真空从模板中除去残留的带切口。