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    • 10. 发明授权
    • Large area transducer array
    • 大面积换能器阵列
    • US07375420B2
    • 2008-05-20
    • US11003054
    • 2004-12-03
    • Rayette Ann FisherWilliam Edward Burdick, Jr.James Wilson Rose
    • Rayette Ann FisherWilliam Edward Burdick, Jr.James Wilson Rose
    • H01L23/02
    • H01L27/14601
    • A large area transducer array comprising a substrate having a front side and a backside, a plurality of transducers disposed on the front side of the substrate and patterned in the form of a two-dimensional transducer array in the X-Y plane, a plurality of connectors disposed on the backside of the substrate where the connectors are electrically coupled to the transducer elements. Further, a stacked transducer array comprising an electronic device disposed in a first layer, a substrate including a front side and a backside, an electrical interconnect layer disposed on the substrate and a plurality of transducers disposed in a third layer where the transducers are electrically coupled to the electronic device disposed in the first layer.
    • 一种大面积传感器阵列,包括具有正面和背面的基底,多个换能器,设置在基板的前侧,并以XY平面中的二维换能器阵列的形式图案化,多个连接器被设置 在衬底的背面,其中连接器电耦合到换能器元件。 此外,堆叠的换能器阵列包括设置在第一层中的电子器件,包括正面和背面的衬底,设置在衬底上的电互连层和设置在第三层中的多个换能器,其中换能器电耦合 到设置在第一层中的电子设备。