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    • 4. 发明申请
    • Compact deduster with cyclonic air recycling
    • 紧凑型除尘器,配有气旋回收空气
    • US20070272598A1
    • 2007-11-29
    • US11441312
    • 2006-05-25
    • Heinz SchneiderPaul Wagner
    • Heinz SchneiderPaul Wagner
    • B04B5/10B03B7/00B07B15/00B07B9/00
    • B01D50/002B07B4/02
    • A recycling mechanism is provided for use with a compact dedusting apparatus to clean the contaminate-laden air discharged from the dedusting apparatus for subsequent re-use by the dedusting apparatus. The recycling mechanism provides a closed loop air containment system that retains the air within the apparatus without providing discharge to the atmosphere. The recycling mechanism includes a cyclonic separator that removes most of the dust and contaminates from the air discharged from the deduster. The air discharged from the cyclonic separator is passed to an inline high efficiency synthetic cartridge filter for final cleaning before being passed back into the fan that drives cleansing air through the deduster. The contaminant material removed by the cyclonic separator is collected by an air tight dust collection container installed at the cyclone outlet for subsequent removal from the system.
    • 提供了一种与紧凑型除尘装置一起使用的循环机构,用于清洁从除尘装置排出的污染物的空气,以便随后由除尘装置重新使用。 回收机构提供闭环空气容纳系统,其将空气保持在设备内,而不向大气提供排放。 回收机构包括旋风分离器,其从除尘器排出的空气中除去大部分灰尘和污染物。 从旋风分离器排出的空气通过到一个高效率的合成滤芯过滤器,以便最终清洁,然后再返回通过除尘器驱动清洁空气的风扇。 由旋风分离器除去的污染物质被安装在旋风出口处的气密灰尘收集容器收集,以便随后从系统中取出。
    • 6. 发明授权
    • Loading and unloading station for semiconductor processing installations
    • 半导体加工设备的装卸站
    • US06609876B2
    • 2003-08-26
    • US10012142
    • 2001-11-13
    • Andreas MagesWerner SchelerHerbert BlaschitzAlfred SchulzHeinz Schneider
    • Andreas MagesWerner SchelerHerbert BlaschitzAlfred SchulzHeinz Schneider
    • B65G4907
    • H01L21/67775H01L21/67769H01L21/67772Y10S414/137Y10S414/138Y10S414/139Y10S414/14
    • In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from containers under clean room conditions. These transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and transporting container are opened simultaneously in that the container cover and the closure are moved down jointy into the semiconductor processing installation. The loading and unloading is carried out in that a manipulating device which is arranged in the semiconductor processing installation engages through the charging opening into the transporting container. The invention is applicable in the manufacturing of integrated circuits.
    • 在半导体加工装置的装载和卸载站中,本发明的目的是确保在洁净室条件下从容器进行充电。 这些运输容器在洁净室条件下。 这些运输容器本身用作盘形物体的杂志并且横向敞开。 还可以任选地加载和卸载更多量的这种运输容器,其中运输容器的更换必须在有利的人体工程学条件下进行。 根据本发明,用于装载,卸载和重新装载盘形物体的运输容器通过使用粘合接合的具有封闭件的容器盖以固定的方式联接。 充电开口和运输容器同时打开,因为容器盖和封闭件被连接地移入半导体处理装置中。 装载和卸载是通过布置在半导体加工装置中的操纵装置通过装填开口接合到输送容器中而实现的。 本发明可应用于集成电路的制造。
    • 10. 发明授权
    • Water-cooled high-temperature slide valve, especially hot blast slide
valve
    • 水冷高温滑阀,特别是热风滑阀
    • US3941186A
    • 1976-03-02
    • US474432
    • 1974-05-29
    • Heinz Schneider
    • Heinz Schneider
    • F16K49/00F28F19/00
    • F16K49/007Y10T137/6579
    • The present invention relates to a water-cooled high-temperature slide valve, especially hot blast slide valve, including within the housing thereof annular passages for the coolant (water) and extending from the upper portion of the slide valve along the sealing bars on both peripheral sides to the lower portion of the housing and opening into at least one cooling passage through transfer ports provided in this position, which cooling passage extends back around the portion of said housing arranged about the slide valve plate to the upper portion of said housing in which the coolant outlet is situated, wherein the cross-sectional flow area of said cooling passage within which the coolant is returned, at least in its lower portion extending over an arc of 180.degree., is smaller than, and at most as great as, the overall cross-sectional flow area of said annular passages.
    • 本发明涉及一种水冷式高温滑阀,特别是热风滑阀,其包括在其壳体内的用于冷却剂(水)的环形通道,并且沿着密封条从滑阀的上部延伸 外围侧面到壳体的下部,并且通过设置在该位置的传送口而打开至少一个冷却通道,该冷却通道围绕围绕滑阀板布置的壳体的部分延伸回到所述壳体的上部 所述冷却剂出口位于所述冷却剂出口处,其中所述冷却通道的横截面流动区域至少在其180度的弧度下延伸至少180度的弧度, 所述环形通道的整个横截面流动面积。