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    • 4. 发明授权
    • High-throughput thin-film fabrication vacuum flange
    • 高通量薄膜制造真空法兰
    • US07084445B2
    • 2006-08-01
    • US10489922
    • 2002-10-11
    • Ichiro TakeuchiRussell W. WoodRatnakar D. Vispute
    • Ichiro TakeuchiRussell W. WoodRatnakar D. Vispute
    • H01L29/76
    • C23C14/042C23C14/027C23C14/28
    • A mechanism and methodology is provided for performing high-throughput thin-film experimentation with the use and integration of a heater. A single flange assembly contains an automated two-dimensional shutter system (which provides variable masking schemes for spatially selective shadow deposition) and a rotatable (indexed) chip/wafer/substrate heater. The automated two-dimensional shutter system comprises two shutter plate mounts that move in two perpendicular (x and y) directions, so that mounted shutters overlap with each other in certain regions. The substrate heater can be used in the gradient temperature mode or uniform temperature mode. The shutter plates and the heater plate are detachable and exchangeable from experiment to experiment in order to minimize cross contamination of materials.
    • 提供了一种用于通过加热器的使用和集成进行高通量薄膜实验的机制和方法。 单个法兰组件包含自动二维快门系统(其提供用于空间选择性阴影沉积的可变掩蔽方案)和可旋转(索引)芯片/晶片/基板加热器。 自动二维快门系统包括两个在两个垂直(x和y)方向上移动的快门板安装件,使得安装的百叶窗在某些区域彼此重叠。 基板加热器可用于梯度温度模式或均匀温度模式。 挡板和加热板是可拆卸的,可从实验到实验交换,以尽量减少材料的交叉污染。