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1. 发明授权

US06384615B1 Probe holder for low current measurements 有权
公开(公告)号：US06384615B1
公开(公告)日：2002-05-07
申请号：US09815182
申请日：2001-03-22
申请人： Randy Schwindt
发明人： Randy Schwindt
IPC分类号： G01R106
摘要： A system for low-current testing of a test device includes a probing device for probing a probing site on the test device. The probing device includes a dielectric substrate having first and second sides, an elongate conductive path on the first side of the substrate, an elongate probing element connected to the elongate conductive path so as to extend in a cantilevered manner beyond the substrate, and a conductive area on the second side of the substrate. The probe housing is matingly detachably engageable with the probing device.

2. 发明授权

US06232789B1 Probe holder for low current measurements 失效
标题翻译：用于低电流测量的探头支架
公开(公告)号：US06232789B1
公开(公告)日：2001-05-15
申请号：US08864287
申请日：1997-05-28
申请人： Randy Schwindt
发明人： Randy Schwindt
IPC分类号： G01R106
CPC分类号： G01R1/067 , B82Y35/00 , G01R1/06705 , G01R1/06772 , G01R1/07342 , G01R1/18 , G01R19/0023 , G01R35/00 , H01R11/18
摘要： A system for low-current testing of a test device includes a probing device for probing a probing site on the test device. The probing device includes a dielectric substrate having first and second sides, an elongate conductive path on the first side of the substrate, an elongate probing element connected to one end of the elongate conductive path so as to extend in a cantilevered manner beyond the substrate, and a conductive area on the second side of the substrate. The probe housing is matingly detachably engageable with the probing device. The probe housing is engaged with both a force cable that includes a force conductor surrounded by a guard conductor and a sense cable that includes a sense conductor surrounded by a guard conductor. A first coupler electrically interconnects the force conductor, the sense conductor, and the elongate conductive path on the first side of the substrate when the probing device is engaged with the probe housing. A second coupler electrically interconnects the guard conductor of the force and sense cables and the conductive area on the second side of the substrate when the probing device is engaged with the probe housing.
摘要翻译：用于测试设备的低电流测试的系统包括用于探测测试设备上的探测位置的探测设备。探测装置包括具有第一和第二侧面的电介质基底，在基底的第一侧上的细长导电路径，连接到细长导电路径的一端以便以悬臂方式延伸超过基底的细长探测元件，以及在所述基板的第二侧上的导电区域。探头外壳可与探测装置配合地可拆卸地接合。探针壳体与包括由保护导体围绕的力导体的力电缆和包括由保护导体包围的感测导体的感测电缆两者接合。当探测装置与探针壳体接合时，第一耦合器将力导体，感测导体和衬底的第一侧上的细长导电路径电连接。当探测装置与探针壳体接合时，第二耦合器将力和感测电缆的保护导体与衬底的第二侧上的导电区域电互连。

3. 发明授权

US07504842B2 Probe holder for testing of a test device 有权
公开(公告)号：US07504842B2
公开(公告)日：2009-03-17
申请号：US11786633
申请日：2007-04-11
申请人： Randy Schwindt
发明人： Randy Schwindt
IPC分类号： G01R1/06
CPC分类号： G01R1/067 , B82Y35/00 , G01R1/06705 , G01R1/06772 , G01R1/07342 , G01R1/18 , G01R19/0023 , G01R35/00 , H01R11/18
摘要： A system for low-current testing of a test device includes a probing device for probing a probing site on the test device. The probing device includes a dielectric substrate having first and second sides, an elongate conductive path on the first side of the substrate, an elongate probing element connected to the elongate conductive path so as to extend in a cantilevered manner beyond the substrate, and a conductive area on the second side of the substrate. The probe housing is matingly detachably engageable with the probing device.

4. 发明授权

US07221174B2 Probe holder for testing of a test device 有权
公开(公告)号：US07221174B2
公开(公告)日：2007-05-22
申请号：US11406737
申请日：2006-04-18
申请人： Randy Schwindt
发明人： Randy Schwindt
IPC分类号： G01R31/06
CPC分类号： G01R1/067 , B82Y35/00 , G01R1/06705 , G01R1/06772 , G01R1/07342 , G01R1/18 , G01R19/0023 , G01R35/00 , H01R11/18
摘要： A system for low-current testing of a test device includes a probing device for probing a probing site on the test device. The probing device includes a dielectric substrate having first and second sides, an elongate conductive path on the first side of the substrate, an elongate probing element connected to the elongate conductive path so as to extend in a cantilevered manner beyond the substrate, and a conductive area on the second side of the substrate. The probe housing is matingly detachably engageable with the probing device.

5. 发明申请

US20050035777A1 Probe holder for testing of a test device 失效
公开(公告)号：US20050035777A1
公开(公告)日：2005-02-17
申请号：US10954496
申请日：2004-09-29
申请人： Randy Schwindt
发明人： Randy Schwindt
IPC分类号： G01R1/073 , G01R1/067 , G01R19/00 , G01R31/28 , G01R35/00 , H01L21/66 , H01R11/18 , G01R31/02
CPC分类号： G01R1/067 , B82Y35/00 , G01R1/06705 , G01R1/06772 , G01R1/07342 , G01R1/18 , G01R19/0023 , G01R35/00 , H01R11/18
摘要： A system for low-current testing of a test device includes a probing device for probing a probing site on the test device. The probing device includes a dielectric substrate having first and second sides, an elongate conductive path on the first side of the substrate, an elongate probing element connected to the elongate conductive path so as to extend in a cantilevered manner beyond the substrate, and a conductive area on the second side of the substrate. The probe housing is matingly detachably engageable with the probing device.

6. 发明申请

US20070194803A1 Probe holder for testing of a test device 有权
标题翻译：用于测试测试设备的探头支架
公开(公告)号：US20070194803A1
公开(公告)日：2007-08-23
申请号：US11786633
申请日：2007-04-11
申请人： Randy Schwindt
发明人： Randy Schwindt
IPC分类号： G01R31/02 , G01R1/067
CPC分类号： G01R1/067 , B82Y35/00 , G01R1/06705 , G01R1/06772 , G01R1/07342 , G01R1/18 , G01R19/0023 , G01R35/00 , H01R11/18
摘要： A system for low-current testing of a test device includes a probing device for probing a probing site on the test device. The probing device includes a dielectric substrate having first and second sides, an elongate conductive path on the first side of the substrate, an elongate probing element connected to the elongate conductive path so as to extend in a cantilevered manner beyond the substrate, and a conductive area on the second side of the substrate. The probe housing is matingly detachably engageable with the probing device.
摘要翻译：用于测试设备的低电流测试的系统包括用于探测测试设备上的探测位置的探测设备。探测装置包括具有第一和第二侧面的电介质基底，在基底的第一侧上的细长导电路径，连接到细长导电路径的细长探测元件，以便以悬臂方式延伸超过基底，并且导电在基板的第二面上的区域。探头外壳可与探测装置配合地可拆卸地接合。

7. 发明申请

US20060202708A1 Low-current probe card 审中-公开
公开(公告)号：US20060202708A1
公开(公告)日：2006-09-14
申请号：US11432245
申请日：2006-05-11
申请人： Randy Schwindt
发明人： Randy Schwindt
IPC分类号： G01R31/02
CPC分类号： G01R31/08 , G01R1/06 , G01R1/07342 , G01R1/07371 , G01R1/18 , G01R31/06 , G01R31/2822
摘要： A low-current probe card for measuring currents down to the femtoamp region includes a dielectric board, such as of glass-epoxy material, forming an opening. A plurality of probing devices, such as ceramic blades, are edge-mounted about the opening so that the probing elements or needles included thereon terminate below the opening in a pattern suitable for probing a test device. A plurality of cables are attached to the card for respectively connecting each device to a corresponding channel of a test instrument. The on-board portion of each cable is of coaxial type and includes an inner layer between the inner dielectric and outer conductor for suppressing the triboelectric effect. An inner conductive area and a conductive backplane that are respectively located below and on one side of each device are set to guard potential via the outer conductor of the corresponding cable so as to guard the signal path on the other side of the device. The lead-in portion of each cable, which is detachably connected to the corresponding on-board portion through a plug-in type connector, is of triaxial type and includes, besides the inner layer between the inner dielectric and outer conductor, a second inner dielectric and second outer conductor. A conductive cover and an outer conductive area that substantially enclose the components on the card are set to shield potential via the second outer conductor and connector.

8. 发明申请

US20050184744A1 Wafer probe station having a skirting component 失效
标题翻译：具有踢脚线组件的晶圆探针台
公开(公告)号：US20050184744A1
公开(公告)日：2005-08-25
申请号：US11056647
申请日：2005-02-11
申请人： Randy Schwindt , Warren Harwood , Paul Tervo , Kenneth Smith , Richard Warner
发明人： Randy Schwindt , Warren Harwood , Paul Tervo , Kenneth Smith , Richard Warner
IPC分类号： H01L21/66 , A46D1/00 , G01R1/067 , G01R1/073 , G01R31/02 , G01R31/28 , H01L21/687
CPC分类号： G01R31/2886 , A46D1/00 , G01R1/0416 , G01R1/06705 , G01R1/06794 , G01R1/07392 , G01R1/18 , G01R31/2887 , H01L21/68785
摘要： A probe station includes a fully guarded chuck assembly and connector mechanism for increasing sensitivity to low-level currents while reducing settling times. The chuck assembly includes a wafer-supporting first chuck element surrounded by a second chuck element having a lower component, skirting component and upper component each with a surface portion extending opposite the first element for guarding thereof. The connector mechanism is so connected to the second chuck element as to enable, during low-level current measurements, the potential on each component to follow that on the first chuck element as measured relative to an outer shielding enclosure surrounding each element. Leakage current from the first chuck element is thus reduced to virtually zero, hence enabling increased current sensitivity, and the reduced capacitance thus provided by the second chuck element decreases charging periods, hence reducing settling times. With similar operation and effect, where any signal line element of the connector mechanism is arranged exterior of its corresponding guard line element, such as adjacent the chuck assembly or on the probe-holding assembly, a guard enclosure is provided to surround and fully guard such signal line element in interposed relationship between that element and the outer shielding enclosure.
摘要翻译：探测台包括一个完全防护的卡盘组件和连接器机构，用于在降低沉降时间的同时提高对低电平电流的灵敏度。卡盘组件包括由第二卡盘元件围绕的晶片支撑的第一卡盘元件，所述第二卡盘元件具有下部元件，裙边元件和上部元件，每个元件具有与第一元件相对延伸的表面部分，用于保护其。连接器机构被连接到第二卡盘元件，以便在低电平电流测量期间，每个部件上的电位能够相对于围绕每个元件的外部屏蔽外壳测量到第一卡盘元件上的电位。因此，来自第一卡盘元件的泄漏电流几乎为零，因此能够提高电流灵敏度，并且由第二卡盘元件提供的减小的电容减少了充电周期，因此降低了稳定时间。具有类似的操作和效果，其中连接器机构的任何信号线元件布置在其对应的保护线元件的外部，例如邻近卡盘组件或探针保持组件，提供保护外壳以围绕并完全保护信号线元件在该元件和外屏蔽外壳之间的插入关系中。

9. 发明授权

US06850082B2 Probe holder for testing of a test device 有权
标题翻译：用于测试测试设备的探头支架
公开(公告)号：US06850082B2
公开(公告)日：2005-02-01
申请号：US10278313
申请日：2002-10-22
申请人： Randy Schwindt
发明人： Randy Schwindt
IPC分类号： G01R1/073 , G01R1/067 , G01R19/00 , G01R31/28 , G01R35/00 , H01L21/66 , H01R11/18 , G01R31/06
CPC分类号： G01R1/067 , B82Y35/00 , G01R1/06705 , G01R1/06772 , G01R1/07342 , G01R1/18 , G01R19/0023 , G01R35/00 , H01R11/18
摘要： A system for low-current testing of a test device includes a probing device for probing a probing site on the test device. The probing device includes a dielectric substrate having first and second sides, an elongate conductive path on the first side of the substrate, an elongate probing element connected to the elongate conductive path so as to extend in a cantilevered manner beyond the substrate, and a conductive area on the second side of the substrate. The probe housing is matingly detachably engageable with the probing device.
摘要翻译：用于测试设备的低电流测试的系统包括用于探测测试设备上的探测位置的探测设备。探测装置包括具有第一和第二侧面的电介质基底，在基底的第一侧上的细长导电路径，连接到细长导电路径的细长探测元件，以便以悬臂方式延伸超过基底，并且导电在基板的第二面上的区域。探头外壳可与探测装置配合地可拆卸地接合。

10. 发明申请

US20070290700A1 Wafer probe station having a skirting component 失效
标题翻译：具有踢脚线组件的晶圆探针台
公开(公告)号：US20070290700A1
公开(公告)日：2007-12-20
申请号：US11881571
申请日：2007-07-27
申请人： Randy Schwindt , Warren Harwood , Paul Tervo , Kenneth Smith , Richard Warner
发明人： Randy Schwindt , Warren Harwood , Paul Tervo , Kenneth Smith , Richard Warner
IPC分类号： G01R1/067 , H05K9/00
CPC分类号： G01R31/2886 , A46D1/00 , G01R1/0416 , G01R1/06705 , G01R1/06794 , G01R1/07392 , G01R1/18 , G01R31/2887 , H01L21/68785
摘要： A probe station includes a fully guarded chuck assembly and connector mechanism for increasing sensitivity to low-level currents while reducing settling times. The chuck assembly includes a wafer-supporting first chuck element surrounded by a second chuck element having a lower component, skirting component and upper component each with a surface portion extending opposite the first element for guarding thereof. The connector mechanism is so connected to the second chuck element as to enable, during low-level current measurements, the potential on each component to follow that on the first chuck element as measured relative to an outer shielding enclosure surrounding each element. Leakage current from the first chuck element is thus reduced to virtually zero, hence enabling increased current sensitivity, and the reduced capacitance thus provided by the second chuck element decreases charging periods, hence reducing settling times. With similar operation and effect, where any signal line element of the connector mechanism is arranged exterior of its corresponding guard line element, such as adjacent the chuck assembly or on the probe-holding assembly, a guard enclosure is provided to surround and fully guard such signal line element in interposed relationship between that element and the outer shielding enclosure.
摘要翻译：探测台包括一个完全防护的卡盘组件和连接器机构，用于在降低沉降时间的同时提高对低电平电流的灵敏度。卡盘组件包括由第二卡盘元件围绕的晶片支撑的第一卡盘元件，所述第二卡盘元件具有下部元件，裙边元件和上部元件，每个元件具有与第一元件相对延伸的表面部分，用于保护其。连接器机构被连接到第二卡盘元件，以便在低电平电流测量期间，每个部件上的电位能够相对于围绕每个元件的外部屏蔽外壳测量的跟随第一卡盘元件上的电位。因此，来自第一卡盘元件的泄漏电流几乎为零，因此能够提高电流灵敏度，并且由第二卡盘元件提供的减小的电容减少了充电周期，因此降低了稳定时间。具有类似的操作和效果，其中连接器机构的任何信号线元件布置在其对应的保护线元件的外部，例如邻近卡盘组件或探针保持组件，防护罩被设置成围绕并完全保护信号线元件在该元件和外屏蔽外壳之间的插入关系中。

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