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    • 1. 发明申请
    • METHOD FOR DECHUCKING A SUBSTRATE
    • 用于去除衬底的方法
    • US20070062454A1
    • 2007-03-22
    • US11555981
    • 2006-11-02
    • QUANYUAN SHANGWilliam HarshbargerRobert GreeneIchiro Shimizu
    • QUANYUAN SHANGWilliam HarshbargerRobert GreeneIchiro Shimizu
    • C23F1/00C23C16/00
    • H01L21/68742C23C16/458
    • A substrate support assembly and method for dechucking a substrate is provided. In one embodiment, a support assembly includes a substrate support having a support surface, a first set of lift pins and one or more other lift pins movably disposed through the substrate support. The first set of lift pins and the one or more lift pins project from the support surface when the pins are in an actuated position. When in the actuated position, the first set of lift pins project a longer distance from the support surface than the one or more other lift pins. In another aspect of the invention, a method for dechucking a substrate from a substrate support is provided. In one embodiment, the method includes the steps of projecting a first set of lift pins a first distance above a surface of a substrate support, and projecting a second set of lift pins a second distance above the surface of the substrate support that is less than the first distance.
    • 提供了一种用于对基板进行脱扣的基板支撑组件和方法。 在一个实施例中,支撑组件包括具有支撑表面的基板支撑件,第一组提升销和可移动地设置穿过基板支撑件的一个或多个其他提升销。 当销处于致动位置时,第一组提升销和一个或多个提升销从支撑表面突出。 当处于致动位置时,第一组提升销与支撑表面比一个或多个其他提升销突出较长的距离。 在本发明的另一方面,提供了一种用于从基板支撑件去除基板的方法。 在一个实施例中,该方法包括以下步骤:将第一组提升销投影在衬底支撑件的表面之上的第一距离处,并且将第二组提升销投影在衬底支撑件的表面上方的第二距离处,该第二组提升销小于 第一个距离。
    • 2. 发明授权
    • Method and apparatus for dechucking a substrate
    • 剥离基板的方法和装置
    • US06676761B2
    • 2004-01-13
    • US10308385
    • 2002-12-02
    • Quanyuan ShangWilliam R. HarshbargerRobert L. GreeneIchiro Shimizu
    • Quanyuan ShangWilliam R. HarshbargerRobert L. GreeneIchiro Shimizu
    • H01L2100
    • H01L21/68742C23C16/458
    • A substrate support assembly and method for dechucking a substrate is provided. In one embodiment, a support assembly includes a substrate support having a support surface, a first set of lift pins and one or more other lift pins movably disposed through the substrate support. The first set of lift pins and the one or more lift pins project from the support surface when the pins are in an actuated position. When in the actuated position, the first set of lift pins project a longer distance from the support surface than the one or more other lift pins. In another aspect of the invention, a method for dechucking a substrate from a substrate support is provided. In one embodiment, the method includes the steps of projecting a first set of lift pins a first distance above a surface of a substrate support, and projecting a second set of lift pins a second distance above the surface of the substrate support that is less than the first distance.
    • 提供了一种用于对基板进行脱扣的基板支撑组件和方法。 在一个实施例中,支撑组件包括具有支撑表面的基板支撑件,第一组提升销和可移动地设置穿过基板支撑件的一个或多个其他提升销。 当销处于致动位置时,第一组提升销和一个或多个提升销从支撑表面突出。 当处于致动位置时,第一组提升销与支撑表面比一个或多个其他提升销突出较长的距离。 在本发明的另一方面,提供了一种用于从基板支撑件去除基板的方法。 在一个实施例中,该方法包括以下步骤:将第一组提升销投影在衬底支撑件的表面之上的第一距离处,并且将第二组提升销投影在衬底支撑件的表面上方的第二距离处,该第二组提升销小于 第一个距离。
    • 3. 发明授权
    • Method for dechucking a substrate
    • 剥离基材的方法
    • US07160392B2
    • 2007-01-09
    • US10688384
    • 2003-10-17
    • Quanyuan ShangWilliam R. HarshbargerRobert L. GreeneIchiro Shimizu
    • Quanyuan ShangWilliam R. HarshbargerRobert L. GreeneIchiro Shimizu
    • H01L21/027C23C16/00
    • H01L21/68742C23C16/458
    • A substrate support assembly and method for dechucking a substrate is provided. In one embodiment, a support assembly includes a substrate support having a support surface, a first set of lift pins and one or more other lift pins movably disposed through the substrate support. The first set of lift pins and the one or more lift pins project from the support surface when the pins are in an actuated position. When in the actuated position, the first set of lift pins project a longer distance from the support surface than the one or more other lift pins. In another aspect of the invention, a method for dechucking a substrate from a substrate support is provided. In one embodiment, the method includes the steps of projecting a first set of lift pins a first distance above a surface of a substrate support, and projecting a second set of lift pins a second distance above the surface of the substrate support that is less than the first distance.
    • 提供了一种用于对基板进行脱扣的基板支撑组件和方法。 在一个实施例中,支撑组件包括具有支撑表面的基板支撑件,第一组提升销和可移动地设置穿过基板支撑件的一个或多个其他提升销。 当销处于致动位置时,第一组提升销和一个或多个提升销从支撑表面突出。 当处于致动位置时,第一组提升销与支撑表面比一个或多个其他提升销突出较长的距离。 在本发明的另一方面,提供了一种用于从基板支撑件去除基板的方法。 在一个实施例中,该方法包括以下步骤:将第一组提升销投影在衬底支撑件的表面之上的第一距离处,并且将第二组提升销投影在衬底支撑件的表面上方的第二距离处,该第二组提升销小于 第一个距离。
    • 4. 发明授权
    • Motion picture camera having an auto-focus adjusting device
    • 具有自动对焦调节装置的电影摄像机
    • US4371240A
    • 1983-02-01
    • US188247
    • 1980-09-17
    • Ichiro ShimizuYoshio KomineMakoto Masunaga
    • Ichiro ShimizuYoshio KomineMakoto Masunaga
    • G03B13/36G02B7/09G02B7/28G02B7/30G03B3/00
    • G02B7/30G03B3/10
    • This application discloses a motion picture camera having an automatic focus (auto-focus) adjusting device for automatically focusing a shooting lens on an object. The motion picture camera includes a first manipulating means for selecting one mode of the following three modes, a first mode in which said auto-focus adjusting device is rendered inoperative so that the shooting lens can be manually focused; a second mode in which, in response to the camera release, the shooting lens can be auto-focus adjusted by said auto-focus adjusting device only once and thereafter held at a locked position irrespective of variations in distance between the shooting lens and object; and a third mode in which, throughout a period of the camera release, the shooting lens can be continuously auto-focus adjusted by said auto-focus adjusting device, following the variations in distance between the shooting lens and object, and a second manipulating means effective only in said second and third modes for permitting the shooting lens to be auto-focus adjusted by said auto-focus adjusting device again only once during the camera release in the second mode and for holding the shooting lens at its locked position irrespective of the camera release in the third mode.
    • 本申请公开了一种具有自动对焦(自动对焦)调节装置的电影摄像机,用于将拍摄镜头自动聚焦在物体上。 该动态影像摄像机包括用于选择以下三种模式的一种模式的第一操作装置,其中所述自动对焦调节装置不工作的第一模式,使得可以手动聚焦拍摄镜头; 第二模式,其中响应于相机释放,拍摄镜头可以仅由所述自动对焦调节装置自动调焦一次,然后保持在锁定位置,而与拍摄镜头和物体之间的距离的变化无关; 以及第三模式,其中在照相机释放的整个周期期间,根据拍摄镜头和物体之间的距离的变化,可以通过所述自动对焦调节装置连续自动调节拍摄镜头和第二操纵装置 仅在所述第二和第三模式中有效,以便在第二模式期间在相机释放期间仅允许通过所述自动对焦调整装置自动对焦的拍摄镜头一次,并且用于将拍摄镜头保持在其锁定位置,而不管 相机在第三种模式下释放。
    • 9. 发明授权
    • Motion picture camera
    • 电影摄影机
    • US4134648A
    • 1979-01-16
    • US724453
    • 1976-09-17
    • Ichiro Shimizu
    • Ichiro Shimizu
    • G03B31/00G03B31/02
    • G03B31/02
    • The present invention relates to a motion picture camera which includes a film feeding device for intermittently feeding a film for recording picture information on the film and the sound information on the film exposing part of the film. A sound recording device for recording sound information on the film, and a film constant speed feeding device for feeding the film to the sound recording position of the sound recording device at a constant speed are provided. A driving motor for driving the film constant speed feeding device and a reduction gear mechanism is provided between the driving motor and the film constant speed feeding device, whereby the driving power of the driving motor is transmitted to the film constant speed feeding device through the reduction gear mechanism in such a manner that the film constant speed feeding device is rotated at a constant speed.
    • 本发明涉及一种电影摄像机,其包括用于间歇地馈送用于在胶片上记录图像信息的胶片的胶片馈送装置以及胶片曝光部分的声音信息。 提供了一种用于在胶片上记录声音信息的声音记录装置,以及用于以一定的速度将胶片馈送到​​声音记录装置的声音记录位置的胶片定速供给装置。 在驱动电动机和膜定速供给装置之间,设置有用于驱动胶片恒速供给装置和减速机构的驱动电动机,由此驱动电动机的驱动力通过减速传递到膜定速供给装置 齿轮机构以这样的方式使胶片恒速供给装置以恒定速度旋转。