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    • 5. 发明申请
    • Thin Film Permeation Barrier For Devices And Substrates
    • 用于器件和基板的薄膜渗透屏障
    • US20130202782A1
    • 2013-08-08
    • US13365921
    • 2012-02-03
    • Prashant MandlikRuiqing MaJeff Silvernail
    • Prashant MandlikRuiqing MaJeff Silvernail
    • H05B33/10
    • H05B33/10C23C16/401H01L51/5253
    • A method for fabricating a device having a barrier layer over a substrate is provided. A first sublayer of the barrier layer may be deposited via chemical vapor deposition using a first set of deposition parameters. The first set of deposition parameters may include a power density, a deposition pressure, a non-deposition gas flow rate and a deposition gas flow rate. One or more parameters may be set related to the flow ratio of non-deposition gas to deposition gas multiplied by the power density, or the power density divided by (1) the deposition pressure, (2) the sum of the non-deposition gas flow rate and the deposition gas flow rate, or (3) the precursor gas flow rate. The material of the first barrier layer may be selected to have a particular plasma etch rate compared to the etch rate of thermally growth silicon oxide under the same etching conditions.
    • 提供一种制造在衬底上具有阻挡层的器件的方法。 可以使用第一组沉积参数通过化学气相沉积来沉积阻挡层的第一子层。 第一组沉积参数可以包括功率密度,沉积压力,非沉积气体流速和沉积气体流速。 可以设置一个或多个参数,其与非沉积气体与沉积气体的流量乘以功率密度或功率密度除以(1)沉积压力相关,(2)非沉积气体的总和 流量和沉积气体流量,或(3)前体气体流速。 与相同蚀刻条件下的热生长氧化硅的蚀刻速率相比,第一阻挡层的材料可以被选择为具有特定的等离子体蚀刻速率。