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    • 9. 发明授权
    • Fin-like field effect transistor (FinFET) non-volatile random access memory (NVRAM) device with bottom erase gate
    • 鳍状场效应晶体管(FinFET)具有底部擦除栅极的非易失性随机存取存储器(NVRAM)器件
    • US08507974B2
    • 2013-08-13
    • US13115402
    • 2011-05-25
    • Po-Wei Liu
    • Po-Wei Liu
    • H01L29/792
    • H01L29/42328H01L27/11521H01L27/11568H01L29/42336H01L29/42344H01L29/42352H01L29/66795H01L29/66825H01L29/66833H01L29/785H01L29/7887H01L29/7923
    • A FinFET device and method for fabricating a FinFET device is disclosed. An exemplary FinFET device includes a semiconductor substrate; an insulator layer disposed over the semiconductor substrate; a fin structure disposed over the insulator layer, the fin structure having a source region, a drain region, and a channel region disposed between the source region and the drain region; a gate structure disposed adjacent to the channel region of the fin structure; and a doped region disposed in the semiconductor substrate below the channel region of the fin structure. The gate structure includes a first gate dielectric layer disposed adjacent to the fin structure, a second gate dielectric layer, a charge storing layer disposed between the first gate dielectric layer and the second gate dielectric layer, and a gate electrode layer disposed adjacent to the second gate dielectric layer.
    • 公开了一种用于制造FinFET器件的FinFET器件和方法。 示例性的FinFET器件包括半导体衬底; 设置在半导体衬底上的绝缘体层; 翅片结构,其设置在所述绝缘体层上,所述鳍结构具有源区域,漏极区域和设置在所述源极区域和所述漏极区域之间的沟道区域; 邻近鳍片结构的沟道区域设置的栅极结构; 以及掺杂区域,其布置在所述鳍结构的沟道区域下方的所述半导体衬底中。 栅极结构包括邻近翅片结构设置的第一栅极电介质层,第二栅极介电层,设置在第一栅极介电层和第二栅极电介质层之间的电荷存储层,以及邻近第二栅极电介质层设置的栅极电极层 栅介质层。