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1. 发明申请

US20050019709A1 Method and apparatus for maintaining a machine part 失效
标题翻译：用于维护机器部件的方法和装置
公开(公告)号：US20050019709A1
公开(公告)日：2005-01-27
申请号：US10797664
申请日：2004-03-11
申请人： Pieter Van Groos , Jan Hoogkamp , Josephus Vugts , Robert Livesey , Johannes Franssen , Albert Klomp , Johannes Petrus Vermeulen , Erik Loopstra
发明人： Pieter Van Groos , Jan Hoogkamp , Josephus Vugts , Robert Livesey , Johannes Franssen , Albert Klomp , Johannes Petrus Vermeulen , Erik Loopstra
IPC分类号： H01L21/677 , G03F7/20 , H01L21/027 , H01L21/683 , G03F9/00
CPC分类号： G03F7/70975 , G03F7/7075 , G03F7/70858 , G03F7/70991
摘要： A method of and apparatus for maintaining a machine part arranged in an interior space of a machine, where the interior space is kept at a first pressure and is separated from an environment having a second pressure via a load lock. The method includes transporting a machine part via the load lock out of the interior space and transporting via the load lock into the interior space one of the maintained machine part and a separate replacement machine part.
摘要翻译：一种用于保持设置在机器的内部空间中的机器部件的方法和设备，其中内部空间保持在第一压力并且经由负载锁定与具有第二压力的环境分离。该方法包括通过装载锁将机器部件运送出内部空间，并通过装载锁将其运送到维护的机器部件之一的内部空间和单独的替换机器部件中。

2. 发明申请

US20050002003A1 Lithographic apparatus and device manufacturing method 审中-公开
标题翻译：平版印刷设备和器件制造方法
公开(公告)号：US20050002003A1
公开(公告)日：2005-01-06
申请号：US10847656
申请日：2004-05-18
申请人： Jan Hoogkamp , Albert Klomp , Johannes Franssen
发明人： Jan Hoogkamp , Albert Klomp , Johannes Franssen
IPC分类号： G03F1/08 , G03F7/20 , H01L21/00 , H01L21/027 , G03B27/52
CPC分类号： G03F7/70933 , G03F7/70741 , G03F7/7075 , G03F7/70808 , H01L21/67017 , H01L21/67201
摘要： The present invention relates to a lithographic projection apparatus and a method for transferring an object via a load lock between a lithography patterning chamber and a second environment. The load lock forms an inner space that is enclosed by a wall that forms the inner space. The load lock includes a first door that faces the lithography patterning chamber and a second door that faces the second environment. The load lock is at least during part of the transfer vented with a gas that is essentially free from at least one of particles, oxygen, hydrocarbon, and H2O.
摘要翻译：本发明涉及光刻投影装置和通过光刻图案化室和第二环境之间的负载锁转移物体的方法。装载锁形成一个由形成内部空间的墙围住的内部空间。负载锁定包括面向光刻图案化室的第一门和面向第二环境的第二门。至少在传送的一部分期间，负载锁定与基本上没有颗粒，氧气，烃和H 2 O中的至少一种的气体排出。

3. 发明申请

US20050054217A1 Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock 有权
标题翻译：温度调节负载锁定，包括这种负载锁定的光刻设备以及制造具有这种负载锁定的基板的方法
公开(公告)号：US20050054217A1
公开(公告)日：2005-03-10
申请号：US10797608
申请日：2004-03-11
申请人： Albert Klomp , Jan Hoogkamp , Raimond Visser , Josephus Cornelius Vugts , Henricus Marie Vullings , Leo Kuipers , Johannes Franssen
发明人： Albert Klomp , Jan Hoogkamp , Raimond Visser , Josephus Cornelius Vugts , Henricus Marie Vullings , Leo Kuipers , Johannes Franssen
IPC分类号： H01L21/027 , G03F7/20 , H01L21/68 , H01L21/26
CPC分类号： G03F7/70975 , G03F7/7075 , G03F7/70858 , G03F7/70991 , Y10S414/135 , Y10S414/139
摘要： A load lock for a lithographic apparatus is arranged to transfer an object, like a substrate, into and from the lithographic apparatus. The load lock outer wall defining at least part of a load lock volume accommodating a support unit for supporting the object when in the load lock. The load lock also has a temperature conditioned structure to control the temperature of the object to a desired temperature at least before the object is transferred from the load lock towards the lithographic projection apparatus.
摘要翻译：用于光刻设备的负载锁被布置成将诸如基板的物体转移到光刻设备中和从光刻设备传送。负载锁定外壁限定装载锁定体积的至少一部分，该装载锁定容积容纳用于在加载锁定时支撑物体的支撑单元。负载锁还具有温度调节结构，至少在物体从负载锁转移到光刻投影装置之前将物体的温度控制在期望的温度。

4. 发明申请

US20060072108A1 Particle detection device, lithographic apparatus and device manufacturing method 失效
标题翻译：粒子检测装置，光刻设备及器件制造方法
公开(公告)号：US20060072108A1
公开(公告)日：2006-04-06
申请号：US11242146
申请日：2005-10-04
申请人： Johannes Onvlee , Raimond Visser , Peter Greve , Johannes Franssen , Erwin Verhagen
发明人： Johannes Onvlee , Raimond Visser , Peter Greve , Johannes Franssen , Erwin Verhagen
IPC分类号： G01N21/88
CPC分类号： G03F7/70916 , G01N21/94 , G01N21/956 , G03F7/7085
摘要： To enable differentiation between a particle and a ghost particle, a detector system resolves radiation from a ghost particle from radiation from an actual particle. The detector system outputs at least two detector signals corresponding to intensities of radiation being incident on different parts of the detector system or the detector system outputs at least two detector signals corresponding to intensities of radiation with different wavelengths being incident on the detector system. If radiation is received from a ghost particle, not each of the at least two detector signals has a level above a predetermined threshold level, whereas radiation received from a particle results in the signals having substantially a same level above a threshold level. The detector system may include a radiation detector device configured to generate the first detector signal in response to radiation incident on at least one predetermined part of the radiation detector device and a radiation blocking assembly configured to prevent radiation not originating from a particle from being incident on the predetermined part of the detector device.
摘要翻译：为了能够区分粒子和重影粒子，检测器系统从实际粒子的辐射中解析来自重影粒子的辐射。检测器系统输出对应于入射在检测器系统的不同部分上的辐射强度的至少两个检测器信号，或者检测器系统输出对应于不同波长的辐射强度入射在检测器系统上的至少两个检测器信号。如果从重影粒子接收到辐射，则并非所述至少两个检测器信号中的每一个具有高于预定阈值电平的电平，而从粒子接收的辐射导致信号具有高于阈值电平的基本上相同的电平。检测器系统可以包括辐射检测器装置，其被配置为响应于入射到辐射检测器装置的至少一个预定部分上的辐射而产生第一检测器信号;以及辐射阻挡组件，其被配置为防止不是源自颗粒的辐射被入射检测器装置的预定部分。

5. 发明申请

US20050281638A1 Insertion device, lithographic apparatus with said insertion device and device manufacturing method 失效
标题翻译：插入装置，具有所述插入装置的光刻装置和装置制造方法
公开(公告)号：US20050281638A1
公开(公告)日：2005-12-22
申请号：US10851647
申请日：2004-05-24
申请人： Leo Kuipers , Johannes Franssen
发明人： Leo Kuipers , Johannes Franssen
IPC分类号： B65G1/00 , B65G49/07 , G03F7/20 , H01L21/027 , H01L21/677 , H01L21/68
CPC分类号： G03F7/7075 , H01L21/67742 , Y10S414/136 , Y10S414/139
摘要： A robot arm is presented, which inserts and removes an object from a conditioned environment using a carrier connected to the robot arm. The robot arm is positioned in a conditionable vessel, a wall of which vessel may deform when the interior is conditioned. Since the trajectory of the robot arm needs to be accurate, the robot arm is flexibly coupled to the vessel wall such that an orientation of the robot arm is independent from an orientation of the vessel wall. Further, a docking system is disclosed for use in a device comprising a robot arm having a carrier connected thereto.
摘要翻译：提出了一种机器人臂，其使用连接到机器人手臂的载体从调节环境中插入和移除物体。机器人臂位于可调节的容器中，当内部被调节时，其容器可能会变形。由于机器人手臂的轨迹需要准确，因此机器人手臂能够灵活地联接到血管壁上，使得机器人手臂的取向与血管壁的取向无关。此外，公开了一种用于装置的对接系统，该装置包括具有与其连接的载体的机器人手臂。

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