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    • 6. 发明申请
    • OPTICAL SYSTEM FOR DETECTING MOTION OF A BODY
    • 用于检测身体运动的光学系统
    • US20090153880A1
    • 2009-06-18
    • US11719561
    • 2005-11-16
    • Renatus Gerardus KlaverJohan Cornelis CompterPiet Van Der Meer
    • Renatus Gerardus KlaverJohan Cornelis CompterPiet Van Der Meer
    • G01B11/00
    • G03F7/70775G03F9/7003G03F9/7049
    • The invention relates to a system (1) for detecting motion of a body (2), said body comprising a first diffraction pattern (3A) and a second diffraction pattern (3B) with a predetermined orientation relative to said first diffraction pattern. The system comprises optical means (4A, 4B) adapted to provide at least a first incident beam to said first diffraction pattern to obtain a first diffracted beam from said first diffraction pattern and at least a second incident beam, with a predetermined orientation relative to said first incident beam, to said second diffraction pattern to obtain a second diffracted beam from said second diffraction pattern. The system has means for detecting motion of said body on the basis of the phase difference between at least one of said first diffracted beam and said second diffracted beam. Accordingly a larger in-plane rotation range is obtained for detecting motion of the body (2). The invention also relates to a wafer (2) provided with two-dimensional diffraction patterns (3A,3B) and a method for detecting motion of a body.
    • 本发明涉及一种用于检测主体(2)的运动的系统(1),所述主体包括相对于所述第一衍射图案具有预定取向的第一衍射图案(3A)和第二衍射图案(3B)。 该系统包括适于将至少第一入射光束提供给所述第一衍射图案以获得来自所述第一衍射图案的第一衍射光束和至少第二入射光束的光学装置(4A,4B),具有相对于所述第一衍射图案的预定取向 第一入射光束到所述第二衍射图案,以从所述第二衍射图案获得第二衍射光束。 该系统具有用于基于所述第一衍射光束和所述第二衍射光束中的至少一个之间的相位差来检测所述主体的运动的装置。 因此,为了检测身体(2)的运动,获得更大的面内旋转范围。 本发明还涉及具有二维衍射图案(3A,3B)的晶片(2)和用于检测身体运动的方法。