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    • 7. 发明申请
    • Monolithically integrated laser diode chip having a construction as a multiple beam laser diode
    • 具有构造为多光束激光二极管的单片集成激光二极管芯片
    • US20090122823A1
    • 2009-05-14
    • US12217100
    • 2008-06-30
    • Martin MullerGunther GronningerAlexander Behres
    • Martin MullerGunther GronningerAlexander Behres
    • H01S5/026H01S5/323
    • H01S5/4043H01S5/3095H01S5/3201H01S5/3211H01S5/3215H01S5/4018
    • A monolithically integrated laser diode chip having a construction as a multiple beam laser diode, which, on a semiconductor substrate (3) comprised of GaAs, has at least two laser stacks (4a, 4b, 4c) which are arranged one above another and which each contain an active zone (7). The active zone (7) is in each case arranged between waveguide layers (8). The waveguide layers (8) each adjoin a cladding layer (6) at a side remote from the active zone. At least one of the waveguide layers (8) or cladding layers (6) of at least one laser stack (4a, 4b, 4c), comprises AlxGa1-xAs, where 0≦x≦1, and at least one additional material from main group III or V, such that the lattice mismatch between the at least one waveguide layer (8) or cladding layer (6) comprising the at least one additional element and the semiconductor substrate (3) composed of GaAs is reduced. This increases the lifetime of the laser diode chip.
    • 具有构造为多光束激光二极管的单片集成激光二极管芯片,其在由GaAs构成的半导体衬底(3)上具有至少两个激光堆叠(4a,4b,4c) 每个都包含活动区域(7)。 有源区(7)分别布置在波导层(8)之间。 每个波导层(8)在远离有源区的一侧与包层(6)相邻。 至少一个激光堆叠(4a,4b,4c)的至少一个波导层(8)或覆层(6)包括Al x Ga 1-x As,其中0≤x≤1,以及至少一种附加材料 来自主组III或V,使得包括至少一个附加元件的至少一个波导层(8)或包层(6)与由GaAs构成的半导体衬底(3)之间的晶格失配减小。 这增加了激光二极管芯片的寿命。