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1. 发明授权

US6063245A Magnetron sputtering method and apparatus utilizing a pulsed energy pattern 失效
标题翻译：使用脉冲能量图案的磁控管溅射方法和装置
公开(公告)号：US6063245A
公开(公告)日：2000-05-16
申请号：US989246
申请日：1997-12-12
申请人： Peter Frach , Klaus Goedicke , Michael Junghahnel , Torsten Winkler , Friedel Haese , Dieter W. Meyer , Manfred Muller , Harald Strecker
发明人： Peter Frach , Klaus Goedicke , Michael Junghahnel , Torsten Winkler , Friedel Haese , Dieter W. Meyer , Manfred Muller , Harald Strecker
IPC分类号： C23C14/00 , C23C14/06 , C23C14/35 , C23C14/34
CPC分类号： C23C14/352 , C23C14/0036 , C23C14/0605
摘要： A procedure and apparatus for the application of carbon layers using reactive magnetron sputtering is described. The process includes sputtering of at least two targets made of carbon in a reactive atmosphere with a pulsed energy feed. During a pattern period of the pulses all targets (magnetrons) are once switched on as an anode and at least one target is switched as an anode at all times Various embodiments include detection and limitation of the "microarcs"; executing of regeneration processes according to fixed predetermined time intervals for at least 5 seconds. In one embodiment a microarc is detected on a magnetron and if a next pulse-off time is more than a selected time period away, then the magnetron is connected to a positive pole of the power supply. In another embodiment of the invention a pulsed negative voltage is applied to a substrate being sputtered by connecting the substrate to a negative pole of a pulsed power supply having a positive pole connected to a positive pole of a power supply for a magnetron. In another embodiment of the invention there is an electrode insulated from an installation mass which is connected to at least one positive pole of a power supply during the periodic pausing sputtering of substrates for regeneration.
摘要翻译：描述了使用反应性磁控溅射应用碳层的方法和装置。该方法包括在反应性气氛中用脉冲能量进料溅射由碳制成的至少两个靶。在脉冲的图案周期期间，所有目标（磁控管）一次作为阳极接通，并且至少一个目标始终作为阳极切换。各种实施例包括检测和限制“微型”; 根据固定的预定时间间隔执行至少5秒的再生处理。在一个实施例中，在磁控管上检测到微弧，并且如果下一个脉冲关闭时间大于所选择的时间段，则磁控管连接到电源的正极。在本发明的另一个实施例中，通过将衬底连接到具有连接到用于磁控管的电源的正极的正极的脉冲电源的负极来将脉冲负电压施加到正在溅射的衬底上。在本发明的另一个实施例中，存在与在用于再生的衬底的周期性暂停溅射期间连接到电源的至少一个正极的安装质量绝缘的电极。

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