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1. 发明授权

US07948636B2 Interferometer and method for measuring characteristics of optically unresolved surface features 有权
标题翻译：用于测量光学未解析表面特征的干涉仪和方法
公开(公告)号：US07948636B2
公开(公告)日：2011-05-24
申请号：US12701690
申请日：2010-02-08
申请人： Peter De Groot , Michael J Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
发明人： Peter De Groot , Michael J Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/02057 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/8422 , G03F7/70625
摘要： Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
摘要翻译：公开了一种干涉测量分析方法，其包括将可对应于测试对象的不同表面位置的多个干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中多个模型由一系列特征参数化或更多的未解决的测试对象的横向特征; 并基于该比较输出关于未解决的表面特征的信息。

2. 发明申请

US20100265516A1 INTERFEROMETER AND METHOD FOR MEASURING CHARACTERISTICS OF OPTICALLY UNRESOLVED SURFACE FEATURES 有权
标题翻译：用于测量光学非对称表面特征特征的干涉仪和方法
公开(公告)号：US20100265516A1
公开(公告)日：2010-10-21
申请号：US12701690
申请日：2010-02-08
申请人： Peter De Groot , Michael J. Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
发明人： Peter De Groot , Michael J. Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/02057 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/8422 , G03F7/70625
摘要： Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
摘要翻译：公开了一种干涉测量分析方法，其包括将可对应于测试对象的不同表面位置的多个干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中多个模型由一系列特征参数化或更多的未解决的测试对象的横向特征; 并基于该比较输出关于未解决的表面特征的信息。

3. 发明申请

US20080266574A1 INTERFEROMETER AND METHOD FOR MEASURING CHARACTERISTICS OF OPTICALLY UNRESOLVED SURFACE FEATURES 失效
标题翻译：用于测量光学非对称表面特征特征的干涉仪和方法
公开(公告)号：US20080266574A1
公开(公告)日：2008-10-30
申请号：US12017531
申请日：2008-01-22
申请人： Peter De Groot , Michael J. Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
发明人： Peter De Groot , Michael J. Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/02057 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/8422 , G03F7/70625
摘要： Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
摘要翻译：公开了一种干涉测量分析方法，其包括将可对应于测试对象的不同表面位置的多个干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中多个模型由一系列特征参数化或更多的未解决的测试对象的横向特征; 并基于该比较输出关于未解决的表面特征的信息。

4. 发明授权

US07684049B2 Interferometer and method for measuring characteristics of optically unresolved surface features 失效
标题翻译：用于测量光学未解析表面特征的干涉仪和方法
公开(公告)号：US07684049B2
公开(公告)日：2010-03-23
申请号：US12017531
申请日：2008-01-22
申请人： Peter De Groot , Michael J. Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
发明人： Peter De Groot , Michael J. Darwin , Robert Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/02057 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/8422 , G03F7/70625
摘要： Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
摘要翻译：公开了一种干涉测量分析方法，其包括将可对应于测试对象的不同表面位置的多个干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中，多个模型通过一系列与一个或更多的未解决的测试对象的横向特征; 并基于该比较输出关于未解决的表面特征的信息。

5. 发明授权

US07324214B2 Interferometer and method for measuring characteristics of optically unresolved surface features 有权
标题翻译：用于测量光学未解析表面特征的干涉仪和方法
公开(公告)号：US07324214B2
公开(公告)日：2008-01-29
申请号：US11525355
申请日：2006-09-21
申请人： Peter De Groot , Michael J Darwin , Robert T Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
发明人： Peter De Groot , Michael J Darwin , Robert T Stoner , Gregg M. Gallatin , Xavier Colonna De Lega
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/02057 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/8422 , G03F7/70625
摘要： Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
摘要翻译：公开了一种干涉测量分析方法，其包括将可对应于测试对象的不同表面位置的多个干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中，多个模型通过一系列与一个或更多的未解决的测试对象的横向特征; 并基于该比较输出关于未解决的表面特征的信息。

6. 发明授权

US07889355B2 Interferometry for lateral metrology 有权
标题翻译：侧向测量干涉测量
公开(公告)号：US07889355B2
公开(公告)日：2011-02-15
申请号：US11757720
申请日：2007-06-04
申请人： Xavier Colonna De Lega , Robert Stoner , Peter De Groot
发明人： Xavier Colonna De Lega , Robert Stoner , Peter De Groot
IPC分类号： G01B9/02
CPC分类号： G01B9/02063 , G01B9/02057 , G01B9/02087 , G01B9/0209
摘要： A method is disclosed which includes: using a scanning interferometry system, generating a sequence of phase-shifted interferometry images at different scan positions of an object comprising a buried surface, identifying a scan position corresponding to a position of best focus for the buried surface based on the sequence of phase-shifted interferometry images of the object, and generating a final image based on the phase-shifted interferometry images and the scan position, where the interferometric fringes in the final image are reduced relative to the interferometric fringes in the phase-shifted interferometry images.
摘要翻译：公开了一种方法，其包括：使用扫描干涉测量系统，在包括掩埋表面的物体的不同扫描位置处产生相移干涉测量图像序列，识别对应于掩埋表面的最佳焦点位置的扫描位置根据对象的相移干涉图像的序列，并且基于相移干涉测量图像和扫描位置生成最终图像，其中最终图像中的干涉条纹相对于相位干涉图像中的干涉条纹减小，移位干涉图像。

7. 发明授权

US07978337B2 Interferometer utilizing polarization scanning 有权
标题翻译：干涉仪利用偏振扫描
公开(公告)号：US07978337B2
公开(公告)日：2011-07-12
申请号：US12267077
申请日：2008-11-07
申请人： Peter De Groot , Xavier Colonna De Lega
发明人： Peter De Groot , Xavier Colonna De Lega
IPC分类号： G01B9/02 , G02B21/00
CPC分类号： G02B21/0004
摘要： In one aspect, the disclosure features methods that include using a microscope to direct light to a test object and to direct the light reflected from the test object to a detector, where the light includes components having orthogonal polarization states, varying an optical path length difference (OPD) between the components of the light, acquiring an interference signal from the detector while varying the OPD between the components, and determining information about the test object based on the acquired interference signal.
摘要翻译：在一个方面，本发明的特征在于包括使用显微镜将光引导到测试对象并将从测试对象反射的光引导到检测器的方法，其中光包括具有正交偏振态的分量，改变光路长度差（OPD），在改变组件之间的OPD的同时获取来自检测器的干扰信号，并且基于所获取的干扰信号确定关于测试对象的信息。

8. 发明授权

US07884947B2 Interferometry for determining characteristics of an object surface, with spatially coherent illumination 有权
标题翻译：用于确定物体表面特征的干涉测量，具有空间相干照明
公开(公告)号：US07884947B2
公开(公告)日：2011-02-08
申请号：US11758252
申请日：2007-06-05
申请人： Xavier Colonna De Lega , Peter De Groot
发明人： Xavier Colonna De Lega , Peter De Groot
IPC分类号： G01B11/02
CPC分类号： G01B9/02027 , G01B9/02043 , G01B9/02044 , G01B9/02057 , G01B9/02074 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/45 , G01B2290/70 , G01N21/211
摘要： Disclosed is an apparatus which includes: an interferometer configured to direct broadband spatially coherent test light to a test surface of a test object over a range of illumination angles and subsequently combine it with reference light to form an interference pattern, the test and reference light being derived from a common source; and multi-element detector; and one or more optics configured to direct at least a portion of the combined light to the detector so that different elements of the detector correspond to different illumination angles of a region of the test surface illuminated by the test light.
摘要翻译：公开了一种装置，其包括：干涉仪，其被配置为在宽度范围的照射角度下将宽带空间相干测试光引导到测试对象的测试表面，并随后将其与参考光组合以形成干涉图案，所述测试和参考光为源自一个共同的来源; 多元素检测器; 以及一个或多个光学器件，被配置为将组合的光的至少一部分引导到检测器，使得检测器的不同元件对应于由测试光照射的测试表面的区域的不同照明角度。

9. 发明授权

US06195168B1 Infrared scanning interferometry apparatus and method 有权
标题翻译：红外扫描干涉测量装置及方法
公开(公告)号：US06195168B1
公开(公告)日：2001-02-27
申请号：US09514215
申请日：2000-02-25
申请人： Xavier Colonna De Lega , Peter De Groot , Leslie L. Deck
发明人： Xavier Colonna De Lega , Peter De Groot , Leslie L. Deck
IPC分类号： G01B0902
CPC分类号： G01B9/02039 , G01B9/02024 , G01B9/02082 , G01B9/0209 , G01B11/2441
摘要： The invention features an interferometry system for a measuring a surface profile or thickness of a measurement object. In one aspect, the interferometry system includes: a broadband infrared source which during operation generates broadband infrared radiation including central wavelengths greater than about 1 micron; a scanning interferometer which during operation directs a first infrared wavefront along a reference path and a second infrared wavefront along a measurement path contacting the measurement object, and, after the second wavefront contacts the measurement object, combines the wavefronts to produce an optical interference pattern, the first and second infrared wavefronts being derived from the broadband infrared radiation; a detector producing data in response to the optical interference pattern; and a controller which during operation causes the scanning interferometer to vary the optical path difference between the reference and measurement paths over a range larger than the coherence length of the broadband source and analyzes the data as a function of the varying optical path difference to determine the surface profile.
摘要翻译：本发明的特征在于用于测量测量对象的表面轮廓或厚度的干涉测量系统。在一个方面，干涉测量系统包括：宽带红外光源，其在操作期间产生包括大于约1微米的中心波长的宽带红外辐射; 扫描干涉仪，其在操作期间沿着参考路径引导第一红外波前沿，并沿着与所述测量对象接触的测量路径引导第二红外波前，并且在所述第二波前接触所述测量对象之后，组合所述波前以产生光学干涉图案，第一和第二红外波前是从宽带红外辐射得到的; 响应于光学干涉图案产生数据的检测器; 以及控制器，其在操作期间使得扫描干涉仪在大于宽带源的相干长度的范围上改变参考和测量路径之间的光程差，并且根据变化的光程差分析数据以确定表面轮廓。

10. 发明授权

US08248617B2 Interferometer for overlay measurements 失效
标题翻译：用于覆盖测量的干涉仪
公开(公告)号：US08248617B2
公开(公告)日：2012-08-21
申请号：US12427079
申请日：2009-04-21
申请人： Peter De Groot , Jan Liesener , Xavier Colonna De Lega
发明人： Peter De Groot , Jan Liesener , Xavier Colonna De Lega
IPC分类号： G01B11/02
CPC分类号： G01B9/02084 , G01B9/02057 , G01B9/0209 , G01B2290/70 , G01N21/95607 , G03F7/70633 , Y10T29/49004
摘要： In general, in a first aspect, the invention features a system including an interferometer configured to direct test light to an overlay target and subsequently combine it with reference light to form an interference pattern, the test and reference light being derived from a common source, a multi-element detector, one or more optics to image the overlay target on the multi-element detector; and an electronic processor in communication with the multi-element detector. The overlay target includes a first pattern and a second pattern and the electronic processor is configured to determine information about the relative alignment between the first and second patterns.
摘要翻译：通常，在第一方面，本发明的特征在于一种包括干涉仪的系统，该干涉仪被配置为将测试光引导到覆盖目标，并随后将其与参考光组合以形成干涉图案，测试和参考光源自公共源，多元素检测器，用于对多元件检测器上的覆盖目标进行成像的一个或多个光学元件; 以及与多元件检测器通信的电子处理器。覆盖目标包括第一图案和第二图案，并且电子处理器被配置为确定关于第一图案和第二图案之间的相对对准的信息。

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