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    • 1. 发明授权
    • Carbon overcoat for a slider with improved step coverage
    • 用于滑块的碳涂层,具有改进的台阶覆盖
    • US5943187A
    • 1999-08-24
    • US878976
    • 1997-06-18
    • Pei C. ChenCherngye HwangVedantham RamanJila Tabib
    • Pei C. ChenCherngye HwangVedantham RamanJila Tabib
    • G11B5/10G11B5/255G11B5/31G11B5/39G11B5/60G11B5/72G11B5/82G11B5/84
    • G11B5/6005G11B5/10G11B5/255G11B5/3106G11B5/3967G11B5/72G11B5/82G11B5/8408
    • A method is provided for applying an overcoat to a slider and sensitive elements of a magnetic head which has improved coverage, reduced spacing loss and improved corrosion resistance. After lapping, an overcoat material is sputter deposited on the air bearing surface (ABS) of the slider, followed by a step of sputter etching the overcoat. The sputter etching redeposits material from high points on the slider and fills in trenches formed during the lapping process. The redeposition of the overcoat from the high places to the low places of the slider decreases the overall thickness of the overcoat, thereby decreasing spacing loss. The filling of the trenches implements increased coverage which increases wear resistance of the slider and more adequately protects the sensitive elements of the magnetic head from corrosion. In a preferred embodiment, a portion of the overcoat is left on the high places to ensure that the sputter etching does not damage the sensitive elements of the magnetic head. If the overcoat is completely etched from the high places an optional second overcoat may be applied which is thinner than the first overcoat. This method may also be applied to other articles such as a magnetic disk.
    • 提供了一种将外涂层施加到滑块和磁头的敏感元件的方法,其具有改进的覆盖范围,减小的间隔损耗和改善的耐腐蚀性。 研磨后,将外涂层材料溅射沉积在滑块的空气轴承表面(ABS)上,随后溅射蚀刻外涂层。 溅射蚀刻从滑块上的高点重新沉积材料,并填充研磨过程中形成的沟槽。 外涂层从滑块的高处重新沉积到滑块的低处降低了外涂层的总厚度,从而减小了间隔损耗。 沟槽的填充实现增加的覆盖,增加滑块的耐磨性,并更充分地保护磁头的敏感元件不被腐蚀。 在优选实施例中,外涂层的一部分留在高处,以确保溅射蚀刻不会损坏磁头的敏感元件。 如果外涂层从高处完全蚀刻,则可以施加比第一外涂层更薄的任选的第二外涂层。 该方法也可以应用于诸如磁盘的其它物品。