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1. 发明申请

US20120170103A1 Spatial Light Modulators and Fabrication Techniques 审中-公开
标题翻译：空间光调制器和制作技术
公开(公告)号：US20120170103A1
公开(公告)日：2012-07-05
申请号：US12983199
申请日：2010-12-31
申请人： Pavan Gupta , Gabriel Matus , Vlad Novotny
发明人： Pavan Gupta , Gabriel Matus , Vlad Novotny
IPC分类号： G02B26/00 , B32B38/04
CPC分类号： G02B26/0841 , Y10T156/1052
摘要： We describe a method of fabricating an optical MEMS spatial light modulator (SLM). The method comprises providing an optical MEMS SLM wafer bearing multiple optical MEMS SLM devices and spin coating a glass wafer with an organic adhesive, in some preferred embodiments benzocyclobutene. The adhesive is patterned, preferably by uv lithography, to define multiple ring-shaped bond lines each sized to fit around one of the SLM devices, and the glass wafer is then bonded to the MEMS SLM wafer, preferably at a temperature of between 100° C. and 450° C., such that each of the ring-shaped bond lines encompasses a respective SLM device. A portion of the glass wafer adjacent an SLM device is then removed to reveal electrical connectors to the device and the devices are tested before dicing and packaging, to enable selective packaging of working devices.
摘要翻译：我们描述了一种制造光学MEMS空间光调制器（SLM）的方法。该方法包括提供具有多个光学MEMS SLM器件的光学MEMS SLM晶片，并且在一些优选实施方案中，使用有机粘合剂旋转涂覆玻璃晶片，苯并环丁烯。将粘合剂图案化，优选通过紫外光刻法来限定多个环形接合线，每个环形接合线的尺寸适合于围绕一个SLM器件，并且然后将玻璃晶片接合到MEMS SLM晶片，优选地在100°的温度 C.和450℃，使得每个环形接合线包括相应的SLM装置。然后移除与SLM装置相邻的玻璃晶片的一部分以露出与装置的电连接器，并且在切割和包装之前对装置进行测试，以便能够选择性地包装工作装置。

2. 发明授权

US07652384B2 Fabricating tall micro structures 有权
标题翻译：制造高微结构
公开(公告)号：US07652384B2
公开(公告)日：2010-01-26
申请号：US11680600
申请日：2007-02-28
申请人： Gabriel Matus , Vlad Novotny
发明人： Gabriel Matus , Vlad Novotny
IPC分类号： H01L23/29
CPC分类号： G03F7/0035 , B81C1/00619 , B81C2201/032 , B81C2203/0109 , B81C2203/019
摘要： A micro structure includes a seed electrode layer on a substrate and a plurality of conductive layers on the seed electrode layer. The combined thickness of the seed electrode layer and the plurality of conductive layers can be more than 0.1 mm and the lateral dimensions of the seed electrode layer and the plurality of conductive layers vary less than 20% along the direction normal to a surface of the substrate and the micro structure has striations on an outer surface.
摘要翻译：微结构包括在基底上的种子电极层和种子电极层上的多个导电层。种子电极层和多个导电层的组合厚度可以大于0.1mm，并且种子电极层和多个导电层的横向尺寸沿着垂直于衬底表面的方向变化小于20％并且微结构在外表面上具有条纹。

3. 发明申请

US20120134006A1 METHOD FOR REDUCING SPECKLE PATTERN IN DISPLAY IMAGES 有权
标题翻译：减少显示图像中的斑块图案的方法
公开(公告)号：US20120134006A1
公开(公告)日：2012-05-31
申请号：US13368123
申请日：2012-02-07
申请人： Vlad Novotny , Gabriel Matus , Michel Combes
发明人： Vlad Novotny , Gabriel Matus , Michel Combes
IPC分类号： G02B27/48 , G02F1/11 , G02B26/00 , G02F1/01
CPC分类号： G02B27/48 , H04N9/3161
摘要： A display system includes a coherent light source that can emit a coherent light beam, a de-speckling device configured to distort a wavefront of the coherent light beam to produce a distorted coherent light beam, and a two-dimensional array of light modulators that can selectively modulate the distorted coherent light beam to select a plurality of pixels for display.
摘要翻译：显示系统包括可发射相干光束的相干光源，被配置为使相干光束的波前畸变以产生失真的相干光束的去斑点装置，以及能够选择性地调制失真相干光束以选择多个像素进行显示。

4. 发明申请

US20100067088A1 REDUCING SPECKLE PATTERN IN DISPLAY IMAGES 有权
标题翻译：在显示图像中减少特征图
公开(公告)号：US20100067088A1
公开(公告)日：2010-03-18
申请号：US12209665
申请日：2008-09-12
申请人： Vlad Novotny , Gabriel Matus , Michel Combes
发明人： Vlad Novotny , Gabriel Matus , Michel Combes
IPC分类号： G02B27/48
CPC分类号： G02B27/48 , H04N9/3161
摘要： A display system includes a coherent light source that can emit a coherent light beam, a de-speckling device configured to distort a wavefront of the coherent light beam to produce a distorted coherent light beam, and a two-dimensional array of light modulators that can selectively modulate the distorted coherent light beam to select a plurality of pixels for display.
摘要翻译：显示系统包括可发射相干光束的相干光源，被配置为使相干光束的波前畸变以产生失真的相干光束的去斑点装置，以及能够选择性地调制失真相干光束以选择多个像素进行显示。

5. 发明申请

US20080220270A1 Fabricating Tall Micro Structures 有权
标题翻译：制造高微结构
公开(公告)号：US20080220270A1
公开(公告)日：2008-09-11
申请号：US11680600
申请日：2007-02-28
申请人： Gabriel Matus , Vlad Novotny
发明人： Gabriel Matus , Vlad Novotny
IPC分类号： G03C5/00 , B32B15/04
CPC分类号： G03F7/0035 , B81C1/00619 , B81C2201/032 , B81C2203/0109 , B81C2203/019
摘要： A micro structure includes a seed electrode layer on a substrate and a plurality of conductive layers on the seed electrode layer. The combined thickness of the seed electrode layer and the plurality of conductive layers can be more than 0.1 mm and the lateral dimensions of the seed electrode layer and the plurality of conductive layers vary less than 20% along the direction normal to a surface of the substrate and the micro structure has striations on an outer surface.
摘要翻译：微结构包括在基底上的种子电极层和种子电极层上的多个导电层。种子电极层和多个导电层的组合厚度可以大于0.1mm，并且种子电极层和多个导电层的横向尺寸沿着垂直于衬底表面的方向变化小于20％并且微结构在外表面上具有条纹。

6. 发明授权

US08810886B2 Method for reducing speckle pattern in display images 有权
标题翻译：减少显示图像斑点图案的方法
公开(公告)号：US08810886B2
公开(公告)日：2014-08-19
申请号：US13368123
申请日：2012-02-07
申请人： Vlad Novotny , Gabriel Matus , Michel Combes
发明人： Vlad Novotny , Gabriel Matus , Michel Combes
IPC分类号： G02F1/03 , G02F1/07 , G02F1/33
CPC分类号： G02B27/48 , H04N9/3161
摘要： A display system includes a coherent light source that can emit a coherent light beam, a de-speckling device configured to distort a wavefront of the coherent light beam to produce a distorted coherent light beam, and a two-dimensional array of light modulators that can selectively modulate the distorted coherent light beam to select a plurality of pixels for display.
摘要翻译：显示系统包括可发射相干光束的相干光源，被配置为使相干光束的波前畸变以产生失真的相干光束的去斑点装置，以及能够选择性地调制失真相干光束以选择多个像素进行显示。

7. 发明申请

US20090289349A1 HERMETIC SEALING OF MICRO DEVICES 审中-公开
标题翻译：微型器件的封闭密封
公开(公告)号：US20090289349A1
公开(公告)日：2009-11-26
申请号：US12124962
申请日：2008-05-21
申请人： Vlad Novotny , Gabriel Matus
发明人： Vlad Novotny , Gabriel Matus
IPC分类号： H01L23/48 , H01L21/66
CPC分类号： H01L23/10 , B81B7/0041 , B81C2203/0109 , B81C2203/019 , H01L23/057 , H01L24/48 , H01L2224/48091 , H01L2924/00014 , H01L2924/01078 , H01L2924/01079 , H01L2924/12041 , H01L2924/12044 , H01L2924/14 , H01L2924/1461 , H01L2924/16195 , H01L2924/16235 , H01L2924/181 , H01L2924/3025 , H01L2924/00 , H01L2924/00012 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
摘要： An encapsulated device includes a micro device on a substrate, a micro chamber that encapsulates the micro device on the substrate; and a layer of hermetic-sealing material that provides at least some degree of hermeticity on one or more outer surfaces of the micro chamber to at least partially hermetically seal the micro device in the micro chamber.
摘要翻译：封装装置包括：衬底上的微器件;将微器件封装在衬底上的微室; 以及一层密封材料，其在微室的一个或多个外表面上提供至少一定程度的气密性，以至少部分气密地密封微室中的微器件。

8. 发明授权

US08134770B2 Reducing speckle pattern in display images 有权
标题翻译：减少显示图像中的斑点图案
公开(公告)号：US08134770B2
公开(公告)日：2012-03-13
申请号：US12209665
申请日：2008-09-12
申请人： Vlad Novotny , Gabriel Matus , Michel Combes
发明人： Vlad Novotny , Gabriel Matus , Michel Combes
IPC分类号： G02F1/03 , G02F1/07 , G02F1/29 , G02B26/08
CPC分类号： G02B27/48 , H04N9/3161
摘要： A display system includes a coherent light source that can emit a coherent light beam, a de-speckling device configured to distort a wavefront of the coherent light beam to produce a distorted coherent light beam, and a two-dimensional array of light modulators that can selectively modulate the distorted coherent light beam to select a plurality of pixels for display.
摘要翻译：显示系统包括可发射相干光束的相干光源，被配置为使相干光束的波前畸变以产生失真的相干光束的去斑点装置，以及能够选择性地调制失真相干光束以选择多个像素进行显示。

9. 发明申请

US20100291410A1 Corrosion Protection and Lubrication of MEMS Devices 审中-公开
标题翻译： MEMS器件的腐蚀保护和润滑
公开(公告)号：US20100291410A1
公开(公告)日：2010-11-18
申请号：US12465573
申请日：2009-05-13
申请人： Vlad Novotny , Gabriel Matus
发明人： Vlad Novotny , Gabriel Matus
IPC分类号： B32B9/00 , B05D5/12
CPC分类号： G02B26/0841 , B81B3/0075 , B81B2201/047
摘要： Systems and methods, such as for a MEMS device, can include a component having a contact portion that includes on one side a layer including hydrophilic functional groups and a coating formed on the layer. The coating can include hydrophilic functional groups adapted to interact with the hydrophilic functional groups of the layer. The coating can also include hydrophobic functional groups opposite the hydrophilic functional groups of the coating. The layer can be bonded to the component, and the coating can be bonded to the layer. The coating can be adapted to be formed on the layer while in vapor form and can include a lubricant. The layer can be an atomic monolayer or multilayer, such as of aluminum oxide, and the coating can include a fluorinated acid, such as perfluorodecanoic acid.
摘要翻译：诸如用于MEMS器件的系统和方法可以包括具有接触部分的部件，该部分在一侧包括包含亲水性官能团的层和形成在该层上的涂层。涂层可以包括适于与层的亲水性官能团相互作用的亲水性官能团。涂层还可以包括与涂层的亲水性官能团相对的疏水官能团。该层可以结合到组分上，并且涂层可以结合到该层。涂层可以适于在蒸气形式的层上形成并且可以包括润滑剂。该层可以是原子单层或多层，例如氧化铝，并且涂层可以包括氟化酸，例如全氟癸酸。

10. 发明申请

US20080061026A1 GIMBAL-LESS MICRO-ELECTRO-MECHANICAL-SYSTEM TIP-TILT AND TIP-TILT-PISTON ACTUATORS AND A METHOD FOR FORMING THE SAME 有权
标题翻译：无微机电机械系统倾斜和倾斜活塞式致动器及其形成方法
公开(公告)号：US20080061026A1
公开(公告)日：2008-03-13
申请号：US11938197
申请日：2007-11-09
申请人： Veljko Milanovic , Gabriel Matus
发明人： Veljko Milanovic , Gabriel Matus
IPC分类号： H01L21/461 , C23F1/00 , H01L21/302
CPC分类号： G02B26/0841 , B81B3/0062
摘要： Fully monolithic gimbal-less micro-electro-mechanical-system (MEMS) devices with large static optical beam deflection and fabrications methods are disclosed. The devices can achieve high speed of operation for both axes. Actuators are connected to a device, or device mount by linkages that allow static two-axis rotation in addition to pistoning without the need for gimbals, or specialized isolation technologies. The device may be actuated by vertical comb-drive actuators, which are coupled by bi-axial flexures to a central micromirror or device mount. Devices may be fabricated by etching an upper layer both from the top side and from the bottom side to form beams at different levels. The beams include a plurality of lower beams, a plurality of full-thickness beams, and a plurality of upper beams, the lower, full-thickness and upper beams That form vertical combdrive actuators, suspension beams, flexures, and a device mount.
摘要翻译：公开了具有大静态光束偏转和制造方法的完全整体式万向节微机电系统（MEMS）装置。这些设备可以实现两个轴的高速运行。执行器通过连接件连接到设备或设备安装件，除了活塞之外，还可以进行静态双轴旋转，而不需要万向节或专门的隔离技术。该装置可以由垂直梳状驱动致动器致动，其通过双轴向挠曲联接到中心微镜或装置安装座。可以通过从顶侧和底侧蚀刻上层来形成不同级别的波束来制造器件。梁包括多个下梁，多个全厚度梁和多个上梁，下，全厚和上梁，其形成垂直梳齿驱动致动器，悬架梁，挠曲件和装置安装件。

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